JPS61170635A - Method and instrument for measuring optical flare - Google Patents

Method and instrument for measuring optical flare

Info

Publication number
JPS61170635A
JPS61170635A JP1095085A JP1095085A JPS61170635A JP S61170635 A JPS61170635 A JP S61170635A JP 1095085 A JP1095085 A JP 1095085A JP 1095085 A JP1095085 A JP 1095085A JP S61170635 A JPS61170635 A JP S61170635A
Authority
JP
Japan
Prior art keywords
optical system
measured
light source
flare
point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1095085A
Other languages
Japanese (ja)
Other versions
JPH0445064B2 (en
Inventor
Mitsumasa Masutani
増谷 光正
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Steel Works Ltd
Technical Research and Development Institute of Japan Defence Agency
Original Assignee
Japan Steel Works Ltd
Technical Research and Development Institute of Japan Defence Agency
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Steel Works Ltd, Technical Research and Development Institute of Japan Defence Agency filed Critical Japan Steel Works Ltd
Priority to JP1095085A priority Critical patent/JPS61170635A/en
Publication of JPS61170635A publication Critical patent/JPS61170635A/en
Publication of JPH0445064B2 publication Critical patent/JPH0445064B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • G01M11/0285Testing optical properties by measuring material or chromatic transmission properties

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)

Abstract

PURPOSE:To enable exact flare measurement even in optical measurement in which a target cannot be made in the case of visible light like in a UV or IR optical system by constituting a titled instrument in such a manner as to measure the flare by using a spot light source. CONSTITUTION:The light from a spot light source 21 passes through an optical system 25 to be measured and forms the spot image distribution of the spot light source on the video plane 26 thereof. The video plane thereof is vertically and horizontally scanned two-dimensionally by a point detector 27 and the function G (x, y) of the spot image intensity distribution 26a on the video plane is measured. The light signal within the size of the detector 27 is integrated by the detector itself and therefore the measurement is executed by the two-dimensional scanning at the pitch of the point detector size. The total integrated value of the spot image intensity is determined and the flare quantity of the optical system to be measured is determined from the ratio between the remaining part after subtracting the part corresponding to the dark black part from the total integrated value and the total integrated value.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、光学系(可視光又は非可視光)のフレア(ベ
ーリンググレアともいう)を測定する方法及びその装置
に関する。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a method and apparatus for measuring flare (also referred to as Bering glare) of an optical system (visible light or non-visible light).

(従来の技術) フレアは、光学系内のレンズエレメントなどでの光散乱
により映像のコントラストを悪(する原因であり、暗視
装置や赤外線装置の光学系では分解能とともに重要な評
価要素である。
(Prior Art) Flare is a cause of poor image contrast due to light scattering by lens elements in the optical system, and is an important evaluation element along with resolution in the optical systems of night vision devices and infrared devices.

従来、この種の光学系フレアの測定法及び装置として、
可視光学系に関する第3図に示す構成が知られているに
の第3図において、1はスクリーンで、該スクリーン1
上には暗黒部2が設けられている。3はスクリーン1上
を一様に照らす照明装置、5は被測定光学系である。こ
の被測定光学M5の標的が前記暗黒部2を有するスクリ
ーン1であり、6は被測定光学系の映像面、6aは測定
された映像面の光強度を表す像面信号強度分布である。
Conventionally, this type of optical system flare measurement method and device include:
The configuration shown in FIG. 3 regarding a visible optical system is known. In FIG. 3, 1 is a screen;
A dark area 2 is provided above. 3 is a lighting device that uniformly illuminates the screen 1, and 5 is an optical system to be measured. The target of the optical system to be measured M5 is the screen 1 having the dark portion 2, 6 is the image plane of the optical system to be measured, and 6a is the image plane signal intensity distribution representing the measured light intensity of the image plane.

ここで、可視光学系に用いられている第3図に示した従
来のフレアの測定方法について説明する。
Here, a conventional flare measuring method shown in FIG. 3 used in a visible optical system will be explained.

被測定光学系5の視野より十分に大きなスクリーン1の
中に光の反射のない穴等によって形成された暗黒部2を
設けておき、このスクリーン1を均一に照明する。この
スクリーン1を被測定光学系5により観測し、その映像
面6の光強度を測定する。そのとき、映像面の光強度を
表す像面信号強度分布6aのスクリーン像に対応する暗
黒部I (b)と明るい部分I (o)との信号強度比
I (b)/ I (o)をもって被測定光学系のフレ
アとする。
A dark area 2 formed by a hole or the like in which no light is reflected is provided in a screen 1 that is sufficiently larger than the field of view of the optical system 5 to be measured, and this screen 1 is uniformly illuminated. This screen 1 is observed by an optical system to be measured 5, and the light intensity of the image plane 6 is measured. At that time, the signal intensity ratio I (b)/I (o) between the dark part I (b) and the bright part I (o) corresponding to the screen image of the image plane signal intensity distribution 6a representing the light intensity on the image plane is given. Let it be the flare of the optical system to be measured.

(発明が解決しようとする問題点) ところで、従来のフレア測定装置は、可視光学系につい
て構成されているので、被測定光学系の標的として大き
なスクリーンを用いているが、赤外線光学系のフレア測
定の場合、このような光源は製作できない。たとえ、天
外なヒートパネルを作りこの中に暗黒部を設けても、こ
の暗黒部を絶対零度(−273℃)にしなければならず
、このような標的は実現不可能である。
(Problems to be Solved by the Invention) By the way, conventional flare measurement devices are configured with a visible optical system, and therefore use a large screen as a target for the optical system to be measured. In this case, such a light source cannot be manufactured. Even if we were to create an extraordinary heat panel and provide a dark area within it, this dark area would have to be at absolute zero (-273 degrees Celsius), making such a target impossible to achieve.

(問題点を解決するための手段) 本発明は、上記のような従来の欠点を除去するためにな
されたもので、点光源を標的として用い、被測定光学系
(可視光、非可視光)によって結像された映像面の点像
強度分布に関してその積分値を求め、該積分値から前記
第3図のスクリーン(面光源)における暗黒部に相当す
る部分を差し引いた点像強度分布の残りの部分と、前記
積分値との比を計測することによって、従来の測定と同
じ測定ができ、しかも赤外線光学系のように可視光の場
合のごとき標的の作れない光学測定においても正確なフ
レア測定ができる光学系フレアの測定法及び装置を提供
しようとするものである。
(Means for Solving the Problems) The present invention was made to eliminate the above-mentioned conventional drawbacks, and uses a point light source as a target to The integral value of the point spread intensity distribution on the image plane imaged by By measuring the ratio between the area and the integral value, it is possible to perform the same measurements as conventional measurements, and it is also possible to accurately measure flare even in optical measurements where targets cannot be created, such as in the case of visible light such as infrared optical systems. The present invention aims to provide a method and apparatus for measuring optical system flare.

まず、本発明の詳細な説明を第1図について行う。この
図において、21は標的としての点光源、25は被測定
光学系、26は被測定光学系の映像面、27はポイント
検出器、26aは映像面を検出器27によQ L+3’
方向2次元に計測した点像強度分布である。なお、点線
で示すスクリーン1及び暗黒部2は本発明の測定では不
必要であるが、従来の第3図の構成で使用したスクリー
ンとその暗黒部の位置を表している。
First, a detailed explanation of the present invention will be given with reference to FIG. In this figure, 21 is a point light source as a target, 25 is an optical system to be measured, 26 is an image plane of the optical system to be measured, 27 is a point detector, and 26a is a point light source that serves as a target.
This is a point spread intensity distribution measured in two dimensions. Although the screen 1 and the dark area 2 shown by dotted lines are unnecessary in the measurement of the present invention, they represent the screen used in the conventional configuration of FIG. 3 and the position of its dark area.

さて、点光源21の光(可視光、又は赤外線、紫外線等
の非可視光)は被測定光学系25を通り、その映像面2
6に点光源の点像分布を作る。その映像面をポイント検
出器27によって縦横2次元に走査し、映像面上の点像
強度分布26aの関数G(x、y)を測定する。このと
き、ポイント検出器27の大きさ内の光信号は検出器自
身が積分しているので、計測はポイント検出器サイズの
ピッチ、  で2次元に走査する。従来の第3図の場合
に用いられる面光源(照明されたスクリーン)は点光源
の集合であるから、従来の場合の暗黒部を埋めるフレア
量I (b)/ I (o)は、本発明では式(1)に
示すように、点像強度の全積分値を求め、全積分値から
暗黒部に対応する部分(第1図の幅dの部分)を差し引
いた残りの部分(第1図の新線部)と、前記全積分値と
の比で表すことができる。但し、前記幅dの値は通常光
学系の視角のおよそ1度乃至2度に選ばれる。
Now, the light (visible light or non-visible light such as infrared rays and ultraviolet rays) from the point light source 21 passes through the optical system 25 to be measured, and the image plane 2
6. Create the point spread distribution of the point light source. The image plane is scanned two-dimensionally in the vertical and horizontal directions by the point detector 27, and the function G(x, y) of the point spread intensity distribution 26a on the image plane is measured. At this time, since the optical signal within the size of the point detector 27 is integrated by the detector itself, measurement is performed by two-dimensional scanning at a pitch of the point detector size. Since the surface light source (illuminated screen) used in the conventional case shown in FIG. Now, as shown in equation (1), calculate the total integral value of the point spread intensity, subtract the part corresponding to the dark area (width d in Figure 1) from the total integral value, and calculate the remaining part (Figure 1). (new line part) and the total integral value. However, the value of the width d is usually selected to be approximately 1 to 2 degrees of the visual angle of the optical system.

(実施例) 次に、第2図で本発明の実施例の構成について説明する
。この第2図において、点光源31からの赤外線は、赤
外線を断続するチ1ツバ−32により断続光にされた後
、光源を必要な大きさに(十分小さな点状となるように
)規定するアパーチャ33から光学フィルター34を経
て放射される。
(Example) Next, the configuration of an example of the present invention will be described with reference to FIG. In FIG. 2, infrared rays from a point light source 31 are made into intermittent light by a chip 32 that interrupts infrared rays, and then the light source is defined to the required size (so that it becomes a sufficiently small point). The light is emitted from the aperture 33 through an optical filter 34.

被測定光学系35を通った赤外線は光学系映像面36に
点像分布を作る。赤外線検出器37はコントローラ38
によってx、y方向の2次元走査を自動的に行うXY微
動ステージ39上に設けられ、前記映像面を走査し点像
強度分布を計測する。このとき、走査のピッチは赤外線
検出器サイズで行う。この計測信号はロックインアンプ
40に入力される。ロックインアンプ40は前記チョッ
パー32よりの同期信号Sを受け、チョッパー32を赤
外線が通過している期間のみ増幅動作を行うものである
。ロックインアンプ40の出力はさらにログアンプ(対
数増幅器)41で増幅された後、AD変換器42でディ
ジタル信号に変換され、計算8!43で積算される。該
計算機43は前述の式(1)に基づきフレア量を算出し
、プリンター、プロッター等の表示装置44に表示する
The infrared rays that have passed through the optical system 35 to be measured create a point spread distribution on the optical system image plane 36. The infrared detector 37 is connected to the controller 38
It is provided on an XY fine movement stage 39 that automatically performs two-dimensional scanning in the x and y directions, and scans the image plane to measure the point spread intensity distribution. At this time, the scanning pitch is set to the size of the infrared detector. This measurement signal is input to the lock-in amplifier 40. The lock-in amplifier 40 receives the synchronization signal S from the chopper 32 and performs an amplification operation only during the period when infrared rays are passing through the chopper 32. The output of the lock-in amplifier 40 is further amplified by a log amplifier (logarithmic amplifier) 41, then converted to a digital signal by an AD converter 42, and integrated in calculation 8!43. The calculator 43 calculates the amount of flare based on the above-mentioned equation (1), and displays it on a display device 44 such as a printer or plotter.

なお、上記実施例では、赤外線光学系のフレアを測定す
る場合を例示したが、本発明は赤外線光学系のみならず
、紫外線あるいは可視光の光学系のフレア測定も可能で
あることは明らかである。
In the above embodiment, the case of measuring flare of an infrared optical system was exemplified, but it is clear that the present invention is capable of measuring flare of not only an infrared optical system but also an ultraviolet or visible light optical system. .

(発明の効果) 以上説明したように、本発明によれば、点光源を用いて
フレアを測定するように構成したので、紫外線や赤外線
光学系など、従来の構成では実現できなかったものが簡
単な方法で容易に測定可能になるなどの効果があり、ま
た測定精度も高いものが得られる。さらに、標的は点光
源であるので製作が容易であり、可視光の測定に応用し
ても装置が安価でコンパクトにできる等の効果もある。
(Effects of the Invention) As explained above, according to the present invention, flares are measured using a point light source, which makes it easy to use ultraviolet and infrared optical systems that could not be achieved with conventional configurations. This method has the advantage of being able to be easily measured using a conventional method, and also provides high measurement accuracy. Furthermore, since the target is a point light source, it is easy to manufacture, and even when applied to the measurement of visible light, the device can be made inexpensive and compact.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明による光学系フレア測定の原理図、第2
図は本発明の光学系フレアの測定装置の実施例を示すブ
ロック図、第3図は従来の光学系フレア測定の原理図で
ある。 1・・・スクリーン、2・・・暗黒部、3・・・照明装
置、5.25.35・・・被測定光学系、6,26鵞3
6・・・映像面、6a・・・像面信号強度分布、21.
31・・・点光源、26a・・・点像強度分布、27.
37・・・検出器、32・・・チョッパー、33・・・
アパーチャ、34・・・光学フィルター、38・・・コ
ントローラ、39・・・XY微動ステージ、40・・・
ロックインアンプ、41・・・ログアンプ、42・・・
AD変換器、43・・・計算機、44・・・表示装置。
Figure 1 is a diagram of the principle of optical flare measurement according to the present invention, Figure 2
The figure is a block diagram showing an embodiment of the optical system flare measurement apparatus of the present invention, and FIG. 3 is a diagram showing the principle of conventional optical system flare measurement. 1...Screen, 2...Dark area, 3...Illuminating device, 5.25.35...Optical system to be measured, 6, 26 3
6... Image plane, 6a... Image plane signal intensity distribution, 21.
31... Point light source, 26a... Point spread intensity distribution, 27.
37...Detector, 32...Chopper, 33...
Aperture, 34... Optical filter, 38... Controller, 39... XY fine movement stage, 40...
Lock-in amplifier, 41...Log amplifier, 42...
AD converter, 43...computer, 44...display device.

Claims (2)

【特許請求の範囲】[Claims] (1)点光源を標的として用い、被測定光学系により結
像された点像強度分布に関してその積分値を求め、該積
分値から面光源における暗黒部に対応する部分を差し引
いた残りの部分と、前記積分値との比をもって前記被測
定光学系のフレア量とすることを特徴とする光学系フレ
アの測定法。
(1) Using a point light source as a target, find the integral value of the point image intensity distribution imaged by the optical system to be measured, and subtract the part corresponding to the dark area in the surface light source from the integral value, and then calculate the remaining part. , a method for measuring flare in an optical system, characterized in that the amount of flare of the optical system to be measured is determined by a ratio to the integral value.
(2)点光源と、該点光源の光を断続するチョッパーと
、被測定光学系を通った光による光学系像面上の点像強
度分布を前記光学系像面を走査することにより計測する
検出器と、該検出器の計測信号を前記チョッパーの動作
に同期して増幅するロックインアンプを有する増幅演算
手段とを備え、該増幅演算手段により前記点像強度分布
に関してその積分値を求め、該積分値から面光源におけ
る暗黒部に対応する部分を差し引いた残りの部分と、前
記積分値との比を演算することを特徴とする光学系フレ
アの測定装置。
(2) A point light source, a chopper that cuts off the light from the point light source, and a point image intensity distribution on the optical system image plane caused by the light that has passed through the optical system to be measured is measured by scanning the optical system image plane. comprising a detector and an amplification calculation means having a lock-in amplifier for amplifying a measurement signal of the detector in synchronization with the operation of the chopper, and calculating an integral value of the point spread intensity distribution by the amplification calculation means; An apparatus for measuring flare in an optical system, characterized in that the ratio of the integral value to the remaining portion after subtracting a portion corresponding to a dark area in a surface light source from the integral value is calculated.
JP1095085A 1985-01-25 1985-01-25 Method and instrument for measuring optical flare Granted JPS61170635A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1095085A JPS61170635A (en) 1985-01-25 1985-01-25 Method and instrument for measuring optical flare

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1095085A JPS61170635A (en) 1985-01-25 1985-01-25 Method and instrument for measuring optical flare

Publications (2)

Publication Number Publication Date
JPS61170635A true JPS61170635A (en) 1986-08-01
JPH0445064B2 JPH0445064B2 (en) 1992-07-23

Family

ID=11764476

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1095085A Granted JPS61170635A (en) 1985-01-25 1985-01-25 Method and instrument for measuring optical flare

Country Status (1)

Country Link
JP (1) JPS61170635A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008089335A (en) * 2006-09-29 2008-04-17 Nec Corp Optical flare inspection device and inspection method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008089335A (en) * 2006-09-29 2008-04-17 Nec Corp Optical flare inspection device and inspection method

Also Published As

Publication number Publication date
JPH0445064B2 (en) 1992-07-23

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