JPS6166957U - - Google Patents
Info
- Publication number
- JPS6166957U JPS6166957U JP1984152736U JP15273684U JPS6166957U JP S6166957 U JPS6166957 U JP S6166957U JP 1984152736 U JP1984152736 U JP 1984152736U JP 15273684 U JP15273684 U JP 15273684U JP S6166957 U JPS6166957 U JP S6166957U
- Authority
- JP
- Japan
- Prior art keywords
- silicon chip
- bonding
- bonding structure
- anodic bonding
- glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984152736U JPS6166957U (cs) | 1984-10-09 | 1984-10-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984152736U JPS6166957U (cs) | 1984-10-09 | 1984-10-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6166957U true JPS6166957U (cs) | 1986-05-08 |
Family
ID=30710788
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984152736U Pending JPS6166957U (cs) | 1984-10-09 | 1984-10-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6166957U (cs) |
-
1984
- 1984-10-09 JP JP1984152736U patent/JPS6166957U/ja active Pending
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