JPS62140723U - - Google Patents
Info
- Publication number
- JPS62140723U JPS62140723U JP2761186U JP2761186U JPS62140723U JP S62140723 U JPS62140723 U JP S62140723U JP 2761186 U JP2761186 U JP 2761186U JP 2761186 U JP2761186 U JP 2761186U JP S62140723 U JPS62140723 U JP S62140723U
- Authority
- JP
- Japan
- Prior art keywords
- push
- pin
- vapor phase
- phase growth
- growth apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2761186U JPS62140723U (2) | 1986-02-28 | 1986-02-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2761186U JPS62140723U (2) | 1986-02-28 | 1986-02-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62140723U true JPS62140723U (2) | 1987-09-05 |
Family
ID=30829803
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2761186U Pending JPS62140723U (2) | 1986-02-28 | 1986-02-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62140723U (2) |
-
1986
- 1986-02-28 JP JP2761186U patent/JPS62140723U/ja active Pending
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