JPS622537U - - Google Patents
Info
- Publication number
- JPS622537U JPS622537U JP9281885U JP9281885U JPS622537U JP S622537 U JPS622537 U JP S622537U JP 9281885 U JP9281885 U JP 9281885U JP 9281885 U JP9281885 U JP 9281885U JP S622537 U JPS622537 U JP S622537U
- Authority
- JP
- Japan
- Prior art keywords
- wafers
- advancing
- wafer
- retracting mechanism
- retreating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims description 21
- 238000000926 separation method Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
Description
第１図は本考案の実施例によるウエハ分離装置
の要部構成図、第２図は第１図のウエハ分離装置
のウエハを進退させる進退機構を示す構造図、第
３図は第１図のウエハ分離装置によりウエハを分
離するときの状況を示す動作説明図である。
１：吸着パツド、２：真空源、３：進退機構、
４：マガジン、６：ウエハ、Ｘ：開放端面、Ｙ：
吸着面。
FIG. 1 is a structural diagram of the main parts of a wafer separation apparatus according to an embodiment of the present invention, FIG. 2 is a structural diagram showing the advancing and retracting mechanism for moving wafers forward and backward in the wafer separation apparatus of FIG. 1, and FIG. FIG. 3 is an operation explanatory diagram showing a situation when a wafer separation device separates a wafer. 1: Suction pad, 2: Vacuum source, 3: Advance/retreat mechanism,
4: Magazine, 6: Wafer, X: Open end surface, Y:
Adsorption surface.
Claims (1)
る装置であつて、前記積み重ねられたウエハが載
置されこの積重ね方向に進退する進退機構と、前
記積み重ねられたウエハの反進退機構側が開放さ
れた開放端面を有し該ウエハを取り囲み前記進退
機構の進退時に該ウエハをこの進退方向に案内す
るマガジンと、真空源と接続され前記マガジンの
前記開放端面との間のギヤツプが前記ウエハの１
放分より大きく２枚分より小さい吸着面を備えて
前記ウエハの積重ね方向と直角の方向に移動可能
に構成された吸着パツドとを備え、前記ウエハの
分離時に、前記進退機構が前進してウエハを前記
吸着パツドに押し着けるとともに前記真空源を作
動させてウエハを吸着させた後前記進退機構を後
退させ、しかる後前記吸着パツドをウエハの積重
ね方向と直角の方向に移動させることによりウエ
ハを１枚づつ分離することを特徴とするウエハ分
離装置。 A device for separating a plurality of stacked wafers one by one, comprising an advancing/retracting mechanism on which the stacked wafers are placed and advancing and retreating in the stacking direction, and an opening in which the side of the stacked wafers opposite the advancing/retracting mechanism is open. A gap between a magazine having an end surface that surrounds the wafer and guides the wafer in the advancing and retreating direction when the advancing and retreating mechanism advances and retreats, and the open end surface of the magazine that is connected to a vacuum source is one of the wafers.
A suction pad is provided with a suction surface larger than one wafer and smaller than two wafers, and is configured to be movable in a direction perpendicular to the stacking direction of the wafers, and when the wafers are separated, the advancing/retracting mechanism moves forward to pick up the wafers. is pressed against the suction pad and the vacuum source is activated to adsorb the wafer, and then the advancing and retracting mechanism is retracted, and then the suction pad is moved in a direction perpendicular to the stacking direction of the wafers, thereby removing the wafer one by one. A wafer separation device that separates wafers one by one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9281885U JPH0344754Y2 (en) | 1985-06-19 | 1985-06-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9281885U JPH0344754Y2 (en) | 1985-06-19 | 1985-06-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS622537U true JPS622537U (en) | 1987-01-09 |
| JPH0344754Y2 JPH0344754Y2 (en) | 1991-09-20 |
Family
ID=30649951
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9281885U Expired JPH0344754Y2 (en) | 1985-06-19 | 1985-06-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0344754Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017080862A (en) * | 2015-10-30 | 2017-05-18 | 日本電気硝子株式会社 | Sheet glass manufacturing method and manufacturing apparatus |
-
1985
- 1985-06-19 JP JP9281885U patent/JPH0344754Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017080862A (en) * | 2015-10-30 | 2017-05-18 | 日本電気硝子株式会社 | Sheet glass manufacturing method and manufacturing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0344754Y2 (en) | 1991-09-20 |
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