JPS6150253U - - Google Patents
Info
- Publication number
- JPS6150253U JPS6150253U JP12459085U JP12459085U JPS6150253U JP S6150253 U JPS6150253 U JP S6150253U JP 12459085 U JP12459085 U JP 12459085U JP 12459085 U JP12459085 U JP 12459085U JP S6150253 U JPS6150253 U JP S6150253U
- Authority
- JP
- Japan
- Prior art keywords
- photoluminescence
- beam splitter
- light
- excitation light
- transmittance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005424 photoluminescence Methods 0.000 claims description 10
- 230000005284 excitation Effects 0.000 claims description 9
- 238000002834 transmittance Methods 0.000 claims 4
- 239000013078 crystal Substances 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- 238000004020 luminiscence type Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
Landscapes
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Description
第１図は、本考案の一実施例を示す装置の模式
図、第２図は、本考案装置におけるビームスプリ
ツターの分光反射（透過）特性を示すグラフ、第
３図は、本考案装置によつて得られた金属組織に
よるＰＬ像の顕微鏡写真（倍率６５０倍）であり
、第４図は、従来装置によつて得られた金属組織
によるＰＬ像の顕微鏡写真（倍率６５０倍）であ
る。
１…励起光源、２…ビームスプリツター、３…
励起光集光兼フオトルミネツセンス光集光レンズ
、４…ロングパスフイルタ、７…試料。
Figure 1 is a schematic diagram of an apparatus showing an embodiment of the present invention, Figure 2 is a graph showing the spectral reflection (transmission) characteristics of the beam splitter in the apparatus of the present invention, and Figure 3 is a graph showing the spectral reflection (transmission) characteristics of the beam splitter in the apparatus of the present invention. FIG. 4 is a micrograph (magnification: 650 times) of a PL image of a metal structure obtained using the conventional apparatus. FIG. 1...Excitation light source, 2...Beam splitter, 3...
Excitation light condensing/photoluminescence light condensing lens, 4... Long pass filter, 7... Sample.
Claims (1)
兼フオトルミネツセンス光集光タンズ、ロングパ
スフイルター、および光検出器から成り、該ビー
ムスプリツターを該励起光集光兼フオトルミネツ
センス光集光レンズおよび光検出器の間に配設し
、前記励起光源からの光を前記ビームスプリツタ
ーで反射させ前記集光レンズを通して半導体結晶
に照射し、該フオトルミネツセンス光を前記集光
レンズを通して前記ビームスプリツターを透過さ
せ、前記光検出器により前記フオトルミネツセン
ス光を検出するフオトルミネツセンス像観察装置
にあつて、 該ビームスプリツターが波長１．２〜２μｍの
フオトルミネツセンス光に対して反射率が低くか
つ透過率が高く、該フオトルミネツセンス光より
短い波長の励起光に対しては該フオトルミネツセ
ンス光より反射率が高くかつ透過率が低い特性を
有する反射鏡もしくはプリズムであることを特徴
とする、フオトルミネツセンス像観察装置。 ２ 前記ビームスプリツターが、励起光に対して
は反射率が９９％以上かつ透過率１％以下、フオ
トルミネツセンス光に対しては反射率が４０％以
下かつ透過率が６０％以上の特性を有するビーム
スプリツターである、実用新案登録請求の範囲第
１項記載のフオトルミネツセンス像観察装置。 ３ 前記励起光源として、Ｎｄ：ＹＡＧレーザー
（λ＝１．０６４μｍ）Ｎｄ：ガラスレーザー（
λ＝１．０６μｍ）、又はＨｅ−Ｎｄレーザー（
λ＝１．１５μｍ）、のいずれかを用い、光検出
器としてＰｂＯ−ＰｂＳ又はＰｂＳビジコンを用
いる、実用新案登録請求の範囲第１項記載のフオ
トルミネツセンス像観察装置。[Claims for Utility Model Registration] 1. Consists of an excitation light source, a beam splitter, excitation light condensing and photoluminescence light condensing tans, a long pass filter, and a photodetector, and the beam splitter is used to condense the excitation light. The light from the excitation light source is reflected by the beam splitter and irradiated onto the semiconductor crystal through the condensing lens, and the photoluminescence is In a photoluminescence image observation device that transmits light through the beam splitter through the condensing lens and detects the photoluminescence light with the photodetector, the beam splitter has a wavelength of 1.2 to 1.2. It has a low reflectance and high transmittance for 2 μm photoluminescence light, and a higher reflectance and transmittance for excitation light with a shorter wavelength than the photoluminescence light. 1. A photoluminescence image observation device, characterized in that it is a reflecting mirror or prism having a characteristic of low luminescence. 2. The beam splitter has characteristics of a reflectance of 99% or more and a transmittance of 1% or less for excitation light, and a reflectance of 40% or less and a transmittance of 60% or more for photoluminescence light. A photoluminescence image observation device according to claim 1, which is a beam splitter having a beam splitter. 3 As the excitation light source, Nd:YAG laser (λ = 1.064 μm) Nd:glass laser (
λ=1.06μm) or He-Nd laser (
λ=1.15 μm), and a PbO-PbS or PbS vidicon is used as a photodetector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12459085U JPS6150253U (en) | 1985-08-15 | 1985-08-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12459085U JPS6150253U (en) | 1985-08-15 | 1985-08-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6150253U true JPS6150253U (en) | 1986-04-04 |
Family
ID=30683317
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12459085U Pending JPS6150253U (en) | 1985-08-15 | 1985-08-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6150253U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5635043A (en) * | 1979-08-30 | 1981-04-07 | Mitsubishi Electric Corp | Sample evaluation apparatus |
-
1985
- 1985-08-15 JP JP12459085U patent/JPS6150253U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5635043A (en) * | 1979-08-30 | 1981-04-07 | Mitsubishi Electric Corp | Sample evaluation apparatus |
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