JPS6157391B2 - - Google Patents
Info
- Publication number
- JPS6157391B2 JPS6157391B2 JP58203367A JP20336783A JPS6157391B2 JP S6157391 B2 JPS6157391 B2 JP S6157391B2 JP 58203367 A JP58203367 A JP 58203367A JP 20336783 A JP20336783 A JP 20336783A JP S6157391 B2 JPS6157391 B2 JP S6157391B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- heater
- vapor deposition
- distribution
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 43
- 239000010409 thin film Substances 0.000 claims description 18
- 238000007740 vapor deposition Methods 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 13
- 230000008020 evaporation Effects 0.000 claims description 11
- 238000001704 evaporation Methods 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 11
- 238000000151 deposition Methods 0.000 claims description 10
- 230000008021 deposition Effects 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000010408 film Substances 0.000 description 13
- 239000002356 single layer Substances 0.000 description 4
- 239000005083 Zinc sulfide Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052984 zinc sulfide Inorganic materials 0.000 description 3
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58203367A JPS6096762A (ja) | 1983-10-28 | 1983-10-28 | 蒸着方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58203367A JPS6096762A (ja) | 1983-10-28 | 1983-10-28 | 蒸着方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6096762A JPS6096762A (ja) | 1985-05-30 |
| JPS6157391B2 true JPS6157391B2 (2) | 1986-12-06 |
Family
ID=16472850
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58203367A Granted JPS6096762A (ja) | 1983-10-28 | 1983-10-28 | 蒸着方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6096762A (2) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4678643B2 (ja) * | 1999-08-04 | 2011-04-27 | ゼネラル・エレクトリック・カンパニイ | 電子ビーム物理蒸着被覆装置と方法 |
| TW201332181A (zh) * | 2012-01-27 | 2013-08-01 | 松下電器產業股份有限公司 | 有機電致發光元件製造裝置及有機電致發光元件之製造方法 |
-
1983
- 1983-10-28 JP JP58203367A patent/JPS6096762A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6096762A (ja) | 1985-05-30 |
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