JPS6232526U - - Google Patents
Info
- Publication number
- JPS6232526U JPS6232526U JP12481685U JP12481685U JPS6232526U JP S6232526 U JPS6232526 U JP S6232526U JP 12481685 U JP12481685 U JP 12481685U JP 12481685 U JP12481685 U JP 12481685U JP S6232526 U JPS6232526 U JP S6232526U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- exposure
- ultraviolet rays
- opening
- substrate support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 4
- 210000000078 claw Anatomy 0.000 claims description 3
- 239000000463 material Substances 0.000 claims 1
- 239000012780 transparent material Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12481685U JPS6232526U (mo) | 1985-08-14 | 1985-08-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12481685U JPS6232526U (mo) | 1985-08-14 | 1985-08-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6232526U true JPS6232526U (mo) | 1987-02-26 |
Family
ID=31017182
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12481685U Pending JPS6232526U (mo) | 1985-08-14 | 1985-08-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6232526U (mo) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0236888A (ja) * | 1988-07-27 | 1990-02-06 | Kiyobumi Yokoyama | シートのトリミング兼コーナ折り用工具 |
-
1985
- 1985-08-14 JP JP12481685U patent/JPS6232526U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0236888A (ja) * | 1988-07-27 | 1990-02-06 | Kiyobumi Yokoyama | シートのトリミング兼コーナ折り用工具 |
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