JPS6141228Y2 - - Google Patents
Info
- Publication number
- JPS6141228Y2 JPS6141228Y2 JP14832981U JP14832981U JPS6141228Y2 JP S6141228 Y2 JPS6141228 Y2 JP S6141228Y2 JP 14832981 U JP14832981 U JP 14832981U JP 14832981 U JP14832981 U JP 14832981U JP S6141228 Y2 JPS6141228 Y2 JP S6141228Y2
- Authority
- JP
- Japan
- Prior art keywords
- light source
- exposed
- holding cylinder
- line light
- linear light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000498 cooling water Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14832981U JPS5853138U (ja) | 1981-10-06 | 1981-10-06 | 露光装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14832981U JPS5853138U (ja) | 1981-10-06 | 1981-10-06 | 露光装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5853138U JPS5853138U (ja) | 1983-04-11 |
| JPS6141228Y2 true JPS6141228Y2 (de) | 1986-11-25 |
Family
ID=29941152
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14832981U Granted JPS5853138U (ja) | 1981-10-06 | 1981-10-06 | 露光装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5853138U (de) |
-
1981
- 1981-10-06 JP JP14832981U patent/JPS5853138U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5853138U (ja) | 1983-04-11 |
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