JPS6181932U - - Google Patents

Info

Publication number
JPS6181932U
JPS6181932U JP16666284U JP16666284U JPS6181932U JP S6181932 U JPS6181932 U JP S6181932U JP 16666284 U JP16666284 U JP 16666284U JP 16666284 U JP16666284 U JP 16666284U JP S6181932 U JPS6181932 U JP S6181932U
Authority
JP
Japan
Prior art keywords
disposed
reaction vessel
treated
surface treatment
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16666284U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16666284U priority Critical patent/JPS6181932U/ja
Publication of JPS6181932U publication Critical patent/JPS6181932U/ja
Pending legal-status Critical Current

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  • Physical Or Chemical Processes And Apparatus (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図、第２図および第３図は本考案に基づく
表面処理装置の夫々異なる実施例を示す説明図、
第４図は従来の表面処理装置の一例を示す説明図
である。 １…反応容器、４…電極、５…電極、１２…被
処理材料供給部、１３…被処理材料回収部、２０
…供給導管、２１…回収導管。 FIGS. 1, 2 and 3 are explanatory diagrams showing different embodiments of the surface treatment apparatus based on the present invention,
FIG. 4 is an explanatory diagram showing an example of a conventional surface treatment apparatus. DESCRIPTION OF SYMBOLS 1... Reaction container, 4... Electrode, 5... Electrode, 12... Processing material supply part, 13... Processing material collection part, 20
...supply conduit, 21...recovery conduit.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 反応容器に導入された低圧ガス中の放電によつ
て発生するプラズマを用いて被処理材料の表面処
理を行う装置であつて、前記反応容器の上部に被
処理材料供給部を配するとともに該反応容器の下
部に被処理材料回収部を配したことを特徴とする
表面処理装置。 An apparatus for surface-treating a material to be treated using plasma generated by electric discharge in a low-pressure gas introduced into a reaction vessel, in which a material-to-be-treated supply section is disposed in the upper part of the reaction vessel, and A surface treatment device characterized in that a material recovery section is disposed at the bottom of the container.
JP16666284U 1984-11-02 1984-11-02 Pending JPS6181932U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16666284U JPS6181932U (en) 1984-11-02 1984-11-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16666284U JPS6181932U (en) 1984-11-02 1984-11-02

Publications (1)

Publication Number Publication Date
JPS6181932U true JPS6181932U (en) 1986-05-30

Family

ID=30724472

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16666284U Pending JPS6181932U (en) 1984-11-02 1984-11-02

Country Status (1)

Country Link
JP (1) JPS6181932U (en)

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