JPS62130938A - 薄板状物体の取出し装置 - Google Patents

薄板状物体の取出し装置

Info

Publication number
JPS62130938A
JPS62130938A JP60267509A JP26750985A JPS62130938A JP S62130938 A JPS62130938 A JP S62130938A JP 60267509 A JP60267509 A JP 60267509A JP 26750985 A JP26750985 A JP 26750985A JP S62130938 A JPS62130938 A JP S62130938A
Authority
JP
Japan
Prior art keywords
take
light
out arm
wafer
light receiving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60267509A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0244738B2 (cs
Inventor
Yoshiki Iwata
岩田　義樹
Manabu Matsuo
学 松尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Canon Marketing Japan Inc
Original Assignee
Canon Inc
Canon Hanbai KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc, Canon Hanbai KK filed Critical Canon Inc
Priority to JP60267509A priority Critical patent/JPS62130938A/ja
Publication of JPS62130938A publication Critical patent/JPS62130938A/ja
Publication of JPH0244738B2 publication Critical patent/JPH0244738B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Controlling Sheets Or Webs (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP60267509A 1985-11-29 1985-11-29 薄板状物体の取出し装置 Granted JPS62130938A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60267509A JPS62130938A (ja) 1985-11-29 1985-11-29 薄板状物体の取出し装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60267509A JPS62130938A (ja) 1985-11-29 1985-11-29 薄板状物体の取出し装置

Publications (2)

Publication Number Publication Date
JPS62130938A true JPS62130938A (ja) 1987-06-13
JPH0244738B2 JPH0244738B2 (cs) 1990-10-05

Family

ID=17445827

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60267509A Granted JPS62130938A (ja) 1985-11-29 1985-11-29 薄板状物体の取出し装置

Country Status (1)

Country Link
JP (1) JPS62130938A (cs)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01297836A (ja) * 1988-05-25 1989-11-30 Nec Kyushu Ltd ウェーハ受け渡し装置
WO1992005920A1 (en) * 1990-09-27 1992-04-16 Genmark Automation Scanning end effector assembly
JPH0528041U (ja) * 1991-09-20 1993-04-09 東京応化工業株式会社 縦型ウエハー処理装置のウエハー移載機構
JPH06169003A (ja) * 1992-11-27 1994-06-14 Dainippon Screen Mfg Co Ltd 基板搬送装置
JPH1064970A (ja) * 1996-08-23 1998-03-06 Rohm Co Ltd ウェハ・サーチ方法およびその装置
US6037733A (en) * 1996-03-22 2000-03-14 Genmark Automation Robot having multiple degrees of freedom
US6121743A (en) * 1996-03-22 2000-09-19 Genmark Automation, Inc. Dual robotic arm end effectors having independent yaw motion
US6489741B1 (en) 1998-08-25 2002-12-03 Genmark Automation, Inc. Robot motion compensation system

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01297836A (ja) * 1988-05-25 1989-11-30 Nec Kyushu Ltd ウェーハ受け渡し装置
WO1992005920A1 (en) * 1990-09-27 1992-04-16 Genmark Automation Scanning end effector assembly
JPH0528041U (ja) * 1991-09-20 1993-04-09 東京応化工業株式会社 縦型ウエハー処理装置のウエハー移載機構
JPH06169003A (ja) * 1992-11-27 1994-06-14 Dainippon Screen Mfg Co Ltd 基板搬送装置
US6037733A (en) * 1996-03-22 2000-03-14 Genmark Automation Robot having multiple degrees of freedom
US6121743A (en) * 1996-03-22 2000-09-19 Genmark Automation, Inc. Dual robotic arm end effectors having independent yaw motion
JPH1064970A (ja) * 1996-08-23 1998-03-06 Rohm Co Ltd ウェハ・サーチ方法およびその装置
US6489741B1 (en) 1998-08-25 2002-12-03 Genmark Automation, Inc. Robot motion compensation system

Also Published As

Publication number Publication date
JPH0244738B2 (cs) 1990-10-05

Similar Documents

Publication Publication Date Title
EP0252471B1 (en) Selective test pack feeder for biochemical analyzing apparatus
EP0305964A2 (en) Chip mounting apparatus
JP6336715B2 (ja) 把持機構
JP2007322289A (ja) 搬送装置
KR940015472A (ko) 안과용 렌즈 검사 장치 및 방법
ATE82933T1 (de) Greifvorrichtung.
KR960026526A (ko) 웨이퍼 측면파지 이송 반도체 제조장치
JPH01148966A (ja) 検体搬送装置
US20200072855A1 (en) Transport system, sample analyzer, sample rack, and transport regulation method
US5824185A (en) Wafer ring supply and return device
JP3733123B2 (ja) 容器検出装置
CN207312615U (zh) 医用耗材存储盒夹紧装置、抓取装置及化学发光检测仪
JPH0244738B2 (cs)
CN112141706A (zh) 产品抓取装置及芯片测试设备
JP6619928B2 (ja) 把持装置、搬送装置、及び分析装置
JP2011072952A (ja) 分類装置
CN119284700B (zh) 一种天车装置和晶圆盒运输方法
CN105480448A (zh) 移液器吸头装盒辅助装置
DK433289A (da) Automatisk tilfoersels- og ladeindretning for arkformede emner
JPH113903A (ja) 半田ボールの搭載装置および搭載方法
ES2093758T3 (es) Gancho para un accionamiento lineal.
CN212245341U (zh) 一种端盖提升机
CN218123379U (zh) 芯片测试设备
JPH0636575Y2 (ja) 熱処理装置
JPH06135685A (ja) 天井走行車

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term