JPS62106961U - - Google Patents

Info

Publication number
JPS62106961U
JPS62106961U JP19560485U JP19560485U JPS62106961U JP S62106961 U JPS62106961 U JP S62106961U JP 19560485 U JP19560485 U JP 19560485U JP 19560485 U JP19560485 U JP 19560485U JP S62106961 U JPS62106961 U JP S62106961U
Authority
JP
Japan
Prior art keywords
crucible
source
metal
cooling trap
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19560485U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19560485U priority Critical patent/JPS62106961U/ja
Publication of JPS62106961U publication Critical patent/JPS62106961U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)

Description

【図面の簡単な説明】
第１図は本考案電子ビーム蒸着装置の一実施例
斜視図、第２図は第１図におけるＡ―Ａ′断面模
式図である。 １……真空槽、２……ルツボ、３……凹部、４
……電子銃フイラメント、５……試料台、６……
膜厚モニタ、７……クライオポンプ、８……主バ
ルブ、９……荒引き系バルブ、１０……ロータリ
ーポンプ、１１……第１の冷却トラツプ、１２…
…導入管、１３……排出管、１４……第２の冷却
トラツプ、１５……パイプ。

Claims (1)

    【実用新案登録請求の範囲】
  1. 真空槽内に、金属ソースを配する凹部が設けら
    れたルツボと、このルツボ内のソースに熱電子を
    与える電子銃と、上記ルツボから放出されるソー
    ス金属が蒸着される試料が配される試料台と、か
    ら成り、上記ルツボと資料台との間に上記ルツボ
    の凹部以外を被う冷却トラツプを設けた事を特徴
    とした電子ビーム蒸着装置。
JP19560485U 1985-12-19 1985-12-19 Pending JPS62106961U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19560485U JPS62106961U (ja) 1985-12-19 1985-12-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19560485U JPS62106961U (ja) 1985-12-19 1985-12-19

Publications (1)

Publication Number Publication Date
JPS62106961U true JPS62106961U (ja) 1987-07-08

Family

ID=31153640

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19560485U Pending JPS62106961U (ja) 1985-12-19 1985-12-19

Country Status (1)

Country Link
JP (1) JPS62106961U (ja)

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