JPS6184836U - - Google Patents
Info
- Publication number
- JPS6184836U JPS6184836U JP17114384U JP17114384U JPS6184836U JP S6184836 U JPS6184836 U JP S6184836U JP 17114384 U JP17114384 U JP 17114384U JP 17114384 U JP17114384 U JP 17114384U JP S6184836 U JPS6184836 U JP S6184836U
- Authority
- JP
- Japan
- Prior art keywords
- gauge
- voltage
- pressure
- shear type
- input end
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 claims 4
- 239000004065 semiconductor Substances 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図イは本考案の一実施例のセンサ部分を示
す斜視図、第１図ロは第１図イにおけるＡ矢視側
から見た側面図、第１図ハは第１図イに形成され
る歪ゲージの配置を示すゲージ配置図、第２図は
本考案における圧力変換器の全体構成を示す構成
図である。
１…基板、２…ゲージチツプ、３…歪検知穴、
４…ダイヤフラム、５は圧力導入孔、６…基準孔
、９…カンチレバー、ＣＣＳ…定電圧源、ＣＶＳ
…定電流源、ＥＳ…定電圧、Ｉｉ…定電流、ＯＳ
Ｃ…発振器、ＰＣＣ…演算回路、ＧｐＴ…圧力温
度ゲージ、ＧＲ…基準応力ゲージ、Ｅｐ，ＥＴ，
ＥＲ…出力電圧、ＳＷＲ，，ＳＷＴ，ＳＷＲ…ス
イツチ。
Fig. 1A is a perspective view showing the sensor portion of an embodiment of the present invention, Fig. 1B is a side view seen from the direction of arrow A in Fig. 1A, and Fig. 1C is a configuration similar to Fig. 1A. FIG. 2 is a configuration diagram showing the overall configuration of the pressure transducer according to the present invention. 1... Board, 2... Gauge chip, 3... Strain detection hole,
4...Diaphragm, 5 is pressure introduction hole, 6...reference hole, 9...cantilever, CCS...constant voltage source, CVS
...Constant current source, ES...Constant voltage, Ii...Constant current, OS
C...Oscillator, PCC...Arithmetic circuit, GpT ...Pressure temperature gauge, GR...Reference stress gauge, Ep , ET,
ER...Output voltage, SWR,, SWT, SWR...Switch.
補正 昭６０．２．２８
図面の簡単な説明を次のように補正する。
明細書第１３頁第１６行を次の様に補正します
。
「る歪ゲージの配置を示すゲージ配置図、第１
図ニは第１図ハに示すせん断形ゲージを拡大して
示した拡大図、第２図は」Amendment February 28, 1980 The brief description of the drawing is amended as follows. Please amend page 13, line 16 of the specification as follows. Gauge layout diagram showing the arrangement of strain gauges, Part 1
Figure D is an enlarged view of the shear gauge shown in Figure 1C, and Figure 2 is an enlarged view of the shear gauge shown in Figure 1C.
Claims (1)
ジチツプ上に伝導形がＰ形で形成された少くとも
二個のせん断形ゲージを有する半導体圧力変換器
において、第１せん断形ゲージの結晶軸が〈１０
０〉方向に前記ゲージチツプ上に形成され前記第
１せん断形ゲージの入力端に定電流が供給されて
被測定圧力に応答する電圧Ｅｐを出力端より得る
と同時に前記ゲージチツプの温度変化に応答する
電圧ＥＴを前記入力端より得る圧力温度ゲージと
、第２せん断形ゲージの結晶軸が〈１００〉方向
に前記ゲージチツプ上に形成され前記第２せん断
形ゲージの入力端に定電圧が供給され基準応力に
応答する電圧ＥＲを出力端より得る基準応力ゲー
ジと、前記電圧Ｅｐと前記電圧ＥＴと前記電圧Ｅ
Ｒと基準温度での前記圧力温度ゲージの前記入力
端における電圧Ｅｐ０と前記基準温度での前記基
準応力ゲージの前記出力端における電圧ＥＲ０と
を用いて実質的にＥｐ／（ＥＴＥＲ／ＥＴ０ＥＲ
０）なる演算を実行する演算手段とを具備し、前
記被測定圧力に対応した圧力信号を出力すること
を特徴とする半導体圧力変換器。 In a semiconductor pressure transducer having at least two shear type gauges of P type conductivity formed on a semiconductor single crystal gauge chip whose crystal plane is in the 100 plane direction, the crystal axis of the first shear type gauge is < 10
A constant current is supplied to the input end of the first shear type gauge formed on the gauge chip in the 0> direction, and a voltage Ep responsive to the pressure to be measured is obtained from the output end, and at the same time, a voltage responsive to a temperature change of the gauge chip. A pressure/temperature gauge that obtains ET from the input end and a second shear type gauge are formed on the gauge chip with their crystal axes oriented in the <100> direction, and a constant voltage is supplied to the input end of the second shear type gauge to maintain the reference stress. A reference stress gauge that obtains a responsive voltage ER from its output end, the voltage Ep , the voltage ET, and the voltage E
R, the voltage E p0 at the input end of the pressure temperature gauge at the reference temperature, and the voltage ER 0 at the output end of the reference stress gauge at the reference temperature, substantially E p /(ETER/ET 0ER
1. A semiconductor pressure transducer, comprising: arithmetic means for executing the arithmetic operation (0 ), and outputs a pressure signal corresponding to the pressure to be measured.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17114384U JPH043243Y2 (en) | 1984-11-12 | 1984-11-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17114384U JPH043243Y2 (en) | 1984-11-12 | 1984-11-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6184836U true JPS6184836U (en) | 1986-06-04 |
| JPH043243Y2 JPH043243Y2 (en) | 1992-02-03 |
Family
ID=30728839
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17114384U Expired JPH043243Y2 (en) | 1984-11-12 | 1984-11-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH043243Y2 (en) |
-
1984
- 1984-11-12 JP JP17114384U patent/JPH043243Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH043243Y2 (en) | 1992-02-03 |
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