JPH0132044Y2 - - Google Patents
Info
- Publication number
- JPH0132044Y2 JPH0132044Y2 JP1986012673U JP1267386U JPH0132044Y2 JP H0132044 Y2 JPH0132044 Y2 JP H0132044Y2 JP 1986012673 U JP1986012673 U JP 1986012673U JP 1267386 U JP1267386 U JP 1267386U JP H0132044 Y2 JPH0132044 Y2 JP H0132044Y2
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- photomask
- predetermined
- measuring means
- position measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 10
- 238000000034 method Methods 0.000 description 7
- 238000009434 installation Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 239000000428 dust Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000020 Nitrocellulose Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229920001220 nitrocellulos Polymers 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986012673U JPH0132044Y2 (2) | 1986-01-30 | 1986-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986012673U JPH0132044Y2 (2) | 1986-01-30 | 1986-01-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62125245U JPS62125245U (2) | 1987-08-08 |
| JPH0132044Y2 true JPH0132044Y2 (2) | 1989-10-02 |
Family
ID=30801020
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986012673U Expired JPH0132044Y2 (2) | 1986-01-30 | 1986-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0132044Y2 (2) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5673719B2 (ja) * | 2013-03-27 | 2015-02-18 | Tdk株式会社 | 電子部品の製造装置およびその製造方法 |
-
1986
- 1986-01-30 JP JP1986012673U patent/JPH0132044Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62125245U (2) | 1987-08-08 |
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