JPS6190237U - - Google Patents
Info
- Publication number
- JPS6190237U JPS6190237U JP17521584U JP17521584U JPS6190237U JP S6190237 U JPS6190237 U JP S6190237U JP 17521584 U JP17521584 U JP 17521584U JP 17521584 U JP17521584 U JP 17521584U JP S6190237 U JPS6190237 U JP S6190237U
- Authority
- JP
- Japan
- Prior art keywords
- polygonal
- triangular
- periphery
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
Landscapes
- Mechanical Treatment Of Semiconductor (AREA)
Description
第１図ａおよびｂは本考案の一実施例による平
面図及び側面図である。第２図は本考案の一実施
例による切り込み部分の拡大図である。第３図ａ
およびｂは従来のシリコンウエーハの平面図およ
び側面図である。
１，１１…シリコンウエーハ、２…切り込み。
Figures 1a and 1b are a plan view and a side view of an embodiment of the present invention. FIG. 2 is an enlarged view of a cut portion according to an embodiment of the present invention. Figure 3a
and b are a plan view and a side view of a conventional silicon wafer. 1, 11...Silicon wafer, 2...Notch.
Claims (1)
みをつけたことを特徴とする半導体ウエーハ。 A semiconductor wafer characterized by having polygonal or semicircular incisions of triangular or larger size around its periphery.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17521584U JPS6190237U (en) | 1984-11-19 | 1984-11-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17521584U JPS6190237U (en) | 1984-11-19 | 1984-11-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6190237U true JPS6190237U (en) | 1986-06-12 |
Family
ID=30732819
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17521584U Pending JPS6190237U (en) | 1984-11-19 | 1984-11-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6190237U (en) |
-
1984
- 1984-11-19 JP JP17521584U patent/JPS6190237U/ja active Pending