JPS6163840U - - Google Patents

Info

Publication number
JPS6163840U
JPS6163840U JP14851584U JP14851584U JPS6163840U JP S6163840 U JPS6163840 U JP S6163840U JP 14851584 U JP14851584 U JP 14851584U JP 14851584 U JP14851584 U JP 14851584U JP S6163840 U JPS6163840 U JP S6163840U
Authority
JP
Japan
Prior art keywords
silicon wafer
wafer
basket
silicon
main body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14851584U
Other languages
English (en)
Other versions
JPH0632687Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984148515U priority Critical patent/JPH0632687Y2/ja
Publication of JPS6163840U publication Critical patent/JPS6163840U/ja
Application granted granted Critical
Publication of JPH0632687Y2 publication Critical patent/JPH0632687Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
  • Weting (AREA)

Description

【図面の簡単な説明】
第１図は、本案のバスケツトの１部省略した平
面図、第２図は同じく背面図、第３図は同側面図
、第４図は第１図のＡ−Ａ線に沿う断面図、第５
図は第１図のＢ−Ｂ線に沿う断面図である。 〔符号の説明〕、１…主体、２，３…側壁、４
，５…側壁のリブ、６，７…側壁の窓孔、８，９
…連結部、１０，１１…底承部、１２，１３…下
窓孔、１４，１５…受條、１６…シリコンウエハ
。

Claims (1)

    【実用新案登録請求の範囲】
  1. バスケツト主体１の内底に設けた底承部１０，
    １１と両側壁２，３との連結部８，９表面に下窓
    孔１２，１３を、各シリコンウエハ１６の下部で
    、該ウエハ１６の周面より離隔する位置に並設せ
    しめ、前記底承部１０，１１の内部表面にシリコ
    ンウエハ１６の下面を支持する受條１４，１５を
    対向設置してなるシリコンウエハ用バスケツト。
JP1984148515U 1984-10-02 1984-10-02 シリコンウエハ用バスケット Expired - Lifetime JPH0632687Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984148515U JPH0632687Y2 (ja) 1984-10-02 1984-10-02 シリコンウエハ用バスケット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984148515U JPH0632687Y2 (ja) 1984-10-02 1984-10-02 シリコンウエハ用バスケット

Publications (2)

Publication Number Publication Date
JPS6163840U true JPS6163840U (ja) 1986-04-30
JPH0632687Y2 JPH0632687Y2 (ja) 1994-08-24

Family

ID=30706721

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984148515U Expired - Lifetime JPH0632687Y2 (ja) 1984-10-02 1984-10-02 シリコンウエハ用バスケット

Country Status (1)

Country Link
JP (1) JPH0632687Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101024263B (zh) 2006-02-20 2011-07-06 乔治洛德方法研究和开发液化空气有限公司 用于制造诸如药芯焊丝的充粉式焊接管的方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56147436A (en) * 1980-04-18 1981-11-16 Hitachi Ltd Jig carrier

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56147436A (en) * 1980-04-18 1981-11-16 Hitachi Ltd Jig carrier

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101024263B (zh) 2006-02-20 2011-07-06 乔治洛德方法研究和开发液化空气有限公司 用于制造诸如药芯焊丝的充粉式焊接管的方法

Also Published As

Publication number Publication date
JPH0632687Y2 (ja) 1994-08-24

Similar Documents

Publication Publication Date Title
JPH0248022U (ja)
JPH03107056U (ja)
JPS6149450U (ja)
JPH0178714U (ja)
JPH0398687U (ja)
JPH0453412U (ja)
JPS63116576U (ja)
JPH0428852U (ja)
JPH02125144U (ja)
JPH0197881U (ja)
JPS6360475U (ja)
JPS61151343U (ja)
JPH0256442U (ja)
JPH02120834U (ja)
JPS63162527U (ja)
JPH03121187U (ja)
JPS61167911U (ja)
JPS62153844U (ja)
JPH0449102U (ja)
JPH01135733U (ja)
JPH03126940U (ja)
JPS638586U (ja)
JPS61105685U (ja)
JPS6160791U (ja)
JPS61124243U (ja)