JPS6143261U - Vapor deposition source moving device for vacuum evaporation equipment - Google Patents
Vapor deposition source moving device for vacuum evaporation equipmentInfo
- Publication number
- JPS6143261U JPS6143261U JP12547984U JP12547984U JPS6143261U JP S6143261 U JPS6143261 U JP S6143261U JP 12547984 U JP12547984 U JP 12547984U JP 12547984 U JP12547984 U JP 12547984U JP S6143261 U JPS6143261 U JP S6143261U
- Authority
- JP
- Japan
- Prior art keywords
- inner cylinder
- moving device
- bottom wall
- vacuum chamber
- source moving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の一実施例を示す縦断正面図、第２図は
側面図である。
Ａ・・・・・・真空蒸着室、Ａ１・・・・・・真空室底
壁、Ｂ・・・・・・電子鏡、１・・・・・・内筒、２・
・・・・・外筒、３・・・・・・支持板、４・・・・・
・ナット部材、５・・・・・・上下動規制部材、６・・
・・・・拘束枠、７・・・・・・締付部材。FIG. 1 is a longitudinal sectional front view showing an embodiment of the present invention, and FIG. 2 is a side view. A... Vacuum deposition chamber, A1... Vacuum chamber bottom wall, B... Electronic mirror, 1... Inner cylinder, 2.
...Outer cylinder, 3...Support plate, 4...
・Nut member, 5... Vertical movement regulating member, 6...
...Restraint frame, 7...Tightening member.
Claims (1)
管Ｄが配設された頂板１１が載置されるとともに下部外
周に雄ねじ１ａが刻まれた内筒１と、該内筒が摺動自在
とされ、真空室底壁Ａよの下面に摺接可能な支持板３と
一体形成された外筒２と、前記内筒の雄ねじと螺合する
ナット部材４と内簡の上下動規制部材５と、前記外筒２
とナット部材４との拘束枠６と、真空室底壁Ａと前記支
持板３との締付部材７とを有し、前記真空室底壁には外
筒２が移動可能な長孔Ａ２が設けられていることを特徴
とする真空蒸着装置の蒸着源移動装置。The inner cylinder 1 is equipped with a vapor deposition source B on the upper surface, and a top plate 11 on which a high-voltage current terminal C and a cooling water pipe D are arranged is placed, and the inner cylinder 1 has a male thread 1a carved on the outer periphery of the lower part, and the inner cylinder slides. An outer cylinder 2 integrally formed with a support plate 3 which is movable and can be slid on the lower surface of the bottom wall A of the vacuum chamber, a nut member 4 screwed into the male thread of the inner cylinder, and a member for regulating vertical movement of the inner cylinder. 5, and the outer cylinder 2
and a restraining frame 6 between the nut member 4 and the vacuum chamber bottom wall A, and a tightening member 7 between the vacuum chamber bottom wall A and the support plate 3, and the vacuum chamber bottom wall has a long hole A2 through which the outer cylinder 2 can be moved. An evaporation source moving device for a vacuum evaporation apparatus, characterized in that it is provided with an evaporation source moving device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12547984U JPS6143261U (en) | 1984-08-17 | 1984-08-17 | Vapor deposition source moving device for vacuum evaporation equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12547984U JPS6143261U (en) | 1984-08-17 | 1984-08-17 | Vapor deposition source moving device for vacuum evaporation equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6143261U true JPS6143261U (en) | 1986-03-20 |
| JPH0241166Y2 JPH0241166Y2 (en) | 1990-11-01 |
Family
ID=30684170
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12547984U Granted JPS6143261U (en) | 1984-08-17 | 1984-08-17 | Vapor deposition source moving device for vacuum evaporation equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6143261U (en) |
-
1984
- 1984-08-17 JP JP12547984U patent/JPS6143261U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0241166Y2 (en) | 1990-11-01 |
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