JPS61202148A - Detection of minute defect - Google Patents
Detection of minute defectInfo
- Publication number
- JPS61202148A JPS61202148A JP60043931A JP4393185A JPS61202148A JP S61202148 A JPS61202148 A JP S61202148A JP 60043931 A JP60043931 A JP 60043931A JP 4393185 A JP4393185 A JP 4393185A JP S61202148 A JPS61202148 A JP S61202148A
- Authority
- JP
- Japan
- Prior art keywords
- coating agent
- inspected
- defect
- defects
- detect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007547 defect Effects 0.000 title claims abstract description 28
- 238000001514 detection method Methods 0.000 title abstract description 3
- 239000011248 coating agent Substances 0.000 claims abstract description 20
- 239000000126 substance Substances 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 7
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 10
- 239000002184 metal Substances 0.000 abstract description 3
- 229910052751 metal Inorganic materials 0.000 abstract description 3
- 239000007769 metal material Substances 0.000 abstract description 3
- 229910052755 nonmetal Inorganic materials 0.000 abstract description 3
- 229910052710 silicon Inorganic materials 0.000 abstract description 3
- 238000001228 spectrum Methods 0.000 abstract description 3
- 229910000831 Steel Inorganic materials 0.000 abstract description 2
- 239000013078 crystal Substances 0.000 abstract description 2
- 239000010959 steel Substances 0.000 abstract description 2
- 229910052718 tin Inorganic materials 0.000 abstract 2
- 229910052801 chlorine Inorganic materials 0.000 abstract 1
- 229910052745 lead Inorganic materials 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000008646 thermal stress Effects 0.000 description 2
- 229910017060 Fe Cr Inorganic materials 0.000 description 1
- 229910002544 Fe-Cr Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- UPHIPHFJVNKLMR-UHFFFAOYSA-N chromium iron Chemical compound [Cr].[Fe] UPHIPHFJVNKLMR-UHFFFAOYSA-N 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
- G01N23/18—Investigating the presence of flaws defects or foreign matter
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
- G01N23/083—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the radiation being X-rays
Landscapes
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Toxicology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、ボイ２やタービン等に使用される金属及び非
金属材料の表面に発生する微小欠陥の検出方法の改良に
関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an improvement in a method for detecting minute defects occurring on the surfaces of metal and non-metal materials used in boilers 2, turbines, and the like.
金属及び非金属材料は、過酷な雰囲気で使用されると、
欠陥が生じ、最終的には破断に至る。When metal and non-metal materials are used in harsh atmospheres,
Defects occur and eventually breakage occurs.
例えば、高温で長時間使用されたボイラ鋼管は化学成分
により結晶粒界にＦｅ−Ｃｒ系のσ相が発生する。この
σ相は、硬度（ＨＶ）が９００と非常に硬くて脆い相で
あり、熱応力が加わると、これを起点にして欠陥（空孔
）が発生し、最終的には欠陥の連結により破断する。For example, in boiler steel pipes that have been used at high temperatures for long periods of time, Fe-Cr-based σ phases are generated at grain boundaries due to chemical components. This σ phase is a very hard and brittle phase with a hardness (HV) of 900, and when thermal stress is applied, defects (vacancies) occur from this phase, and eventually break due to the connection of defects. do.
このようなことから、高温で長時間使用された材料の損
傷状況調査及び残寿命予測を目的として、欠陥を調査す
ることが検討されている。For this reason, investigation of defects is being considered for the purpose of investigating the state of damage and predicting the remaining life of materials that have been used at high temperatures for long periods of time.
この種の欠陥を調査する場合には、従来より材料表面を
鏡面仕上げ後、材料表面を腐食液でエツチングを行ない
、更に走査型電子顕微鏡により観察して欠陥の有無の判
定を行なう方法が採用されている。When investigating this type of defect, the conventional method used is to mirror-finish the material surface, then etch the material surface with a corrosive solution, and then observe it with a scanning electron microscope to determine the presence or absence of defects. ing.
しかしながら、上記従来方法では材料表面を鏡面仕上げ
後、腐食液にてエツチングを行なう際に母材の一部が欠
陥状にエツチングされる場合があり、それが欠陥か、又
はエツチングによる影響かの判別が困難であった。However, in the conventional method described above, when etching is performed with a corrosive solution after mirror-finishing the surface of the material, a part of the base material may be etched into a defect, and it is difficult to determine whether this is a defect or an effect caused by etching. was difficult.
本発明は、上記問題点を解決するためになさ。The present invention was made to solve the above problems.
れたもので、被検査物表面の肉眼で確認不可能な微小欠
陥の有無と位置を確実に検出し得る方法を提供しようと
するものである◎
〔問題点を解決するための手段〕
本発明は、被検査物の表面に開口した肉眼で検出不可能
な微小欠陥を検出する方法において、前記被検査物表面
に所定の物質を含む塗布剤を塗布し、更に被検査物の平
滑面に付着した塗布剤を除去した後、被検査物の表面を
Ｘ線検出器によって検査し、欠陥位置に存在する塗布剤
の所定物質を検出することを特徴とするものである。This invention aims to provide a method that can reliably detect the presence and position of minute defects that cannot be confirmed with the naked eye on the surface of an object to be inspected. [Means for solving the problem] The present invention In this method, a coating agent containing a predetermined substance is applied to the surface of the object to be inspected, and then it adheres to the smooth surface of the object to be inspected. After removing the applied coating agent, the surface of the object to be inspected is inspected using an X-ray detector, and a predetermined substance of the coating agent present at the defective position is detected.
上述した本発明方法によれば所定物質を含む塗布剤を被
検査物表面に塗布し、該塗布剤を被検査物表面の微小欠
陥に浸入させ、Ｘ線検出器で塗布剤中の所定物質を検出
することによって、該物質の検出に基づいて被検査物の
微小欠陥の有無及び位置を簡単かつ確実に検出できる。According to the method of the present invention described above, a coating agent containing a predetermined substance is applied to the surface of an object to be inspected, the coating agent is allowed to penetrate into minute defects on the surface of the object to be inspected, and the predetermined substance in the coating agent is detected using an X-ray detector. By detecting the substance, it is possible to easily and reliably detect the presence or absence and position of a microdefect in the object to be inspected based on the detection of the substance.
〔発明の実施例〕 以下、本発明の詳細な説明する。[Embodiments of the invention] The present invention will be explained in detail below.
被検査物として、２１図に示す平面状況の５Ｏ８３１６
ＨＴＢ材を使用した。このＨＴＢ材は、６００〜６５０
°Ｃで約１０万時間使用され、かつ熱応力による残留応
力発生のために結晶粒界した微小欠陥２が発生している
。次いで、前記ＨＴＢ材の微小欠陥を含む表面にＳｎ
を含む塗布剤を塗布した後、表面を軽く研摩して同、１
−１図に示すように微小欠陥２のみに塗布剤３を残存さ
せた。As the object to be inspected, 5O8316 in the plane situation shown in Figure 21
HTB material was used. This HTB material is 600-650
It has been used for approximately 100,000 hours at °C, and micro defects 2 at grain boundaries have been generated due to the generation of residual stress due to thermal stress. Next, Sn is applied to the surface of the HTB material containing micro defects.
After applying the coating agent containing the same, lightly polish the surface and
As shown in Figure-1, the coating agent 3 was left only on the micro defects 2.
この後、欠陥に残存した塗布剤を含む表面をＸ線検出器
、例えばＸ線マイクロアナライザで検査、分析した。そ
の結果、牙２図に示すＸ線マイクロアナライザによるス
ペクトル図を得た。Thereafter, the surface containing the coating agent remaining in the defect was inspected and analyzed using an X-ray detector, such as an X-ray microanalyzer. As a result, a spectrum diagram obtained by an X-ray microanalyzer as shown in Fig. 2 was obtained.
なお、矛２図中の横軸は２１図に示した結晶粒界１及び
欠陥２を直線で分析した距離を示し、縦軸はＳＯの吸収
密度を示す。In addition, the horizontal axis in Figure 2 shows the distance of the crystal grain boundary 1 and defect 2 shown in Figure 21 analyzed in a straight line, and the vertical axis shows the absorption density of SO.
上述した矛２図より被検青物表面の微小欠陥ではＳｎ
を確実に検出でき、これにより微小欠陥の有無及び位
置を検出できる。From the above-mentioned Figure 2, Sn
can be reliably detected, and thereby the presence or absence and position of minute defects can be detected.
なお、上記実施例では塗布剤に含有させる物質としてＳ
ｎ を例にして説明したが、Ｓｉ、Ｆｅ。In addition, in the above example, S was used as a substance to be contained in the coating agent.
The explanation was given using n as an example, but Si, Fe.
Ｃ４’ 、Ｂｒ 、 Ｉ 、 ｐｂ 等を用いても同
様な効果を達成できた。Similar effects could be achieved using C4', Br, I, pb, etc.
以上詳述した如く１本発明によれば被検査物の表面に特
定物質を含む塗布剤を塗布して微小欠陥に特定物質を浸
透させ、表面からＸｌｓ検出器を用いて欠陥に浸透して
いる該物質を検査することによって、肉眼で確認不可能
な微小欠陥の有無と位置を確実に検出し得る方法を提供
できる。As detailed above, according to the present invention, a coating agent containing a specific substance is applied to the surface of the object to be inspected, the specific substance is infiltrated into minute defects, and the specific substance is penetrated into the defects from the surface using an Xls detector. By inspecting the substance, it is possible to provide a method that can reliably detect the presence and position of minute defects that cannot be confirmed with the naked eye.
矛１図は本実施例で用いた被検査物Ｃ３Ｕ８３１６ＨＴ
Ｂ材）の表面状況を示す図、牙２図はＸ゛線マイクロア
ナライザによるＳｎのスペクトル図である。
ｌ・・・結晶粒界、２・・・微小欠陥、３・・・塗布剤
。Figure 1 shows the test object C3U8316HT used in this example.
Figure 2, which shows the surface condition of material B), is a Sn spectrum diagram measured by an X-ray microanalyzer. 1... Grain boundary, 2... Micro defect, 3... Coating agent.
Claims (1)
を検出する方法において、前記被検査物表面に所定の物
質を含む塗布剤を塗布し、更に被検査物の平滑面に付着
した塗布剤を除去した後、被検査物の表面をＸ線検出器
によって検査し、欠陥位置に存在する塗布剤の所定物質
を検出することを特徴とする微小欠陥の検出方法。In a method for detecting minute defects that are opened on the surface of an object to be inspected and cannot be detected with the naked eye, a coating agent containing a predetermined substance is applied to the surface of the object to be inspected, and the coating agent is further attached to the smooth surface of the object to be inspected. A method for detecting minute defects, comprising: inspecting the surface of the object to be inspected with an X-ray detector after removing the agent, and detecting a predetermined substance of the coating agent present at the defect location.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60043931A JPS61202148A (en) | 1985-03-06 | 1985-03-06 | Detection of minute defect |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60043931A JPS61202148A (en) | 1985-03-06 | 1985-03-06 | Detection of minute defect |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61202148A true JPS61202148A (en) | 1986-09-06 |
Family
ID=12677432
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60043931A Pending JPS61202148A (en) | 1985-03-06 | 1985-03-06 | Detection of minute defect |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61202148A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6435349A (en) * | 1987-07-31 | 1989-02-06 | Shimadzu Corp | Fine pinhole detecting method |
-
1985
- 1985-03-06 JP JP60043931A patent/JPS61202148A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6435349A (en) * | 1987-07-31 | 1989-02-06 | Shimadzu Corp | Fine pinhole detecting method |
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