JPS62124894A - Clean robot - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] This invention relates to a lean robot suitable for use in a clean room.

[Technical background and problems of the invention]

With the development of the semiconductor industry, the number of workers who generate dust has increased to one or two in a clean room, which is inversely proportional to the degree of integration. Therefore, it is desired to replace as much of the work that was previously done by workers as possible with machines, and the development of clean robots has been rapidly progressing in recent years.

This development has a structure that prevents dust, which is often generated in rotating parts such as robot motors and deceleration mechanisms, and sliding parts such as linear motion, from scattering into the clean room. For example, dust is scattered into the clean room through small gaps in the robot arm. For this reason, the main measures used to prevent dust generation in robots used in clean environments include reducing the gaps as much as possible, using seal structures, and structures that suck and scavenge the air in the gaps.

Among these measures, the suction scavenging method is highly effective.

is used in most clean robots.

This scavenging pipe is connected to an air tube to discharge the air outside the clean room.

However, the support of the robot, such as the arm, is made of a cast metal article, and if this arm is covered with a closed container, the arm becomes quite thick, and there is a demand for miniaturization.

[Purpose of the invention]

This invention was made in response to the above points.

Compact and lightweight with excellent suction scavenging method to prevent dust generation.

This provides a clean robot aimed at ease of processing.

[Summary of the invention]

That is, in a robot having a support body provided with a rotation mechanism at the end thereof, the support body is formed of a cylindrical container, a suction means is provided at one end of the container, and the container is used as a sweep duct. The purpose is to obtain a clean robot that does the following.

[Embodiments of the invention]

Next, embodiments of the robot of the present invention will be described with reference to the drawings.

Figure 1 shows the arm of the robot, and the support that makes up the arm is, for example, a rectangular cylindrical aluminum pipe (1).
to form. Both end opening surfaces of this pipe (1) are covered +
2) (Sealed by 31 to form a container, for example, an airtight container.

A first and a second motor (4) are installed at one end of this airtight container.
(5), and the rotating shaft of this motor (4) is connected by a belt (6) stretched within the airtight container to an arm (for rotating force) provided at the other end of the airtight container. That is, the belt (6) is coupled to the rotation axis (8) of the arm (7).The rotation of the rotation axis (8) causes the arm to rotate, for example, by 220 degrees, around the center line (9). This rotation is made possible by the wrist rotation bearing (1) (11).

On the other hand, the rotating shaft of the motor (5) is provided with a belt α2 stretched in the airtight container so as to be driven to rotate in the direction of the arm (hand (13) provided at the tip of the force (arrow 04)). That is, the belt (the other end of which is connected to the rotating shaft a5 provided at the other end of the airtight container) is connected to the rotating shaft (19), and the hand (13) is connected to the center by a gear coupling (not shown). It is configured to rotate around a line C16).

A gap α7)0υ is formed in this robot arm, and in order to prevent dust from scattering from this gap α7)(2), a suction mechanism such as a vacuum pump (not shown) is installed at one end of the airtight container. The air tube wire is connected to the air tube. This air tube (19 is the cover (3)
The outer ring part is firmly reinforced and joined with a presser foot.

Therefore, when the vacuum pump is operated and the air cheep αa performs a suction operation, the inside of the pipe (1) becomes an air duct, and air flow is generated in the air cheep Ill 1i 111. That is, inside the pipe (1), there is a strong air current in the space except for the drive system (bell) (6) t13.

The dust generated by the rotating mechanism UCI (1!19 (Iυ), etc. is sucked in by the airflow generated above. Due to the generation of the airflow, the airflow from the outside of the arm into the pipe (1) This creates an airflow that flows into the arm and improves the scattering of filler into the clean room outside the arm.In other words, by using the inside of the pipe (1) that acts as a support as a scavenging duct, it is necessary to airtightly surround the outside of the arm. is eliminated, and the arm can be configured as a convex H. In the above-mentioned embodiment J, an example was explained in which the suction means was provided at the end of the arm, but it may be provided not only at the end but also at the side. ) may also be made of pipe material, and the hand (131) and the pipe (1) may be connected by an air tube.Furthermore, in the above embodiment, an example of an arm as the support body was explained. ,
If it is a support, it may be applied to a robot body that supports an arm.

〔Effect of the invention〕

As explained above, according to the present invention, the device can be constructed to be small and lightweight using the sweeping method which is excellent in preventing dust generation, and can be easily processed.

[Brief explanation of drawings]

FIG. 1 is an explanatory diagram of an embodiment of the robot of the present invention. 1...Pipe 7...Arm 13...Hand 16.12...Belt 17.18.
...Gap 19...Air Cheeve Agent
Patent Attorney Nori Chika Sodo Kikuo Takehana

Claims (2)

[Claims] (1) A robot having a support body provided with a rotation mechanism at the end thereof, characterized in that the support body is composed of a cylindrical container, a suction means is provided at one end of the container, and the container is used as a sweep duct. A clean robot. (2) The clean robot according to claim 1, wherein the container is a metal pipe.