JPS62106961U - - Google Patents
Info
- Publication number
- JPS62106961U JPS62106961U JP19560485U JP19560485U JPS62106961U JP S62106961 U JPS62106961 U JP S62106961U JP 19560485 U JP19560485 U JP 19560485U JP 19560485 U JP19560485 U JP 19560485U JP S62106961 U JPS62106961 U JP S62106961U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- source
- metal
- cooling trap
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 3
- 238000005566 electron beam evaporation Methods 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims 2
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案電子ビーム蒸着装置の一実施例
斜視図、第２図は第１図におけるＡ―Ａ′断面模
式図である。
１……真空槽、２……ルツボ、３……凹部、４
……電子銃フイラメント、５……試料台、６……
膜厚モニタ、７……クライオポンプ、８……主バ
ルブ、９……荒引き系バルブ、１０……ロータリ
ーポンプ、１１……第１の冷却トラツプ、１２…
…導入管、１３……排出管、１４……第２の冷却
トラツプ、１５……パイプ。
FIG. 1 is a perspective view of an embodiment of the electron beam evaporation apparatus of the present invention, and FIG. 2 is a schematic cross-sectional view taken along line AA' in FIG. 1... Vacuum chamber, 2... Crucible, 3... Concavity, 4
...Electron gun filament, 5...Sample stage, 6...
Film thickness monitor, 7... Cryopump, 8... Main valve, 9... Roughing system valve, 10... Rotary pump, 11... First cooling trap, 12...
...inlet pipe, 13...discharge pipe, 14...second cooling trap, 15...pipe.
Claims (1)
れたルツボと、このルツボ内のソースに熱電子を
与える電子銃と、上記ルツボから放出されるソー
ス金属が蒸着される試料が配される試料台と、か
ら成り、上記ルツボと資料台との間に上記ルツボ
の凹部以外を被う冷却トラツプを設けた事を特徴
とした電子ビーム蒸着装置。 A crucible in which a recessed portion for placing a metal source is provided in a vacuum chamber, an electron gun for applying thermoelectrons to the source in the crucible, and a sample on which a source metal emitted from the crucible is deposited. 1. An electron beam evaporation apparatus comprising a table, and a cooling trap is provided between the crucible and the data table to cover the area other than the recessed part of the crucible.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19560485U JPS62106961U (en) | 1985-12-19 | 1985-12-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19560485U JPS62106961U (en) | 1985-12-19 | 1985-12-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62106961U true JPS62106961U (en) | 1987-07-08 |
Family
ID=31153640
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19560485U Pending JPS62106961U (en) | 1985-12-19 | 1985-12-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62106961U (en) |
-
1985
- 1985-12-19 JP JP19560485U patent/JPS62106961U/ja active Pending
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