JPS61275167A - 窒化珪素基セラミツクスの製造方法 - Google Patents

窒化珪素基セラミツクスの製造方法

Info

Publication number: JPS61275167A
Authority: JP; Japan
Prior art keywords: powder; silicon nitride; raw material; sintering; content
Prior art date: 1985-05-27
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP60115039A

Other languages

English (en)

Japanese (ja)

Other versions

JPH055783B2 (fr

Inventor

宏爾林

晃山川

雅也三宅

久雄竹内

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Sumitomo Electric Industries Ltd

Original Assignee

Sumitomo Electric Industries Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1985-05-27

Filing date

1985-05-27

Publication date

1986-12-05

1985-05-27 Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd

1985-05-27 Priority to JP60115039A priority Critical patent/JPS61275167A/ja

1986-12-05 Publication of JPS61275167A publication Critical patent/JPS61275167A/ja

1993-01-25 Publication of JPH055783B2 publication Critical patent/JPH055783B2/ja

Status Granted legal-status Critical Current

Links

229910052581 Si3N4 Inorganic materials 0.000 title claims description 16
HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims description 16
238000004519 manufacturing process Methods 0.000 title claims description 4
239000000919 ceramic Substances 0.000 title description 14
238000000034 method Methods 0.000 title description 4
239000000843 powder Substances 0.000 claims description 50
238000005245 sintering Methods 0.000 claims description 30
239000011812 mixed powder Substances 0.000 claims 1
239000002994 raw material Substances 0.000 description 22
238000010438 heat treatment Methods 0.000 description 9
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
238000005452 bending Methods 0.000 description 8
230000007547 defect Effects 0.000 description 8
239000007791 liquid phase Substances 0.000 description 5
229910052681 coesite Inorganic materials 0.000 description 4
229910052906 cristobalite Inorganic materials 0.000 description 4
239000000377 silicon dioxide Substances 0.000 description 4
235000012239 silicon dioxide Nutrition 0.000 description 4
229910052682 stishovite Inorganic materials 0.000 description 4
229910052905 tridymite Inorganic materials 0.000 description 4
MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
230000000694 effects Effects 0.000 description 2
238000005516 engineering process Methods 0.000 description 2
239000000203 mixture Substances 0.000 description 2
239000012071 phase Substances 0.000 description 2
HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
229910010271 silicon carbide Inorganic materials 0.000 description 2
229910005091 Si3N Inorganic materials 0.000 description 1
PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
239000012752 auxiliary agent Substances 0.000 description 1
230000015572 biosynthetic process Effects 0.000 description 1
239000003795 chemical substances by application Substances 0.000 description 1
150000001875 compounds Chemical class 0.000 description 1
230000006866 deterioration Effects 0.000 description 1
238000001704 evaporation Methods 0.000 description 1
230000008020 evaporation Effects 0.000 description 1
239000012535 impurity Substances 0.000 description 1
239000000463 material Substances 0.000 description 1
239000002184 metal Substances 0.000 description 1
229910052751 metal Inorganic materials 0.000 description 1
150000002739 metals Chemical class 0.000 description 1
239000002245 particle Substances 0.000 description 1
238000013001 point bending Methods 0.000 description 1
239000002861 polymer material Substances 0.000 description 1
230000001737 promoting effect Effects 0.000 description 1
238000000746 purification Methods 0.000 description 1

Landscapes

Ceramic Products (AREA)

JP60115039A 1985-05-27 1985-05-27 窒化珪素基セラミツクスの製造方法 Granted JPS61275167A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP60115039A JPS61275167A (ja)	1985-05-27	1985-05-27	窒化珪素基セラミツクスの製造方法

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP60115039A JPS61275167A (ja)	1985-05-27	1985-05-27	窒化珪素基セラミツクスの製造方法

Publications (2)

Publication Number	Publication Date
JPS61275167A true JPS61275167A (ja)	1986-12-05
JPH055783B2 JPH055783B2 (fr)	1993-01-25

Family

ID=14652680

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP60115039A Granted JPS61275167A (ja)	1985-05-27	1985-05-27	窒化珪素基セラミツクスの製造方法

Country Status (1)

Country	Link
JP (1)	JPS61275167A (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2003034580A (ja) *	2001-07-24	2003-02-07	Sumitomo Electric Ind Ltd	窒化ケイ素系複合焼結体及びその製造方法

1985
- 1985-05-27 JP JP60115039A patent/JPS61275167A/ja active Granted

Also Published As

Publication number	Publication date
JPH055783B2 (fr)	1993-01-25

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Legal Events

Date	Code	Title	Description
2004-01-25	LAPS	Cancellation because of no payment of annual fees