JPS62129059U - - Google Patents
Info
- Publication number
- JPS62129059U JPS62129059U JP1558086U JP1558086U JPS62129059U JP S62129059 U JPS62129059 U JP S62129059U JP 1558086 U JP1558086 U JP 1558086U JP 1558086 U JP1558086 U JP 1558086U JP S62129059 U JPS62129059 U JP S62129059U
- Authority
- JP
- Japan
- Prior art keywords
- evaporated
- bell gear
- thin film
- evaporation source
- evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims 3
- 238000001704 evaporation Methods 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000000126 substance Substances 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 2
- 238000012806 monitoring device Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
図面は本考案にかかる一実施例を示す該略図で
ある。
１…ベルジヤ、２…ルツボ、３…シヤツタ、５
…反射板、６…覗窓筒体、７…基板、１０…テレ
ビカメラ。
The drawing is a schematic diagram showing an embodiment of the present invention. 1... bell jar, 2... crucible, 3... shutter, 5
...reflector, 6... viewing window barrel, 7... board, 10... television camera.
Claims (1)
発物質を基板上に付着させる薄膜製造装置におい
て、ベルジヤ側部の蒸発物質の蒸発方向の死角部
分に覗窓を付き出して設置し、この覗窓で蒸発源
を監視できる位置のベルジヤ内に反射板を設けた
ことを特徴とする薄膜製造装置の監視装置。 In a thin film production device in which evaporated substances evaporated from an evaporation source installed in a bell gear are deposited on a substrate, a viewing window is installed in a blind spot in the evaporation direction of the evaporated substances on the side of the bell gear, and A monitoring device for a thin film manufacturing device, characterized in that a reflecting plate is provided in a bell gear at a position where an evaporation source can be monitored.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1558086U JPS62129059U (en) | 1986-02-05 | 1986-02-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1558086U JPS62129059U (en) | 1986-02-05 | 1986-02-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62129059U true JPS62129059U (en) | 1987-08-15 |
Family
ID=30806641
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1558086U Pending JPS62129059U (en) | 1986-02-05 | 1986-02-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62129059U (en) |
-
1986
- 1986-02-05 JP JP1558086U patent/JPS62129059U/ja active Pending
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