JPS6217851B2 - - Google Patents

Info

Publication number
JPS6217851B2
JPS6217851B2 JP56006685A JP668581A JPS6217851B2 JP S6217851 B2 JPS6217851 B2 JP S6217851B2 JP 56006685 A JP56006685 A JP 56006685A JP 668581 A JP668581 A JP 668581A JP S6217851 B2 JPS6217851 B2 JP S6217851B2
Authority
JP
Japan
Prior art keywords
spinner
glass substrate
photoresist
resist coating
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56006685A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57121227A (en
Inventor
Toshiaki Tsurushima
Chuji Tawara
Nobuji Tsucha
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP56006685A priority Critical patent/JPS57121227A/ja
Publication of JPS57121227A publication Critical patent/JPS57121227A/ja
Publication of JPS6217851B2 publication Critical patent/JPS6217851B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/162—Coating on a rotating support, e.g. using a whirler or a spinner

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP56006685A 1981-01-20 1981-01-20 Resist applying device Granted JPS57121227A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56006685A JPS57121227A (en) 1981-01-20 1981-01-20 Resist applying device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56006685A JPS57121227A (en) 1981-01-20 1981-01-20 Resist applying device

Publications (2)

Publication Number Publication Date
JPS57121227A JPS57121227A (en) 1982-07-28
JPS6217851B2 true JPS6217851B2 (2) 1987-04-20

Family

ID=11645205

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56006685A Granted JPS57121227A (en) 1981-01-20 1981-01-20 Resist applying device

Country Status (1)

Country Link
JP (1) JPS57121227A (2)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6467135A (en) * 1987-08-03 1989-03-13 Rubbermaid Inc Automatic water-supply planter

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4674724A (en) * 1982-08-03 1987-06-23 Future Apparatus Corporation Collapsible stand especially for books
JPH02249225A (ja) * 1989-03-22 1990-10-05 Fujitsu Ltd レジスト塗布装置
DE4024642A1 (de) * 1990-08-03 1992-02-06 Ibm Schleuderteller fuer substrate
JP2649219B2 (ja) * 1995-05-01 1997-09-03 ホーヤ株式会社 スピンチャックおよび処理液塗布方法
CN108996468B (zh) * 2018-06-29 2020-10-09 中国石油天然气股份有限公司 微米级玻璃刻蚀模型的封装方法及设备

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS584587B2 (ja) * 1977-06-14 1983-01-27 松下電器産業株式会社 回転式粘性剤塗布方法およびその装置
JPS5472973A (en) * 1977-11-24 1979-06-11 Hitachi Ltd Rotary applying unit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6467135A (en) * 1987-08-03 1989-03-13 Rubbermaid Inc Automatic water-supply planter

Also Published As

Publication number Publication date
JPS57121227A (en) 1982-07-28

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