JPS6131612B2 - - Google Patents

Info

Publication number
JPS6131612B2
JPS6131612B2 JP52033277A JP3327777A JPS6131612B2 JP S6131612 B2 JPS6131612 B2 JP S6131612B2 JP 52033277 A JP52033277 A JP 52033277A JP 3327777 A JP3327777 A JP 3327777A JP S6131612 B2 JPS6131612 B2 JP S6131612B2
Authority
JP
Japan
Prior art keywords
glass
thin film
ammonia water
dispersion
dispersion medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52033277A
Other languages
English (en)
Japanese (ja)
Other versions
JPS53118979A (en
Inventor
Masafumi Myagawa
Kenichi Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP3327777A priority Critical patent/JPS53118979A/ja
Publication of JPS53118979A publication Critical patent/JPS53118979A/ja
Publication of JPS6131612B2 publication Critical patent/JPS6131612B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
JP3327777A 1977-03-28 1977-03-28 Forming method of glass thin film on semiconductor element substrate Granted JPS53118979A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3327777A JPS53118979A (en) 1977-03-28 1977-03-28 Forming method of glass thin film on semiconductor element substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3327777A JPS53118979A (en) 1977-03-28 1977-03-28 Forming method of glass thin film on semiconductor element substrate

Publications (2)

Publication Number Publication Date
JPS53118979A JPS53118979A (en) 1978-10-17
JPS6131612B2 true JPS6131612B2 (fr) 1986-07-21

Family

ID=12382025

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3327777A Granted JPS53118979A (en) 1977-03-28 1977-03-28 Forming method of glass thin film on semiconductor element substrate

Country Status (1)

Country Link
JP (1) JPS53118979A (fr)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5227363A (en) * 1975-08-27 1977-03-01 Hitachi Ltd Formation method of glass film

Also Published As

Publication number Publication date
JPS53118979A (en) 1978-10-17

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