JPS6165745U - - Google Patents
Info
- Publication number
- JPS6165745U JPS6165745U JP15046284U JP15046284U JPS6165745U JP S6165745 U JPS6165745 U JP S6165745U JP 15046284 U JP15046284 U JP 15046284U JP 15046284 U JP15046284 U JP 15046284U JP S6165745 U JPS6165745 U JP S6165745U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wide
- boat
- shaped
- storage boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims 4
Landscapes
- Packaging Frangible Articles (AREA)
Description
第１図から第４図までは本考案の実施例を示し
、第１図は収納ボートの側面図、第２図は正面図
、第３図は第２図の−線視拡大断面図、第４
図は第２図の−線視拡大断面図、第５図から
第８図までは従来例を示し、第５図は収納ボート
の側面図、第６図は正面図、第７図は支持溝の要
部拡大断面図、第８図は他の支持溝の要部拡大断
面図である。
１０…ウエハ、１１…収納ボート、１４，１４
′…左右両支持枠、１５…下端支持枠、１６，１
７，１８…支持溝、２１，２１，２２…急な傾斜
面、２３，２３，２４…緩い傾斜面。
1 to 4 show embodiments of the present invention, in which FIG. 1 is a side view of the storage boat, FIG. 2 is a front view, and FIG. 4
The figure is an enlarged sectional view taken along the - line in Fig. 2, Figs. 5 to 8 show the conventional example, Fig. 5 is a side view of the storage boat, Fig. 6 is a front view, and Fig. 7 is a support groove. FIG. 8 is an enlarged sectional view of the main part of another support groove. 10... Wafer, 11... Storage boat, 14, 14
'...Both left and right support frames, 15...Lower end support frame, 16,1
7, 18... Support groove, 21, 21, 22... Steep slope, 23, 23, 24... Gentle slope.
Claims (1)
るようにして前後方向に適宜間隔ごとに配置して
支持する収納ボートにおいて、該ボートの内面に
は各ウエハの少なくともその下端縁部と左右両側
端縁部とを支持する支持溝を設け、該各支持溝の
断面形状を、各ウエハの広巾裏面側が凭れる急な
傾斜面と、広巾表面側が密着しないような緩い傾
斜面とからなる略Ｖ字状に形成して成るウエハの
収納ボート。 In a storage boat that supports thin plate-shaped wafers by arranging them at appropriate intervals in the front and back direction with their wide surfaces facing sideways, the inner surface of the boat has at least the lower edge of each wafer and both left and right sides. The cross-sectional shape of each support groove is approximately V, consisting of a steep slope on which the wide back side of each wafer rests, and a gentle slope on which the wide front side does not come into close contact. A wafer storage boat shaped like a letter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15046284U JPH069515Y2 (en) | 1984-10-03 | 1984-10-03 | Wafer storage boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15046284U JPH069515Y2 (en) | 1984-10-03 | 1984-10-03 | Wafer storage boat |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6165745U true JPS6165745U (en) | 1986-05-06 |
| JPH069515Y2 JPH069515Y2 (en) | 1994-03-09 |
Family
ID=30708609
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15046284U Expired - Lifetime JPH069515Y2 (en) | 1984-10-03 | 1984-10-03 | Wafer storage boat |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH069515Y2 (en) |
-
1984
- 1984-10-03 JP JP15046284U patent/JPH069515Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH069515Y2 (en) | 1994-03-09 |