JPS6143261U - 真空蒸着装置の蒸着源移動装置 - Google Patents

真空蒸着装置の蒸着源移動装置

Info

Publication number
JPS6143261U
JPS6143261U JP12547984U JP12547984U JPS6143261U JP S6143261 U JPS6143261 U JP S6143261U JP 12547984 U JP12547984 U JP 12547984U JP 12547984 U JP12547984 U JP 12547984U JP S6143261 U JPS6143261 U JP S6143261U
Authority
JP
Japan
Prior art keywords
inner cylinder
moving device
bottom wall
vacuum chamber
source moving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12547984U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0241166Y2 (2
Inventor
慎一 福士
良孝 鹿野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP12547984U priority Critical patent/JPS6143261U/ja
Publication of JPS6143261U publication Critical patent/JPS6143261U/ja
Application granted granted Critical
Publication of JPH0241166Y2 publication Critical patent/JPH0241166Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP12547984U 1984-08-17 1984-08-17 真空蒸着装置の蒸着源移動装置 Granted JPS6143261U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12547984U JPS6143261U (ja) 1984-08-17 1984-08-17 真空蒸着装置の蒸着源移動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12547984U JPS6143261U (ja) 1984-08-17 1984-08-17 真空蒸着装置の蒸着源移動装置

Publications (2)

Publication Number Publication Date
JPS6143261U true JPS6143261U (ja) 1986-03-20
JPH0241166Y2 JPH0241166Y2 (2) 1990-11-01

Family

ID=30684170

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12547984U Granted JPS6143261U (ja) 1984-08-17 1984-08-17 真空蒸着装置の蒸着源移動装置

Country Status (1)

Country Link
JP (1) JPS6143261U (2)

Also Published As

Publication number Publication date
JPH0241166Y2 (2) 1990-11-01

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