JPS62201936U - - Google Patents
Info
- Publication number
- JPS62201936U JPS62201936U JP1986090514U JP9051486U JPS62201936U JP S62201936 U JPS62201936 U JP S62201936U JP 1986090514 U JP1986090514 U JP 1986090514U JP 9051486 U JP9051486 U JP 9051486U JP S62201936 U JPS62201936 U JP S62201936U
- Authority
- JP
- Japan
- Prior art keywords
- pad
- wafer
- vacuum
- pedestal
- peripheral portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986090514U JPS62201936U (2) | 1986-06-16 | 1986-06-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986090514U JPS62201936U (2) | 1986-06-16 | 1986-06-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62201936U true JPS62201936U (2) | 1987-12-23 |
Family
ID=30950452
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986090514U Pending JPS62201936U (2) | 1986-06-16 | 1986-06-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62201936U (2) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55152173A (en) * | 1979-04-06 | 1980-11-27 | Lintott Eng Ltd | Vacuum apparatus |
| JPS6158260A (ja) * | 1984-08-29 | 1986-03-25 | Ulvac Corp | 基板の冷却装置 |
| JPS6177242A (ja) * | 1984-09-21 | 1986-04-19 | Toshiba Mach Co Ltd | ウエ−ハの冷却装置 |
-
1986
- 1986-06-16 JP JP1986090514U patent/JPS62201936U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55152173A (en) * | 1979-04-06 | 1980-11-27 | Lintott Eng Ltd | Vacuum apparatus |
| JPS6158260A (ja) * | 1984-08-29 | 1986-03-25 | Ulvac Corp | 基板の冷却装置 |
| JPS6177242A (ja) * | 1984-09-21 | 1986-04-19 | Toshiba Mach Co Ltd | ウエ−ハの冷却装置 |
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