JPS6160114U - - Google Patents

Info

Publication number
JPS6160114U
JPS6160114U JP14425284U JP14425284U JPS6160114U JP S6160114 U JPS6160114 U JP S6160114U JP 14425284 U JP14425284 U JP 14425284U JP 14425284 U JP14425284 U JP 14425284U JP S6160114 U JPS6160114 U JP S6160114U
Authority
JP
Japan
Prior art keywords
displacement meter
dimensional displacement
image sensor
attached
semiconductor laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14425284U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14425284U priority Critical patent/JPS6160114U/ja
Publication of JPS6160114U publication Critical patent/JPS6160114U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例に係る三次元変位計
の縦断面図、第２図は第１図の−線に沿う横
断面図、である。 １……本体ケース、２……検出端、３……プロ
ーブ、４……ガイド、５……スプリング、６……
磁石、７……ケース、８……半導体レーザ素子、
９……レーザビーム、１０……ミラー、１２……
リニアイメージセンサ、１３……エリアイメージ
センサ。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) 三次元方向に移動可能なプローブに、発光
    源として半導体レーザ素子を取付け、三次元変位
    計本体ケースに、前記半導体レーザ素子からのレ
    ーザビームを受光するエリアイメージセンサおよ
    びリニアイメージセンサを取付けたことを特徴と
    する三次元変位計。 (2) 前記プローブを磁石の磁力を利用して移動
    可能に支持した実用新案登録請求の範囲第１項記
    載の三次元変位計。
JP14425284U 1984-09-26 1984-09-26 Pending JPS6160114U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14425284U JPS6160114U (ja) 1984-09-26 1984-09-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14425284U JPS6160114U (ja) 1984-09-26 1984-09-26

Publications (1)

Publication Number Publication Date
JPS6160114U true JPS6160114U (ja) 1986-04-23

Family

ID=30702536

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14425284U Pending JPS6160114U (ja) 1984-09-26 1984-09-26

Country Status (1)

Country Link
JP (1) JPS6160114U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02161301A (ja) * 1988-12-15 1990-06-21 Toyama Pref Gov 三次元変位量測定器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02161301A (ja) * 1988-12-15 1990-06-21 Toyama Pref Gov 三次元変位量測定器

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