JPS61269840A - 電子顕微鏡等における試料移動装置 - Google Patents
電子顕微鏡等における試料移動装置Info
- Publication number
- JPS61269840A JPS61269840A JP60109658A JP10965885A JPS61269840A JP S61269840 A JPS61269840 A JP S61269840A JP 60109658 A JP60109658 A JP 60109658A JP 10965885 A JP10965885 A JP 10965885A JP S61269840 A JPS61269840 A JP S61269840A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- sample stage
- optical axis
- stage
- flat springs
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60109658A JPS61269840A (ja) | 1985-05-22 | 1985-05-22 | 電子顕微鏡等における試料移動装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60109658A JPS61269840A (ja) | 1985-05-22 | 1985-05-22 | 電子顕微鏡等における試料移動装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61269840A true JPS61269840A (ja) | 1986-11-29 |
| JPH0234148B2 JPH0234148B2 (2) | 1990-08-01 |
Family
ID=14515868
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60109658A Granted JPS61269840A (ja) | 1985-05-22 | 1985-05-22 | 電子顕微鏡等における試料移動装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61269840A (2) |
-
1985
- 1985-05-22 JP JP60109658A patent/JPS61269840A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0234148B2 (2) | 1990-08-01 |
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