JPS62201936U - - Google Patents
Info
- Publication number
- JPS62201936U JPS62201936U JP9051486U JP9051486U JPS62201936U JP S62201936 U JPS62201936 U JP S62201936U JP 9051486 U JP9051486 U JP 9051486U JP 9051486 U JP9051486 U JP 9051486U JP S62201936 U JPS62201936 U JP S62201936U
- Authority
- JP
- Japan
- Prior art keywords
- pad
- wafer
- vacuum
- pedestal
- peripheral portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 3
- 239000011888 foil Substances 0.000 claims description 2
- 229910001338 liquidmetal Inorganic materials 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 238000005219 brazing Methods 0.000 claims 1
- 229910052733 gallium Inorganic materials 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 description 1
Description
第１図は本案装置の１例の平面図、第２図はそ
の―線截断側面図である。 １…ウエハ、２…イオンビーム、３…冷却手段
、４…台座、５…パツド、５ａ…金属箔、５ｂ…
周縁部、５ｃ…内部空間、８…液体金属。
の―線截断側面図である。 １…ウエハ、２…イオンビーム、３…冷却手段
、４…台座、５…パツド、５ａ…金属箔、５ｂ…
周縁部、５ｃ…内部空間、８…液体金属。
Claims (1)
- イオン注入その他の真空処理を施されるウエハ
を、冷却管その他の冷却手段を有する台座上に、
中間のパツドを介して、当接して支承させる式の
ものにおいて、該パツドをアルミニウムその他の
金属箔の少なくとも１枚で構成させると共に、そ
の周縁部をろう付その他で該台座側に結着してそ
の内部に生ずる空間内にガリウムその他の液体金
属を真空封入して成るウエハの支承装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9051486U JPS62201936U (ja) | 1986-06-16 | 1986-06-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9051486U JPS62201936U (ja) | 1986-06-16 | 1986-06-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62201936U true JPS62201936U (ja) | 1987-12-23 |
Family
ID=30950452
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9051486U Pending JPS62201936U (ja) | 1986-06-16 | 1986-06-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62201936U (ja) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55152173A (en) * | 1979-04-06 | 1980-11-27 | Lintott Eng Ltd | Vacuum apparatus |
| JPS6158260A (ja) * | 1984-08-29 | 1986-03-25 | Ulvac Corp | 基板の冷却装置 |
| JPS6177242A (ja) * | 1984-09-21 | 1986-04-19 | Toshiba Mach Co Ltd | ウエ−ハの冷却装置 |
-
1986
- 1986-06-16 JP JP9051486U patent/JPS62201936U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55152173A (en) * | 1979-04-06 | 1980-11-27 | Lintott Eng Ltd | Vacuum apparatus |
| JPS6158260A (ja) * | 1984-08-29 | 1986-03-25 | Ulvac Corp | 基板の冷却装置 |
| JPS6177242A (ja) * | 1984-09-21 | 1986-04-19 | Toshiba Mach Co Ltd | ウエ−ハの冷却装置 |