JPS62125245U - - Google Patents
Info
- Publication number
- JPS62125245U JPS62125245U JP1986012673U JP1267386U JPS62125245U JP S62125245 U JPS62125245 U JP S62125245U JP 1986012673 U JP1986012673 U JP 1986012673U JP 1267386 U JP1267386 U JP 1267386U JP S62125245 U JPS62125245 U JP S62125245U
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- photomask
- showing
- view
- plan
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 2
- 238000009434 installation Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986012673U JPH0132044Y2 (2) | 1986-01-30 | 1986-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986012673U JPH0132044Y2 (2) | 1986-01-30 | 1986-01-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62125245U true JPS62125245U (2) | 1987-08-08 |
| JPH0132044Y2 JPH0132044Y2 (2) | 1989-10-02 |
Family
ID=30801020
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986012673U Expired JPH0132044Y2 (2) | 1986-01-30 | 1986-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0132044Y2 (2) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014192287A (ja) * | 2013-03-27 | 2014-10-06 | Tdk Corp | 電子部品の製造装置およびその製造方法 |
-
1986
- 1986-01-30 JP JP1986012673U patent/JPH0132044Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014192287A (ja) * | 2013-03-27 | 2014-10-06 | Tdk Corp | 電子部品の製造装置およびその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0132044Y2 (2) | 1989-10-02 |