JPS6197842U - - Google Patents
Info
- Publication number
- JPS6197842U JPS6197842U JP18756585U JP18756585U JPS6197842U JP S6197842 U JPS6197842 U JP S6197842U JP 18756585 U JP18756585 U JP 18756585U JP 18756585 U JP18756585 U JP 18756585U JP S6197842 U JPS6197842 U JP S6197842U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafers
- basket
- storage container
- rotary table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims description 40
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Description
第１図は本考案に係るウエハ移し替え装置の一
実施例を説明する概略正面図、第２図、第３図及
び第４図は、本考案に係るウエハ移し替え方法を
順に示した概略説明図である。
１は支持台、２は回転テーブル、３はウエハ収
容容器、４は２４枚のウエハ、４ａ，４ｂ，４ｃ
はウエハ、５，６はバスケツトホルダー、７，８
はウエハバスケツト、９，１０は押し上げ手段、
９Ａ，９Ｂと１０Ａ，１０Ｂはプツシヤー群、１
１はウエハ抱持部、１２はクランプ、１３は移動
機構、１４はガイドバー。
FIG. 1 is a schematic front view illustrating an embodiment of a wafer transfer device according to the present invention, and FIGS. 2, 3, and 4 are schematic illustrations sequentially showing a wafer transfer method according to the present invention. It is a diagram. 1 is a support stand, 2 is a rotary table, 3 is a wafer storage container, 4 is 24 wafers, 4a, 4b, 4c
is a wafer, 5 and 6 are basket holders, and 7 and 8 are
is a wafer basket, 9 and 10 are pushing means,
9A, 9B and 10A, 10B are pusher groups, 1
1 is a wafer holding part, 12 is a clamp, 13 is a moving mechanism, and 14 is a guide bar.
Claims (1)
ウエハ表面同士を対面させた背面合わせ状態で収
容するためのウエハバスケツトと、複数枚のウエ
ハを垂直に且つ隣接ウエハがそのウエハ表面とウ
エハ背面を対面させた正規状態で収容するための
ウエハ収容容器を備え、該ウエハ収容容器の収容
ウエハをウエハバスケツトへ背面合わせ状態に又
は該ウエハバスケツトの収容ウエハをウエハ収容
容器へ正規状態に移し替えるウエハ移し替え装置
であつて、 該ウエハ収容容器を容器中心からずれた位置を
中心にして１８０度回転自在に保持する回転テー
ブルと、 該ウエハ収容容器の側方に平行して該ウエハバ
スケツトを保持するバスケツトホルダと、 該回転テーブル下部に設けられ、該ウエハ収容
容器内又はウエハバスケツト内に並べられたウエ
ハのうち所定の枚数間隔で位置する複数のウエハ
を押し上げる押し上げ手段と、 該回転テーブルおよびバスケツトホルダ上部に
設けられ、両者の間をその上部で移動可能であり
、該押し上げ手段により押し上げられた所定ウエ
ハを抱持し、両者の間で移し替えるウエハ抱持部
とを有し、 該ウエハ収容容器とウエハバスケツトとのあい
だでウエハを移し替えるに際し、該所定枚数間隔
で位置する第一の複数のウエハを移し替えた後、
回転テーブルを１８０度回転させてウエハ収容容
器をウエハの並べられた方向にずらし、さらに同
様にして第２の複数のウエハを移し替えるように
したことを特徴とするウエハ移し替え装置。[Claims for Utility Model Registration] A wafer basket for accommodating a plurality of wafers vertically and in a back-to-back state with adjacent wafers facing each other; A wafer storage container is provided for storing the wafers in a normal state with the front surface of the wafer and the back surface of the wafer facing each other, and the wafers stored in the wafer storage container are placed back-to-back into the wafer basket, or the wafers stored in the wafer basket are transferred to the wafer storage container. A wafer transfer device for transferring wafers to a normal state, which comprises: a rotary table that holds the wafer storage container rotatably 180 degrees around a position offset from the center of the container; a basket holder for holding the wafer basket; a pushing means provided at the bottom of the rotary table for pushing up a plurality of wafers positioned at predetermined intervals among the wafers arranged in the wafer storage container or the wafer basket; A wafer holding part is provided above the rotary table and the basket holder, is movable between the two above, holds a predetermined wafer pushed up by the pushing up means, and transfers the wafer between them. However, when transferring wafers between the wafer storage container and the wafer basket, after transferring the first plurality of wafers located at the predetermined number of wafer intervals,
A wafer transfer apparatus characterized in that a rotary table is rotated 180 degrees to shift a wafer storage container in the direction in which the wafers are arranged, and a second plurality of wafers are transferred in the same manner.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18756585U JPS629727Y2 (en) | 1985-12-05 | 1985-12-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18756585U JPS629727Y2 (en) | 1985-12-05 | 1985-12-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6197842U true JPS6197842U (en) | 1986-06-23 |
| JPS629727Y2 JPS629727Y2 (en) | 1987-03-06 |
Family
ID=30745026
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18756585U Expired JPS629727Y2 (en) | 1985-12-05 | 1985-12-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS629727Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016213459A (en) * | 2015-04-30 | 2016-12-15 | 環球晶圓股▲ふん▼有限公司 | Wafer transfer apparatus and wafer transfer method |
-
1985
- 1985-12-05 JP JP18756585U patent/JPS629727Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016213459A (en) * | 2015-04-30 | 2016-12-15 | 環球晶圓股▲ふん▼有限公司 | Wafer transfer apparatus and wafer transfer method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS629727Y2 (en) | 1987-03-06 |
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