JPS62201930U - - Google Patents
Info
- Publication number
- JPS62201930U JPS62201930U JP9036886U JP9036886U JPS62201930U JP S62201930 U JPS62201930 U JP S62201930U JP 9036886 U JP9036886 U JP 9036886U JP 9036886 U JP9036886 U JP 9036886U JP S62201930 U JPS62201930 U JP S62201930U
- Authority
- JP
- Japan
- Prior art keywords
- developing device
- nozzle
- piping
- hole
- photoresist developing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920002120 photoresistant polymer Polymers 0.000 claims description 3
- 230000002265 prevention Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Description
第１図はこの考案の一実施例によるフオトレジ
スト現像装置のノズル装置の構成図、第２図は従
来の現像装置の全体の断面図、第３図は従来のノ
ズル装置の構成図である。
７：ノズル、７ａ：ノズル口、１０：サツクバ
ツク装置、１２：穴、１３：配管、１５：逆流防
止弁。なお、図中同一符号は同一又は相当部分を
示す。
FIG. 1 is a block diagram of a nozzle device of a photoresist developing device according to an embodiment of the invention, FIG. 2 is a sectional view of the entire conventional developing device, and FIG. 3 is a block diagram of a conventional nozzle device. 7: nozzle, 7a: nozzle opening, 10: suction device, 12: hole, 13: piping, 15: backflow prevention valve. Note that the same reference numerals in the figures indicate the same or equivalent parts.
Claims (1)
から滴下した現像液を塗布する現像装置において
、上記ノズルのノズル口とは別に先端下面に穴を
あけ、この穴にサツクバツク装置と接続した配管
を連通すると共に、配管の途中に逆流防止弁を備
えたことを特徴とするフオトレジストの現像装置
。 In a developing device that applies a developer dripped from a nozzle onto a wafer that has been suctioned and mounted on a rotary table, a hole is made in the bottom surface of the tip of the nozzle, separate from the nozzle opening, and piping is connected to the suction device through this hole. What is claimed is: 1. A photoresist developing device, characterized in that the photoresist developing device is provided with a backflow prevention valve in the middle of the piping.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9036886U JPS62201930U (en) | 1986-06-13 | 1986-06-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9036886U JPS62201930U (en) | 1986-06-13 | 1986-06-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62201930U true JPS62201930U (en) | 1987-12-23 |
Family
ID=30950162
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9036886U Pending JPS62201930U (en) | 1986-06-13 | 1986-06-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62201930U (en) |
-
1986
- 1986-06-13 JP JP9036886U patent/JPS62201930U/ja active Pending
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