JPS6435349A - Fine pinhole detecting method - Google Patents

Fine pinhole detecting method

Info

Publication number
JPS6435349A
JPS6435349A JP62192800A JP19280087A JPS6435349A JP S6435349 A JPS6435349 A JP S6435349A JP 62192800 A JP62192800 A JP 62192800A JP 19280087 A JP19280087 A JP 19280087A JP S6435349 A JPS6435349 A JP S6435349A
Authority
JP
Japan
Prior art keywords
sample
pinhole
fitting
fitting material
ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62192800A
Other languages
Japanese (ja)
Inventor
Teruji Hirai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP62192800A priority Critical patent/JPS6435349A/en
Publication of JPS6435349A publication Critical patent/JPS6435349A/en
Pending legal-status Critical Current

Links

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  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To detect a fine pinhole in the surface of a sample in a short time by entering and fitting a specific material in the pinhole in the surface of the sample before measurement and detecting the fitted specific material by an X-ray spectroscopic analyzing method. CONSTITUTION:The surface of the sample with the pinhole P is coated with the fitting material T and after the fitting material T is dried, the fitting material T sticking on the surface is removed with a solvent, so that the fitting material is left only in the pinhole while there is no fitting material left on the surface of the sample. The sample S which is preprocessed as mentioned above is moved by a sample stage 4 in order in an X and a Y direction to divide respective picture elements (e) which constitute the sample. Each picture element is irradiated with an irradiation beam B which is stopped down so that the beam is circumscribed with the picture element and a detector 6 detects the characteristic X ray of the fitting material T in the pinhole P. When the characteristic X ray is detected, the picture element No. and a flag indicating that there is the pinhole are stored in the memory in a CPU 8 and displayed on a display device 9 at a proper time.
JP62192800A 1987-07-31 1987-07-31 Fine pinhole detecting method Pending JPS6435349A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62192800A JPS6435349A (en) 1987-07-31 1987-07-31 Fine pinhole detecting method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62192800A JPS6435349A (en) 1987-07-31 1987-07-31 Fine pinhole detecting method

Publications (1)

Publication Number Publication Date
JPS6435349A true JPS6435349A (en) 1989-02-06

Family

ID=16297198

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62192800A Pending JPS6435349A (en) 1987-07-31 1987-07-31 Fine pinhole detecting method

Country Status (1)

Country Link
JP (1) JPS6435349A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004325346A (en) * 2003-04-25 2004-11-18 Matsushita Electric Ind Co Ltd Pinhole detection method and production method of membrane electrode assembly

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61202148A (en) * 1985-03-06 1986-09-06 Mitsubishi Heavy Ind Ltd Detection of minute defect
JPS6222010A (en) * 1985-07-23 1987-01-30 Mitsubishi Electric Corp Detecting method for pattern defect

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61202148A (en) * 1985-03-06 1986-09-06 Mitsubishi Heavy Ind Ltd Detection of minute defect
JPS6222010A (en) * 1985-07-23 1987-01-30 Mitsubishi Electric Corp Detecting method for pattern defect

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004325346A (en) * 2003-04-25 2004-11-18 Matsushita Electric Ind Co Ltd Pinhole detection method and production method of membrane electrode assembly

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