JPS62167885A - 炭素被膜を有する複合体の作製方法 - Google Patents

炭素被膜を有する複合体の作製方法

Info

Publication number
JPS62167885A
JPS62167885A JP61277517A JP27751786A JPS62167885A JP S62167885 A JPS62167885 A JP S62167885A JP 61277517 A JP61277517 A JP 61277517A JP 27751786 A JP27751786 A JP 27751786A JP S62167885 A JPS62167885 A JP S62167885A
Authority
JP
Japan
Prior art keywords
carbon
carbon film
film
present
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61277517A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0427690B2 (da
Inventor
Shunpei Yamazaki
舜平 山崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP61277517A priority Critical patent/JPS62167885A/ja
Publication of JPS62167885A publication Critical patent/JPS62167885A/ja
Publication of JPH0427690B2 publication Critical patent/JPH0427690B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP61277517A 1986-11-19 1986-11-19 炭素被膜を有する複合体の作製方法 Granted JPS62167885A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61277517A JPS62167885A (ja) 1986-11-19 1986-11-19 炭素被膜を有する複合体の作製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61277517A JPS62167885A (ja) 1986-11-19 1986-11-19 炭素被膜を有する複合体の作製方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP56146930A Division JPS5848428A (ja) 1981-09-17 1981-09-17 炭素被膜を有する複合体およびその作製方法

Publications (2)

Publication Number Publication Date
JPS62167885A true JPS62167885A (ja) 1987-07-24
JPH0427690B2 JPH0427690B2 (da) 1992-05-12

Family

ID=17584698

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61277517A Granted JPS62167885A (ja) 1986-11-19 1986-11-19 炭素被膜を有する複合体の作製方法

Country Status (1)

Country Link
JP (1) JPS62167885A (da)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07161646A (ja) * 1993-12-13 1995-06-23 Nec Corp 多結晶膜作成方法
JPH07242493A (ja) * 1993-01-07 1995-09-19 Internatl Business Mach Corp <Ibm> 基板上にダイアモンド状カーボン・フィルムを付着する方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5328576A (en) * 1976-08-13 1978-03-16 Nat Res Dev Surface coating process with cargonaceous material and apparatus therefor
JPS5578524A (en) * 1978-12-10 1980-06-13 Shunpei Yamazaki Manufacture of semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5328576A (en) * 1976-08-13 1978-03-16 Nat Res Dev Surface coating process with cargonaceous material and apparatus therefor
JPS5578524A (en) * 1978-12-10 1980-06-13 Shunpei Yamazaki Manufacture of semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07242493A (ja) * 1993-01-07 1995-09-19 Internatl Business Mach Corp <Ibm> 基板上にダイアモンド状カーボン・フィルムを付着する方法
JPH07161646A (ja) * 1993-12-13 1995-06-23 Nec Corp 多結晶膜作成方法

Also Published As

Publication number Publication date
JPH0427690B2 (da) 1992-05-12

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