JPS62201936U - - Google Patents

Info

Publication number
JPS62201936U
JPS62201936U JP1986090514U JP9051486U JPS62201936U JP S62201936 U JPS62201936 U JP S62201936U JP 1986090514 U JP1986090514 U JP 1986090514U JP 9051486 U JP9051486 U JP 9051486U JP S62201936 U JPS62201936 U JP S62201936U
Authority
JP
Japan
Prior art keywords
pad
wafer
vacuum
pedestal
peripheral portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1986090514U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986090514U priority Critical patent/JPS62201936U/ja
Publication of JPS62201936U publication Critical patent/JPS62201936U/ja
Pending legal-status Critical Current

Links

JP1986090514U 1986-06-16 1986-06-16 Pending JPS62201936U (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986090514U JPS62201936U (it) 1986-06-16 1986-06-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986090514U JPS62201936U (it) 1986-06-16 1986-06-16

Publications (1)

Publication Number Publication Date
JPS62201936U true JPS62201936U (it) 1987-12-23

Family

ID=30950452

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986090514U Pending JPS62201936U (it) 1986-06-16 1986-06-16

Country Status (1)

Country Link
JP (1) JPS62201936U (it)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55152173A (en) * 1979-04-06 1980-11-27 Lintott Eng Ltd Vacuum apparatus
JPS6158260A (ja) * 1984-08-29 1986-03-25 Ulvac Corp 基板の冷却装置
JPS6177242A (ja) * 1984-09-21 1986-04-19 Toshiba Mach Co Ltd ウエ−ハの冷却装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55152173A (en) * 1979-04-06 1980-11-27 Lintott Eng Ltd Vacuum apparatus
JPS6158260A (ja) * 1984-08-29 1986-03-25 Ulvac Corp 基板の冷却装置
JPS6177242A (ja) * 1984-09-21 1986-04-19 Toshiba Mach Co Ltd ウエ−ハの冷却装置

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