JPS62148574U - - Google Patents

Info

Publication number
JPS62148574U
JPS62148574U JP1986036403U JP3640386U JPS62148574U JP S62148574 U JPS62148574 U JP S62148574U JP 1986036403 U JP1986036403 U JP 1986036403U JP 3640386 U JP3640386 U JP 3640386U JP S62148574 U JPS62148574 U JP S62148574U
Authority
JP
Japan
Prior art keywords
raw material
material gas
grown
inlet pipe
vapor phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1986036403U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986036403U priority Critical patent/JPS62148574U/ja
Publication of JPS62148574U publication Critical patent/JPS62148574U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1986036403U 1986-03-12 1986-03-12 Pending JPS62148574U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986036403U JPS62148574U (fr) 1986-03-12 1986-03-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986036403U JPS62148574U (fr) 1986-03-12 1986-03-12

Publications (1)

Publication Number Publication Date
JPS62148574U true JPS62148574U (fr) 1987-09-19

Family

ID=30846773

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986036403U Pending JPS62148574U (fr) 1986-03-12 1986-03-12

Country Status (1)

Country Link
JP (1) JPS62148574U (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008060369A (ja) * 2006-08-31 2008-03-13 Sumitomo Electric Ind Ltd 気相成長装置、化合物半導体膜及びその成長方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008060369A (ja) * 2006-08-31 2008-03-13 Sumitomo Electric Ind Ltd 気相成長装置、化合物半導体膜及びその成長方法

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