JPS6181932U - - Google Patents
Info
- Publication number
- JPS6181932U JPS6181932U JP16666284U JP16666284U JPS6181932U JP S6181932 U JPS6181932 U JP S6181932U JP 16666284 U JP16666284 U JP 16666284U JP 16666284 U JP16666284 U JP 16666284U JP S6181932 U JPS6181932 U JP S6181932U
- Authority
- JP
- Japan
- Prior art keywords
- disposed
- reaction vessel
- treated
- surface treatment
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004381 surface treatment Methods 0.000 claims description 3
- 238000011084 recovery Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
Description
第１図、第２図および第３図は本考案に基づく
表面処理装置の夫々異なる実施例を示す説明図、
第４図は従来の表面処理装置の一例を示す説明図
である。 １…反応容器、４…電極、５…電極、１２…被
処理材料供給部、１３…被処理材料回収部、２０
…供給導管、２１…回収導管。
表面処理装置の夫々異なる実施例を示す説明図、
第４図は従来の表面処理装置の一例を示す説明図
である。 １…反応容器、４…電極、５…電極、１２…被
処理材料供給部、１３…被処理材料回収部、２０
…供給導管、２１…回収導管。
Claims (1)
- 反応容器に導入された低圧ガス中の放電によつ
て発生するプラズマを用いて被処理材料の表面処
理を行う装置であつて、前記反応容器の上部に被
処理材料供給部を配するとともに該反応容器の下
部に被処理材料回収部を配したことを特徴とする
表面処理装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16666284U JPS6181932U (ja) | 1984-11-02 | 1984-11-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16666284U JPS6181932U (ja) | 1984-11-02 | 1984-11-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6181932U true JPS6181932U (ja) | 1986-05-30 |
Family
ID=30724472
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16666284U Pending JPS6181932U (ja) | 1984-11-02 | 1984-11-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6181932U (ja) |
-
1984
- 1984-11-02 JP JP16666284U patent/JPS6181932U/ja active Pending
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