JPS6216548B2 - - Google Patents
Info
- Publication number
- JPS6216548B2 JPS6216548B2 JP54040132A JP4013279A JPS6216548B2 JP S6216548 B2 JPS6216548 B2 JP S6216548B2 JP 54040132 A JP54040132 A JP 54040132A JP 4013279 A JP4013279 A JP 4013279A JP S6216548 B2 JPS6216548 B2 JP S6216548B2
- Authority
- JP
- Japan
- Prior art keywords
- phs
- conductive film
- manufacturing
- present
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P54/00—Cutting or separating of wafers, substrates or parts of devices
Landscapes
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4013279A JPS55133560A (en) | 1979-04-03 | 1979-04-03 | Method of fabricating semiconductor element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4013279A JPS55133560A (en) | 1979-04-03 | 1979-04-03 | Method of fabricating semiconductor element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55133560A JPS55133560A (en) | 1980-10-17 |
| JPS6216548B2 true JPS6216548B2 (fr) | 1987-04-13 |
Family
ID=12572272
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4013279A Granted JPS55133560A (en) | 1979-04-03 | 1979-04-03 | Method of fabricating semiconductor element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55133560A (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2330942B (en) * | 1997-11-04 | 1999-09-15 | Samsung Electronics Co Ltd | Magnetron |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5226869B2 (fr) * | 1972-09-09 | 1977-07-16 |
-
1979
- 1979-04-03 JP JP4013279A patent/JPS55133560A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55133560A (en) | 1980-10-17 |
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