JPS6233350A - magneto-optical disk - Google Patents

magneto-optical disk

Info

Publication number
JPS6233350A
JPS6233350A JP17215885A JP17215885A JPS6233350A JP S6233350 A JPS6233350 A JP S6233350A JP 17215885 A JP17215885 A JP 17215885A JP 17215885 A JP17215885 A JP 17215885A JP S6233350 A JPS6233350 A JP S6233350A
Authority
JP
Japan
Prior art keywords
magneto
protective film
optical recording
ratio
recording medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17215885A
Other languages
Japanese (ja)
Other versions
JPH0731832B2 (en
Inventor
Katsuhiko Yorozu
雄彦 萬
Mikihiko Ito
幹彦 伊藤
Junya Tada
多田 準也
Takehiko Sato
佐藤 威彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Metal Mining Co Ltd
Original Assignee
Sumitomo Metal Mining Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Metal Mining Co Ltd filed Critical Sumitomo Metal Mining Co Ltd
Priority to JP60172158A priority Critical patent/JPH0731832B2/en
Publication of JPS6233350A publication Critical patent/JPS6233350A/en
Publication of JPH0731832B2 publication Critical patent/JPH0731832B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 「産業上の利用分野」 この発明は、光磁気ディスク、特に光磁気記録媒体層を
保護する保護膜を有する光磁気ディスクに関するもので
ある。
DETAILED DESCRIPTION OF THE INVENTION "Field of Industrial Application" The present invention relates to a magneto-optical disk, particularly a magneto-optical disk having a protective film for protecting a magneto-optical recording medium layer.

「従来の技術」 レーザ光を使用して情報の記録、再生及び消去を行う光
磁気ディスクは、高密度の情報の記録が可能であり、且
つ情報の消去や追加記録が出来るので、各方向に広く使
用されている。
"Prior Art" Magneto-optical disks, which use laser light to record, reproduce, and erase information, are capable of recording high-density information, as well as erasing and additionally recording information. Widely used.

この種の光磁気ディスクの光磁気記録媒体としては、T
b−Fe系Tb−Fe−Co系、Gd−Tb−Fe系Q
ものなどが使用されているが、いずれのものも酸化など
の耐蝕性の面で充分ではない。このために光磁気ディス
クにおいて光磁気記録媒体層を保護するための各種の手
段が提案されている。
As a magneto-optical recording medium of this kind of magneto-optical disk, T
b-Fe system Tb-Fe-Co system, Gd-Tb-Fe system Q
However, none of them have sufficient resistance to corrosion such as oxidation. To this end, various means have been proposed for protecting the magneto-optical recording medium layer in the magneto-optical disk.

例えば光磁気記録媒体を不活性ガスを充填した膜間に挾
持させ、光磁気記録媒体の作成時における酸素の混入を
防止し、さらに最上層に容易に酸化し易い金属膜を形成
し、外部からの酸素はこの金属膜を酸化させることに費
して酸素の混入を防止する方法が提案されている(特開
昭59−110052号)。さらには、光磁気記録媒体
と基板間に酸素を取り込んで安定化する還元性の誘電体
膜を形成し、この誘電体膜の存在で、光磁気記録媒体の
酸化を防止しようとする方法も提案されている(特開昭
59−110056号)また光磁気記録媒体をM。
For example, a magneto-optical recording medium is sandwiched between films filled with inert gas to prevent oxygen from being mixed in during the production of the magneto-optical recording medium, and a metal film that is easily oxidized is formed on the top layer to prevent external interference. A method has been proposed in which oxygen is used to oxidize the metal film to prevent oxygen from entering the metal film (Japanese Patent Laid-Open No. 110052/1983). Furthermore, a method has been proposed in which a reducing dielectric film is formed between the magneto-optical recording medium and the substrate to stabilize the magneto-optical recording medium by incorporating oxygen, and the presence of this dielectric film is used to prevent oxidation of the magneto-optical recording medium. (Japanese Unexamined Patent Publication No. 59-110056) also uses magneto-optical recording media.

Bi、 Pbなどの非通気性で防湿効果の高い保護膜で
保護する方式のものが提案されている(特開昭58−8
0142号)。
A method of protecting with a non-porous and highly moisture-proof protective film such as Bi or Pb has been proposed (Japanese Patent Laid-Open No. 58-8
No. 0142).

しかし提案されているいずれの方法によっても、空気中
の湿気や油分及び水分の存在する雰囲気での、光磁気記
録媒体の酸化や腐蝕からの防止は不充分である。このた
めに実用面では、このような雰囲気での光磁気記録媒体
の長時間にわたる使用に際しては、光磁気記録媒体が劣
化して、記録条件が変化し、記録情報のドロップアウト
の問題やC/N比の低下などの問題が完全には解決され
ていなかった。
However, with any of the proposed methods, it is insufficient to prevent the magneto-optical recording medium from oxidation and corrosion in an atmosphere containing atmospheric moisture, oil, and moisture. For this reason, in practical terms, when a magneto-optical recording medium is used for a long period of time in such an atmosphere, the magneto-optical recording medium deteriorates, the recording conditions change, and problems such as dropout of recorded information and C/C. Problems such as a decrease in the N ratio have not been completely resolved.

「発明の解決すべき問題点」 この発明は、従来提案されている光磁気ディスクにおけ
る光磁気記録媒体の保護上の欠点を解決し、非通気性及
び非透湿性の保護膜で光磁気記録媒体を保護し、全体の
膜構造が簡単で作成上の成膜工程数が少なく製造技術も
複雑化せず、優れた光磁気記録再生特性を有する光磁気
ディスクを提供するものである。
"Problems to be Solved by the Invention" This invention solves the drawbacks of protecting magneto-optical recording media in magneto-optical disks that have been proposed in the past, and uses an air-impermeable and moisture-impermeable protective film to protect magneto-optical recording media. The object of the present invention is to provide a magneto-optical disk which has excellent magneto-optical recording and reproducing characteristics, has a simple overall film structure, requires fewer film-forming steps, does not require complicated manufacturing techniques, and has excellent magneto-optical recording and reproducing characteristics.

「発明の構成」 この発明においては、ガラスやポリカーボネート、アク
リル、エボキン、ポリメチルベンランなどの透明高分子
材で形成される透明基板上に構成される光磁気記録媒体
層に対して、組成がMOxもしくはDOyもしくはMZ
DI−ZOWで表わされ、前記光磁気記録媒体層を保護
する保護膜が形成される。
"Structure of the Invention" In this invention, a magneto-optical recording medium layer formed on a transparent substrate made of a transparent polymer material such as glass, polycarbonate, acrylic, Evoquin, polymethylbenrane, etc. MOx or DOy or MZ
A protective film, represented by DI-ZOW, is formed to protect the magneto-optical recording medium layer.

この保護膜は高周波スパッタリング或は反応性スパッタ
リングにより膜厚が100OA乃至5000Aに形成さ
れ、少なくとも光磁気記録媒体層の透明基板と反対側の
面に積層形成される。
This protective film is formed to a thickness of 100 Å to 5000 Å by high frequency sputtering or reactive sputtering, and is laminated on at least the surface of the magneto-optical recording medium layer opposite to the transparent substrate.

この発明では保護膜の組成を示すMはZrもしくはCr
でDはHfもしくはZnであり、x、 y、 z及びW
にはそれぞれ、0.6イxf1.9. Q、4&yfl
、9. O< z〈1及びQ、4fWf1.9なる条件
が設定される。
In this invention, M indicating the composition of the protective film is Zr or Cr.
where D is Hf or Zn, and x, y, z and W
respectively, 0.6 x f1.9. Q, 4&yfl
,9. The following conditions are set: O<z<1 and Q, 4fWf1.9.

光磁気記録媒体層としては、TbFe 、 GdCo 
、 TbCo。
As the magneto-optical recording medium layer, TbFe, GdCo
, TbCo.

DyCo、 GdTbFe、 QdFeCo、 TbD
yFe、 GdTbDyFe。
DyCo, GdTbFe, QdFeCo, TbD
yFe, GdTbDyFe.

TbDyFeCo  なとの希土類遷移金属合金薄膜や
、これらにSn、 Zn、 Ge、 Pb、 Si、 
Bi、 B、 Crなどを添加含有させた希土類遷移金
属合金薄膜が用いられ、これらの薄膜が例えば1000
 Aの膜厚に真空蒸着やスパッタリングの手段により形
成される。
Rare earth transition metal alloy thin films such as TbDyFeCo, Sn, Zn, Ge, Pb, Si,
Rare earth transition metal alloy thin films containing Bi, B, Cr, etc. are used, and these thin films have a thickness of, for example, 1000
It is formed to a thickness of A by means of vacuum evaporation or sputtering.

この発明の保護膜はXが0.6以下でy及びWが0、4
以下であると均質で透明な保護膜が得られず、X、y及
びWが1.9よりも大きな値をとると、酸素が過剰とな
り、この過剰な酸素が光磁気記録媒体層の形成時に、光
磁気記録媒体層内に混入して得られる光磁気ディスクの
光磁気記録再生特性を劣化させる。
In the protective film of this invention, X is 0.6 or less and y and W are 0, 4.
If it is less than 1.9, a homogeneous and transparent protective film cannot be obtained, and if X, y and W are larger than 1.9, there will be excess oxygen, and this excess oxygen will be used during the formation of the magneto-optical recording medium layer. , which deteriorates the magneto-optical recording and reproducing characteristics of the resulting magneto-optical disk by being mixed into the magneto-optical recording medium layer.

またこの過剰な酸素の存在によって、光磁気記録媒体層
の成膜工程において所望の真空度への到達時間が延長し
、光磁気ディスクの生産性が低下する。
Furthermore, the presence of this excess oxygen prolongs the time required to reach a desired degree of vacuum in the process of forming the magneto-optical recording medium layer, reducing the productivity of the magneto-optical disk.

保護膜の膜厚が1000 A以下であると、長時間使用
状態での非通気性及び非透湿性を維持することが出来ず
、得られる光磁気ディスクの光磁気記録再生特性が長時
間の使用状態で劣下する。
If the thickness of the protective film is less than 1000 A, it will not be possible to maintain air impermeability and moisture impermeability during long-term use, and the magneto-optical recording and reproducing characteristics of the resulting magneto-optical disk will deteriorate during long-term use. deteriorate in condition.

一方、保護膜の膜厚が5000 A以上になると、保護
膜内における熱拡散が増大し、光磁気記録時におけるレ
ーザ光の出力を増大させる必要が生じる。
On the other hand, when the thickness of the protective film exceeds 5000 A, thermal diffusion within the protective film increases, making it necessary to increase the output of laser light during magneto-optical recording.

この発明では基本的には第1図に示すように、透明基板
1上に光磁気記録媒体層2が形成され、この光磁気記録
媒体層2上に保護膜3が形成された構成とされる。しか
し第2図に示すように、透明基板1上に第1の保護膜3
−1が形成され、この第1の保護膜3−1上に光磁気記
録媒体層2が形成され、この光磁気記録媒体層2上に第
2の保護膜3−2が形成された構成のものとすることも
出来る。この第2図に示す構成のものでは、第1の保護
膜3−1は情報の読み出し光の内光磁気記録媒体層2を
通過した光を反射し、この光を光磁気記録媒体層2内で
多重反射させ、ファラデー効果によって読み出し用反射
光のカー回転角を増大し、再生C/N比を向上させる効
果も得られる。
In this invention, basically, as shown in FIG. 1, a magneto-optical recording medium layer 2 is formed on a transparent substrate 1, and a protective film 3 is formed on this magneto-optical recording medium layer 2. . However, as shown in FIG.
-1 is formed, a magneto-optical recording medium layer 2 is formed on this first protective film 3-1, and a second protective film 3-2 is formed on this magneto-optical recording medium layer 2. It can also be taken as a thing. In the configuration shown in FIG. 2, the first protective film 3-1 reflects the information reading light that has passed through the magneto-optical recording medium layer 2, and directs this light into the magneto-optical recording medium layer 2. The effect of increasing the Kerr rotation angle of the reflected light for reading due to the Faraday effect and improving the reproduction C/N ratio can also be obtained.

「実施例」 以下、この発明の光磁気ディスクを、その実施例に基づ
き製作法に沿って詳細に説明する。
``Example'' Hereinafter, the magneto-optical disk of the present invention will be described in detail based on the example and along with the manufacturing method.

第1表に実施例1乃至6及びそれぞれの実施例に対応す
る比較例1乃至20として、それぞれに対して初期C/
N比及び経時C/N比を示したのは、MをZr 、 D
をHfとした組成の保護膜を用いた光磁気ディスクであ
る。xr y、 z及びWと保護膜の膜厚がこの発明の
条件を満足する実施例としての光磁気ディスクと、x、
y、z及びWもしくは保護膜の膜厚がこの発明の条件を
満足しない比較例としての光磁気ディスクとがそれぞれ
示されている。
Table 1 shows Examples 1 to 6 and Comparative Examples 1 to 20 corresponding to each example.
The N ratio and C/N ratio over time were shown when M was Zr and D
This is a magneto-optical disk using a protective film having a composition of Hf. A magneto-optical disk as an embodiment in which xr y, z and W and the thickness of the protective film satisfy the conditions of the present invention, x,
Comparative examples of magneto-optical disks in which y, z, and W or the thickness of the protective film do not satisfy the conditions of the present invention are shown.

各実施例及び比較例では、第1図または第2図に示スよ
うに厚さ1.271mのンーダガラスの透明基板1上に
、高周波スパッタリングの手段により直接或は保護膜を
介してTb O,21Fe as5Co O,24なる
組成の光磁気記録媒体層2を膜厚1000 Aに形成し
、この光磁気記録媒体層2上に高純度酸素ガスを導入し
ながら高周波スパッタリングの手段により、保護膜を形
成した。
In each of the Examples and Comparative Examples, as shown in FIG. 1 or 2, TbO, TbO, A magneto-optical recording medium layer 2 having a composition of 21Fe as5CoO,24 was formed to a thickness of 1000 A, and a protective film was formed on the magneto-optical recording medium layer 2 by means of high frequency sputtering while introducing high purity oxygen gas. did.

いずれの実施例もしくは比較例の光磁気デ・イスクにお
いても、記録周波数2 MHz (RBW 30 I(
Hz )レーザパワー5 mwで記録が行われ、再生レ
ーザパワーl mwで再生を行った。記録直後に再生し
た場合のC/N比が第1表中の初期C/N比(dB )
であり、光磁気ディスクを温度60℃、90%RT(雰
囲気中に1000時間放置した後に再生を行って得られ
たC/N比が経時C/N比である。
In any of the examples or comparative examples, the recording frequency was 2 MHz (RBW 30 I).
Hz) Recording was performed with a laser power of 5 mw, and reproduction was performed with a reproduction laser power of l mw. The C/N ratio when played back immediately after recording is the initial C/N ratio (dB) in Table 1.
The C/N ratio obtained by reproducing the magneto-optical disk after leaving it in an atmosphere at 60° C. and 90% RT for 1000 hours is the aged C/N ratio.

実施例1は、組成がZr0tsで膜厚200OAの保護
膜3を第1図に示すように透過基板1上に直接形成した
場合であり、初期C/N比及び経時C/N比がそれぞれ
4.9(dB)及び48(dB)であり、保護膜3の存
在により長期の耐久性に優れ、安定した光磁気記録再生
特性を有する光磁気ディスクが得られていることが確認
される。
Example 1 is a case in which a protective film 3 having a composition of Zr0ts and a film thickness of 200 OA was formed directly on a transparent substrate 1 as shown in FIG. 1, and the initial C/N ratio and aging C/N ratio were each 4. .9 (dB) and 48 (dB), confirming that due to the presence of the protective film 3, a magneto-optical disk with excellent long-term durability and stable magneto-optical recording and reproducing characteristics was obtained.

比較例1は、実施例1と同一条件で、保護膜3の組成を
Zr0r)3として膜厚200OAに第1図のように保
護膜を形成した場合であり、酸素がこの発明の条件に対
して不足しているために均質で透明な保護膜3が得られ
ない。このために保護膜3が非通気性及び非透湿性の条
件を満足しなくなり、経時C/N比が36(dB)と大
幅に劣化する。
Comparative Example 1 is a case in which the composition of the protective film 3 is Zr0r)3 and the protective film is formed to a thickness of 200 OA as shown in Fig. 1 under the same conditions as Example 1, and the oxygen Because of the insufficient amount of the protective film 3, a homogeneous and transparent protective film 3 cannot be obtained. For this reason, the protective film 3 no longer satisfies the conditions of non-air permeability and non-moisture permeability, and the C/N ratio over time significantly deteriorates to 36 (dB).

第    1    表 比較例2は実施例1と同一条件で、保護膜3の組成をZ
r02.0として膜厚2000 Aに第1図に示すよう
に保護膜を形成した場合であり、この発明の条件に対し
て酸素が過剰に存在している。この過剰な酸素が光磁気
記録媒体層の形成時に光磁気記録媒体層内に混入するた
めに、初期C/N比及び経時C/N比がそれぞれ43(
dB)及び32(dB)となり、光磁気記録再生特性が
劣化している。
Table 1 Comparative Example 2 is under the same conditions as Example 1, but the composition of the protective film 3 is changed to Z.
This is a case where a protective film is formed as shown in FIG. 1 to a film thickness of 2000 A with r02.0, and oxygen is present in excess compared to the conditions of the present invention. Because this excess oxygen mixes into the magneto-optical recording medium layer during formation of the magneto-optical recording medium layer, the initial C/N ratio and the aging C/N ratio are respectively 43 (
dB) and 32 (dB), and the magneto-optical recording and reproducing characteristics have deteriorated.

比較例3は、実施例1と同一条件で、保護膜3の組成を
Zr01.sとして膜厚500Aに第1図に示すよ5に
保護膜を形成1−だ場合であり、この発明の膜厚の条件
よりも膜厚が薄い場合である。初期C/N比及び経時C
/N比がそれぞれ48(dB)及び35(dB)で、膜
厚が薄いために長時間使用状態での非通気性及び非透湿
性の維持が出来ないことが確認される。
Comparative Example 3 was conducted under the same conditions as Example 1, with the composition of the protective film 3 being Zr01. As shown in FIG. 1, a protective film is formed at a thickness of 500A as shown in FIG. Initial C/N ratio and aging C
/N ratios of 48 (dB) and 35 (dB), respectively, confirming that the film thickness is too thin to maintain air impermeability and moisture impermeability during long-term use.

比較例4は、実施例1と同一条件で、保護膜3の組成を
ZrO+、sとして膜厚7000 Aに第1図に示すよ
うに保護膜を形成した場合であり、この発明の膜厚の条
件よりも膜厚が厚い場合である。初期C/N比及び経時
C/N比がそれぞれ42(dB)及び41(dB)であ
って、膜が厚過ぎるためにC/N比が全般に低く、また
保護膜3内での熱拡散が増大し、レーザ光の出力を増大
させる必要がある。
Comparative Example 4 is a case where the protective film 3 was formed under the same conditions as in Example 1 to a thickness of 7000 A as shown in FIG. This is a case where the film thickness is thicker than the condition. The initial C/N ratio and the aging C/N ratio are 42 (dB) and 41 (dB), respectively, and the C/N ratio is generally low because the film is too thick. increases, and it is necessary to increase the output of the laser light.

実施例2は組成がHfOユ、5で膜厚2000λの保護
膜3を第1図に示すように形成した場合であり、初期C
/N比及び経時C/N比がそれぞれ5Q(dB)及び4
9(dB)となり、保護膜3の存在により長期の耐久性
に優れ、安定した光磁気記録再生特性を有する光磁気デ
ィスクが得られている。
Example 2 is a case in which a protective film 3 having a composition of HfOY.5 and a thickness of 2000λ was formed as shown in FIG.
/N ratio and C/N ratio over time are 5Q (dB) and 4, respectively.
9 (dB), and due to the presence of the protective film 3, a magneto-optical disk with excellent long-term durability and stable magneto-optical recording and reproducing characteristics has been obtained.

比較例5は実施例2と同一条件で、保護膜3の組成をH
f0o、s  として膜厚2000 Aに第1図に示す
ように保護膜を形成した場合であり、この発明の条件に
対して酸素が不足している。従って均質で透明な保護膜
3が得られず、保護膜3が非通気性及び非透湿性の条件
を満足しなくなり、初期Cハ比及び経時C/N比がそれ
ぞれ48(dB)及び35(dB )で、光磁気記録再
生特性が劣化している。
Comparative Example 5 was conducted under the same conditions as Example 2, but the composition of the protective film 3 was changed to H.
This is a case where a protective film is formed as shown in FIG. 1 with a film thickness of 2000 A as f0o,s, and oxygen is insufficient for the conditions of the present invention. Therefore, a homogeneous and transparent protective film 3 cannot be obtained, the protective film 3 no longer satisfies the conditions of air impermeability and moisture impermeability, and the initial C ratio and aging C/N ratio are 48 (dB) and 35 (dB), respectively. dB), the magneto-optical recording and reproducing characteristics deteriorate.

比較例6は一実施例2と同一条件で、保護膜3の組成を
HfO□0として膜厚2000λに第1図に示すように
保護膜を形成した場合でおり、この発明の条件に対して
酸素が過剰に存在している。この過剰な酸素が光磁気記
録媒体層の形成時に光磁気記録媒体層内に混入するため
に、初期C/N比及び経時C/N比がそれぞれ42(d
B)及び29(dB)となり、光磁気記録再生特性が劣
化している。
Comparative Example 6 is a case where the composition of the protective film 3 is HfO□0 and the protective film is formed to a thickness of 2000λ as shown in FIG. 1 under the same conditions as in Example 2. Excess oxygen is present. Because this excess oxygen is mixed into the magneto-optical recording medium layer during formation of the magneto-optical recording medium layer, the initial C/N ratio and the aging C/N ratio are each 42 (d
B) and 29 (dB), indicating that the magneto-optical recording and reproducing characteristics have deteriorated.

比較例7は、実施例2と同一条件で、保護膜3の組成な
Hf0t、sとして膜厚500Aに形成した場合であり
、この発明の膜厚の条件よりも膜厚が薄い場合である。
Comparative Example 7 is a case in which the protective film 3 is formed under the same conditions as Example 2 to a film thickness of 500 A with the composition Hf0t,s, which is thinner than the film thickness conditions of the present invention.

初期C/N比及び経時C/N比がそれぞれ48(dB)
及び33(dBンであり、膜厚が薄いために長時間使用
状態でのり1通気性及び非透湿性の維持が出来ないこと
が確認される。
Initial C/N ratio and aging C/N ratio are each 48 (dB)
and 33 (dB), confirming that the film cannot maintain breathability and moisture impermeability even after long-term use due to the thin film thickness.

比較例8は、実施例2と同一条件で、保護膜3の組成を
Hf01,5として膜厚7000 A K第1図に示す
ように保護膜を形成した場合であり、この発明の膜厚の
条件よりも膜厚が厚い場合である。初期C/N比及び経
時C/N比がそれぞれ41(dB)及び40(dB)で
あり、膜が厚過ぎるためにCハ比が全般に低く、また保
護膜3内での熱拡散が増大し、レーザ光の出力を増大さ
せる必要がある。
Comparative Example 8 is a case where the protective film 3 was formed under the same conditions as in Example 2, with the composition of Hf01.5 and a film thickness of 7000 AK as shown in FIG. This is a case where the film thickness is thicker than the condition. The initial C/N ratio and the aging C/N ratio are 41 (dB) and 40 (dB), respectively, and the C ratio is generally low because the film is too thick, and heat diffusion within the protective film 3 increases. However, it is necessary to increase the output of laser light.

実施例3は組成がZr01.sで膜厚2000 Aの保
護膜3−1.3−2を第2図に示すように光磁気記録媒
体層2を両面から挾むようにして透明基板1上に形成し
た場合であり、初期C/N比及び経時C/N比がいずれ
も52(dB)で、長期の耐久性に優れ、安定した光磁
気記録再生特性を有する光磁気ディスクが得られている
Example 3 has a composition of Zr01. This is the case where a protective film 3-1.3-2 with a film thickness of 2000 A and a thickness of 2000 A is formed on a transparent substrate 1 so as to sandwich the magneto-optical recording medium layer 2 from both sides as shown in FIG. 2, and the initial C/N is A magneto-optical disk with excellent long-term durability and stable magneto-optical recording and reproducing characteristics was obtained, with both the C/N ratio and the C/N ratio over time being 52 (dB).

比較例9は、実施例3と同一条件で、保護膜3−1.3
−2の組成をZr0o3として膜厚2000 Aに第2
図に示すように保護膜を形成した場合であり、酸素がこ
の発明の条件に対して不足しているために、均質で透明
な保護膜3が得られない。このために保護膜3が非通気
性及び非透湿性の条件を満足しなくなり、初期C/N比
及び経時C/N比がそれぞれ51(dB)及び42(d
B)で、特に経時C/N比が低下している。
Comparative Example 9 was conducted under the same conditions as Example 3, with protective film 3-1.3
-2 composition is Zr0o3 and the film thickness is 2000A.
This is a case where a protective film is formed as shown in the figure, and a homogeneous and transparent protective film 3 cannot be obtained because oxygen is insufficient compared to the conditions of the present invention. For this reason, the protective film 3 no longer satisfies the conditions of air impermeability and moisture impermeability, and the initial C/N ratio and aging C/N ratio are 51 (dB) and 42 (dB), respectively.
In B), the C/N ratio particularly decreases over time.

比較例10は、実施例3と同一条件で、保護膜3−1.
3−2の組成をZrO2,oとして膜厚2000Aに第
2図に示すように保護膜を形成した場合であり、この発
明の条件に対して酸素が過剰釦存在する。この過剰な酸
素が光磁気記録媒体層の形成時に光磁気記録媒体層内に
混入するために、初期C/N比及び経時C/N比が42
(dB)及び30(dB)で光磁気記録再生特性が劣化
している。
Comparative Example 10 was conducted under the same conditions as Example 3, with protective films 3-1.
This is the case where a protective film was formed with the composition of 3-2 as ZrO2,0 to a thickness of 2000 Å as shown in FIG. 2, and oxygen was present in excess compared to the conditions of the present invention. Because this excess oxygen is mixed into the magneto-optical recording medium layer during formation of the magneto-optical recording medium layer, the initial C/N ratio and the aging C/N ratio are 42.
(dB) and 30 (dB), the magneto-optical recording and reproducing characteristics deteriorate.

比較例11は、実施例3と同一条件で、保護膜3−1.
3−2の組成をZrO+、sとして膜厚500 Aに第
2図に示すよ5に保護膜を形成した場合であり、この発
明の膜厚の条件よりも膜厚が薄い場合である。初期C/
N比及び経時C/N比がそれぞれ49(dB)及び37
(dB)であり、膜厚が薄いために長時間使用状態での
非通気性及び非透湿性の維持が出来ないことが確認され
る。
Comparative Example 11 was conducted under the same conditions as Example 3, with protective films 3-1.
This is a case in which the composition of 3-2 is ZrO+, s and a protective film is formed at 500 Å in thickness as shown in FIG. 2, which is thinner than the film thickness condition of the present invention. Early C/
N ratio and C/N ratio over time are 49 (dB) and 37, respectively.
(dB), confirming that due to the thin film thickness, it is not possible to maintain air impermeability and moisture impermeability during long-term use.

比較例12は、実施例3と同一条件で、保護膜3−1.
3−2の組成をZrO+、s として膜厚7000’A
に第2図に示すように保護膜を形成した場合であり、こ
の発明の膜厚の条件よりも膜厚が厚い場合である。初期
C/N比及び経時C/N比がそれぞれ43(dB)及び
42(dB)であり、膜が厚過ぎるためにC/N比が全
般に低く、また保護膜3−1.3−2内での熱拡散が増
大し、レーザ光の出力を増大させる必要がある。
Comparative Example 12 was carried out under the same conditions as Example 3, with protective films 3-1.
The composition of 3-2 is ZrO+, s, and the film thickness is 7000'A.
This is a case where a protective film is formed as shown in FIG. 2, and the film thickness is thicker than the film thickness condition of the present invention. The initial C/N ratio and the aging C/N ratio are 43 (dB) and 42 (dB), respectively, and the C/N ratio is generally low because the film is too thick, and the protective film 3-1.3-2 Thermal diffusion within the laser beam increases, requiring an increase in the output power of the laser light.

実施例4は組成がHfO+、sで膜厚2000 Aの保
護膜3−1.3−2を第2図に示すように光磁気記録媒
体層を挾んで形成した場合であり、初期Cハ比及び経時
C/N比がいずれも52(dB)であり、長期の耐久性
に優れ、安定した光磁気記録再生特性を有する光磁気デ
ィスクが得られる。
Example 4 is a case in which a protective film 3-1.3-2 having a composition of HfO+, s and a film thickness of 2000 A was formed sandwiching a magneto-optical recording medium layer as shown in FIG. The C/N ratio over time was both 52 (dB), and a magneto-optical disk with excellent long-term durability and stable magneto-optical recording and reproducing characteristics was obtained.

比較例13は、実施例4と同一条件で、保護膜3−1.
3−2の組成をHf0o3  として膜厚2000Aに
第2図に示すように保護膜を形成した場合であり、酸素
がこの発明の条件に対して不足しているために、均質で
透明な保護膜3が得られない。このために保護膜3が非
通気性及び非透湿性の条件を満足しなくなり、初期C/
N比及び経時C/N比がそれぞれ51(dB)及び41
(dB)で特に経時C/N比が低下している。
Comparative Example 13 was conducted under the same conditions as Example 4, with protective films 3-1.
This is a case where a protective film is formed with the composition of 3-2 as Hf0o3 and a film thickness of 2000A as shown in Fig. 2. Since oxygen is insufficient for the conditions of this invention, a homogeneous and transparent protective film is formed. I can't get 3. For this reason, the protective film 3 no longer satisfies the conditions of non-air permeability and non-moisture permeability, and the initial C/
N ratio and C/N ratio over time are 51 (dB) and 41, respectively.
(dB), the C/N ratio decreases over time.

比較例14は、実施例4と同一条件で保護膜3−1.3
−2の組成をHfO2,Oとして膜厚を2000Aに第
2図に示すように保護膜を形成した場合であり、この発
明の条件に対して酸素が過剰に存在する。この過剰な酸
素が光磁気記録媒体層の形成時に、光磁気記録媒体層内
に混入するために、初期C/N比及び経時C/N比がそ
れぞれ43(dB)及び29(dB)で、光磁気記録再
生特性が劣化している。
Comparative Example 14 is a protective film 3-1.3 under the same conditions as Example 4.
This is the case where a protective film was formed as shown in FIG. 2 with a film thickness of 2000 Å using HfO2,O as the composition of -2, and oxygen was present in excess compared to the conditions of the present invention. Because this excess oxygen is mixed into the magneto-optical recording medium layer during formation of the magneto-optical recording medium layer, the initial C/N ratio and the aging C/N ratio are 43 (dB) and 29 (dB), respectively. Magneto-optical recording and reproducing characteristics have deteriorated.

比較例15は、実施例4と同一条件で、保護膜3−1.
3−2の組成をHfO,5として膜厚を50OAに第2
図に示すように保護膜を形成した場合であり、この発明
の膜厚の条件よりも膜厚が薄い場合である。初期C/N
比及び経時C/N比がそれぞれ49(dB)及び33(
dB)であり、膜厚が薄いために長時間使用状態での非
通気性及び非透湿性の維持が出来ないことが確認される
Comparative Example 15 was conducted under the same conditions as Example 4, with protective films 3-1.
The composition of 3-2 was HfO, 5, and the film thickness was 50OA.
This is a case where a protective film is formed as shown in the figure, and the film thickness is thinner than the film thickness condition of the present invention. Initial C/N
ratio and temporal C/N ratio were 49 (dB) and 33 (
dB), and it is confirmed that due to the thin film thickness, it is not possible to maintain air impermeability and moisture impermeability during long-term use.

比較例゛16は、実施例4と同一条件で、保護膜3−1
.3−2の組成をHfO,,5として膜厚を700OA
に第2図に示すように形成した場合であり、この発明の
膜厚の条件よりも膜厚が厚い場合である。
In Comparative Example 16, protective film 3-1 was prepared under the same conditions as Example 4.
.. The composition of 3-2 is HfO, 5, and the film thickness is 700OA.
This is the case where the film is formed as shown in FIG. 2, and the film thickness is thicker than the film thickness condition of the present invention.

初期C/N比及び経時C/N比がそれぞれ43 (dB
)及び42(dB)であり、膜が厚過ぎるために、C/
N比が全般に低く、また保護膜3内での熱拡散が増大し
、レーザ光の出力を増大させる必要がある。
The initial C/N ratio and the aging C/N ratio were each 43 (dB
) and 42 (dB), and because the film is too thick, C/
Since the N ratio is generally low and heat diffusion within the protective film 3 increases, it is necessary to increase the output of the laser beam.

実施例5は組成がZr o、s Hf O,501,5
で膜厚2000 Mの保護膜3を第1図に示すよ5に形
成した場合であり、初期C/N比及び経時C/N比がい
ずれも4ct(dm)で、保護膜3の存在により長期の
耐久性に優れ安定した光磁気記録再生特性を有する光磁
気ディスクが得られている。
Example 5 has a composition of Zr o, s Hf O, 501,5
This is the case where a protective film 3 with a film thickness of 2000 M is formed at 5 as shown in Fig. A magneto-optical disk having excellent long-term durability and stable magneto-optical recording and reproducing characteristics has been obtained.

また実施例6は組成がZr O,5Hf6,50.5で
膜厚2000人の保護膜3−1.3−2を第2図に示す
ように形成した場合であり、初期C/N比及び経時C/
N比がいずれも51(dB)で、保護膜3の存在により
長期の耐久性に優れ、安定した光磁気記録再生特性を有
する光磁気ディスクが得られる。
Further, in Example 6, a protective film 3-1.3-2 having a composition of ZrO,5Hf6,50.5 and a film thickness of 2000 was formed as shown in FIG. 2, and the initial C/N ratio and Time C/
The N ratio is 51 (dB) in each case, and due to the presence of the protective film 3, a magneto-optical disk having excellent long-term durability and stable magneto-optical recording and reproducing characteristics can be obtained.

比較例17は、実施例1と同一条件で、保護膜3の組成
をSiOとして膜厚2000 Aに第1図に示すように
保護膜を形成した場合、比較例18は実施例3と同一条
件で、保護膜3−1.3−2の組成をSiOとして膜厚
2000人に第2図に示すように保護膜を形成した場合
である。いずれの場合も初期C/N比及び経時C/N比
がそれぞれ49(dB)。
Comparative Example 17 was performed under the same conditions as Example 1, when the composition of the protective film 3 was SiO, and a protective film was formed to a thickness of 2000 A as shown in FIG. 1. Comparative Example 18 was performed under the same conditions as Example 3. This is the case where the composition of the protective film 3-1, 3-2 is SiO, and the protective film is formed to a thickness of 2000 mm as shown in FIG. In either case, the initial C/N ratio and the temporal C/N ratio were each 49 (dB).

52(dB)及び22 (dB)、 26 (dB)で
あり、この材質の保護膜が非通気性及び非透湿性の条件
を満足せず、この発明の組成の保護膜が優れていること
が示される。
52 (dB), 22 (dB), and 26 (dB), which indicates that the protective film made of this material does not satisfy the conditions of non-air permeability and non-moisture permeability, and that the protective film with the composition of the present invention is superior. shown.

比較例19は、実施例1と同一条件で、保護膜3の組成
をSi3N4として膜厚2000 Aに第1図に示すよ
うに保護膜を形成した場合、比較例20は実施例3と同
一条件で、保護膜3−1.3−2の組成な5i3N4と
して膜厚2000 &に第2図に示すように保護膜を形
成した場合である。
Comparative Example 19 was performed under the same conditions as Example 1, when the composition of the protective film 3 was Si3N4, and a protective film was formed to a thickness of 2000 A as shown in FIG. 1. Comparative Example 20 was performed under the same conditions as Example 3. This is the case where the protective film 3-1, 3-2 has a composition of 5i3N4 and the protective film is formed to a thickness of 2,000 mm as shown in FIG.

初期C/N比及び経時C/N比が、それぞれ49(dB
) 、 53 (dB)及び21 (aB)、 26 
(dB)であり、この材質の保護膜が非通気性及び非透
湿性の条件を満足せず、この発明の組成の保護膜の優れ
ていることが確認される。
The initial C/N ratio and the aging C/N ratio were each 49 (dB
), 53 (dB) and 21 (aB), 26
(dB), and the protective film made of this material does not satisfy the conditions of non-air permeability and non-moisture permeability, confirming that the protective film with the composition of the present invention is excellent.

第2表に同様に、実施例6乃至11とそれぞれの実施例
に対応する比較例21乃至3Gを取り上第      
2      表 げ、これらに対する初期C/N比及び経時C/・N比を
示す。
Similarly, Table 2 shows Examples 6 to 11 and Comparative Examples 21 to 3G corresponding to each example.
2, and the initial C/N ratio and C/·N ratio over time are shown for these.

実施例6は組成がCry、。で膜厚2000 Aの保護
膜3を第1図に示すように形成した場合であり、実施例
7は組成がZn0o7で膜厚2000λの保護膜3を第
1図に示すように形成した場合である。
Example 6 has a composition of Cry. Example 7 is a case in which a protective film 3 having a thickness of 2000 A and a thickness of 2000 λ is formed as shown in FIG. 1 with a composition of Zn0o7. be.

それぞれの実施例において、初期C/N比及び経時C/
N比は、48 (dB)、 50 (dB)及び48(
dB) 、  50 (dB)であり、保護膜3の存在
により長期の耐久性に優れ、安定した光磁気記録再生特
性を有する光磁気ディスクが得られている。
In each example, the initial C/N ratio and the aged C/N ratio
The N ratios are 48 (dB), 50 (dB) and 48 (
dB), 50 (dB), and due to the presence of the protective film 3, a magneto-optical disk with excellent long-term durability and stable magneto-optical recording and reproducing characteristics has been obtained.

実施例8は組成がCrOx、oで膜厚2000 Aの保
護膜3−1.3−2を第2図に示すように光磁気記録媒
体層2を挾んで形成した場合であり、実施例9は組成が
Zn0oフ で膜厚2000 Aの保護膜3−1゜3−
2を第2図に示すように光磁気記録媒体層2を挾んで形
成した場合である。
Example 8 is a case in which a protective film 3-1.3-2 having a composition of CrOx, o and a film thickness of 2000 A was formed sandwiching the magneto-optical recording medium layer 2 as shown in FIG. is a protective film 3-1゜3- whose composition is Zn0O and has a thickness of 2000A.
2 is formed by sandwiching the magneto-optical recording medium layer 2 as shown in FIG.

これらの実施例8及び9の初期C/N比及び経時C/N
比は、それぞれ51 (an)、 50 (dB)及び
50(dB)であり、保護膜3の存在により長期の耐久
性に優れ、安定した光磁気記録再生特性を有する光磁気
ディスクが得られている・実施例10は組成がCro5
zno、、 oo8で膜厚2000Aの保護膜3を第1
図に示すように一層のみ形成した場合で、実施例11は
組成がCro、5 Zn 6,500.Bで膜厚200
0 Aの保護膜3−1.3−2を、第2図に示すように
、光磁気記録媒体層2を挾んで形成した場合である。
Initial C/N ratio and aging C/N of these Examples 8 and 9
The ratios are 51 (an), 50 (dB), and 50 (dB), respectively, and the presence of the protective film 3 indicates that a magneto-optical disk with excellent long-term durability and stable magneto-optical recording and reproducing characteristics was obtained.・Example 10 has a composition of Cro5
Protective film 3 with a film thickness of 2000A with zno,, oo8 as the first
As shown in the figure, in the case of forming only one layer, Example 11 has a composition of Cro, 5 Zn, 6,500. Film thickness 200 at B
This is a case where protective films 3-1, 3-2 of 0 A are formed sandwiching the magneto-optical recording medium layer 2, as shown in FIG.

これらの実施例9及び10の初期C/N比及び経時C/
N比はそれぞれ50 (dB)、  48 (dB)及
び50 (dB) 、  47 (dB)であり、保護
膜3の存在により長期の耐久性に優れ、安定した光磁気
記録再生特性を有する光磁気ディスクが得られている。
Initial C/N ratio and aging C/N ratio of these Examples 9 and 10
The N ratio is 50 (dB), 48 (dB), 50 (dB), and 47 (dB), respectively, and due to the presence of the protective film 3, it has excellent long-term durability and has stable magneto-optical recording and reproducing characteristics. The disc is obtained.

比較例21.24.27及び30は、いずれも発明の条
件に対してそれぞれ酸素が不足している場合である。比
較例21.24.27及び30は、それぞれ実施例6に
対して保護膜3をCr0o、aとした場合、実施例7に
対して保護膜3をZn0o2とした場合、実施例8に対
して保護膜3−1.3−2をCr063とした場合及び
実施例9に対して保護膜3−1゜3−2をZn0.2に
した場合である。
Comparative Examples 21, 24, 27 and 30 are cases in which oxygen is insufficient compared to the conditions of the invention. Comparative Examples 21, 24, 27 and 30 are, respectively, when the protective film 3 is made of Cr0o, a for Example 6, when the protective film 3 is made of Zn0o2 for Example 7, and for Example 8. This is the case where the protective film 3-1.3-2 is made of Cr063, and the case where the protective film 3-1.3-2 is made of Zn0.2 in contrast to Example 9.

それぞれ初期C/N比及び経時C/N比が49(dB)
、  34 (dB)、  49 (dB)、  33
 (dB )。
Initial C/N ratio and aging C/N ratio are 49 (dB), respectively.
, 34 (dB), 49 (dB), 33
(dB).

51 (dB)、  41 (dB)及び50 (dn
 ) 、 40(dB)であり、酸素の不足のために均
質で透明な保護膜が得られず、また保護膜の非通気性及
び非透湿性の条件が満足されず、光磁気記録再生特性が
劣化している。
51 (dB), 41 (dB) and 50 (dn
), 40 (dB), a homogeneous and transparent protective film could not be obtained due to the lack of oxygen, and the conditions of air impermeability and moisture permeability of the protective film were not satisfied, resulting in poor magneto-optical recording and reproducing characteristics. It has deteriorated.

比較例22,25.28及び31は、いずれも発明の条
件に対してそれぞれ保護膜の膜厚が薄い場合である。
Comparative Examples 22, 25, 28, and 31 are all cases in which the thickness of the protective film is thinner than the conditions of the invention.

比較例22,25.28及び31はそれぞれ実施例6.
実施例7.実施例8及び実施例9に対して保護膜の膜厚
な50OAにした場合である。
Comparative Examples 22, 25, 28 and 31 are Example 6.
Example 7. This is the case where the thickness of the protective film is 50 OA, which is greater than that of Examples 8 and 9.

これらの比較例では、初期C/N比及び経時C/N比が
それぞれ、48 (dB)、  35 (an)。
In these comparative examples, the initial C/N ratio and the aging C/N ratio were 48 (dB) and 35 (an), respectively.

49 (dB)、  32 (dB)、  48 (d
B)、  35(dB)。
49 (dB), 32 (dB), 48 (d
B), 35 (dB).

及び49 (dB)、  34 (dn)であり、膜厚
が薄いために長時間使用状態での非通気性及び非透湿性
の維持が出来ず、光磁気記録再生特性が充分でな〜1゜ 比較例23,26.29及び32は、いずれも発明の条
件に対してそれぞれ保護膜の膜厚が厚い場合である。
and 49 (dB) and 34 (dn), and because the film thickness is thin, it is not possible to maintain air impermeability and moisture impermeability during long-term use, and magneto-optical recording and reproducing characteristics are insufficient. Comparative Examples 23, 26, 29, and 32 are all cases in which the thickness of the protective film is thicker than the conditions of the invention.

比較例23,26.29及び32は、それぞれ実施例6
.実施例7.実施例8及び実施例9に対して保護膜の膜
厚を700OAとした場合である。
Comparative Examples 23, 26, 29 and 32 are respectively Example 6
.. Example 7. This is the case where the thickness of the protective film was set to 700 OA for Examples 8 and 9.

これらの比較例では、それぞれ初期C/N比及び経時C
/N比が、41 (dB)、  39 (dB) 、 
42(aB)、 41 (an)、 42 (aB)、
 40 (dB)及び41(dB)であり、膜が厚過ぎ
るためにC/N比が全般に低く、また保護膜内での熱拡
散が増大し、レーザ光の出力を増大させる必要がある。
In these comparative examples, the initial C/N ratio and the aged C
/N ratio is 41 (dB), 39 (dB),
42 (aB), 41 (an), 42 (aB),
40 (dB) and 41 (dB), and because the film is too thick, the C/N ratio is generally low, and heat diffusion within the protective film increases, making it necessary to increase the output of the laser light.

比較例33及び34は、それぞれ実施例6及び実施例8
で保護膜を膜厚2000 AのSiOで形成した場合で
ある。これらの比較例33.34における初期C/N比
及び経時C/N比は、それぞれ49(dB)、  22
 (dB)及び52 (dB) 、  26 (dB)
であり、この発明の組成の保護膜の特性が優れているこ
とが確認される。
Comparative Examples 33 and 34 are Example 6 and Example 8, respectively.
This is the case where the protective film is formed of SiO with a thickness of 2000 Å. The initial C/N ratio and aging C/N ratio in Comparative Examples 33 and 34 were 49 (dB) and 22, respectively.
(dB) and 52 (dB), 26 (dB)
It is confirmed that the properties of the protective film of the composition of the present invention are excellent.

各実施例においては、組成がTbo2t Feo55C
Oo、z4゜なる光磁気記録媒体層を用いているが、必
ずしもこの組成に限らずQdFeCo系の光磁気記録媒
体層など他の光磁気記録媒体層を用いることも出来る。
In each example, the composition is Tbo2t Feo55C
Although a magneto-optical recording medium layer having an angle of Oo, z4° is used, the composition is not necessarily limited to this, and other magneto-optical recording medium layers such as a QdFeCo-based magneto-optical recording medium layer can also be used.

また各実施例においては、透明基板1上に直接光磁気記
録媒体層2を形成し、この光磁気記録媒体層2上に保護
膜3を設けたものと、透明基板1上に保護膜3−1.3
−2で挾まれるようにして、光磁気記録媒体層2が形成
されたものを説明した。
In each embodiment, the magneto-optical recording medium layer 2 is directly formed on the transparent substrate 1 and the protective film 3 is provided on the magneto-optical recording medium layer 2, and the protective film 3 is formed on the transparent substrate 1. 1.3
The case where the magneto-optical recording medium layer 2 is formed so as to be sandwiched by -2 has been described.

しかし、この発明は各実施例の構成に限るものでなく、
例えば光磁気記録媒体層2の透明基板1と反対側の面に
形成される保護膜上にさらに紫外線硬化樹脂を塗布した
構成のものも実現可能である。或は、この発明で構成さ
れる光磁気ディスクを対向させ、スペーサにより対向空
間を形成し2、この対向空間内に不活性ガスを充填した
構成のものも実現可能である。
However, this invention is not limited to the configuration of each embodiment,
For example, it is also possible to realize a structure in which an ultraviolet curing resin is further applied on a protective film formed on the surface of the magneto-optical recording medium layer 2 opposite to the transparent substrate 1. Alternatively, it is also possible to realize a structure in which the magneto-optical disks constructed according to the present invention are opposed to each other, an opposing space is formed by a spacer 2, and this opposing space is filled with an inert gas.

「発明の効果」 以上詳細に説明したように、この発明によると透明基板
上に光磁気記録媒体層が形成される光磁気ディスクにお
いて、少なくとも光磁気記録媒体層の透明基板と反対側
の面に組成MOxもしくはDOyもしくはMzDl−2
ow(MはZrもしくはCr、DはHfもしくはZn 
)で表わされる保護膜を膜厚が10001.9.0(Z
(1及び0.4 fw−f 1.9なる条件を設定する
ことにより、光磁気記録媒体層を非通気性及び非透湿性
を維持した状態で保護し、長期耐久性を有し、成膜工程
が簡単で優れた光磁気記録再生特性を有する光磁気ディ
スクを提供することが出来る。
"Effects of the Invention" As explained in detail above, according to the present invention, in a magneto-optical disk in which a magneto-optical recording medium layer is formed on a transparent substrate, at least the surface of the magneto-optical recording medium layer opposite to the transparent substrate is Composition MOx or DOy or MzDl-2
ow (M is Zr or Cr, D is Hf or Zn
) with a film thickness of 10001.9.0 (Z
(By setting the conditions of 1 and 0.4 fw-f 1.9, the magneto-optical recording medium layer is protected while maintaining air-impermeability and moisture-impermeability, and has long-term durability. It is possible to provide a magneto-optical disk that has a simple process and excellent magneto-optical recording and reproducing characteristics.

【図面の簡単な説明】[Brief explanation of drawings]

第1図及び第2図は、それぞれこの発明の光磁気ディス
クの実施例の構成を示す断面図である。 1:透明基板、2:光磁気記録媒体層、3,3−1.3
−2:保護膜。
FIGS. 1 and 2 are sectional views showing the configuration of an embodiment of the magneto-optical disk of the present invention, respectively. 1: Transparent substrate, 2: Magneto-optical recording medium layer, 3, 3-1.3
-2: Protective film.

Claims (1)

【特許請求の範囲】[Claims] (1)透明基板上に光磁気記録媒体層が形成され、この
光磁気記録媒体層に光ビームを照射して情報の書込み及
び読み出しを行う光磁気ディスクにおいて、少なくとも
前記光磁気記録媒体層の前記透明基板と反対側の面に組
成がMO_xもしくはDO_yもしくはM_zD_1_
−_zO_w(MはZrもしくはCr、DはHfもしく
はZn)で表わされ、前記光磁気記録媒体層を保護する
膜厚が1000Å乃至5000Åの保護膜が形成され、
前記x、y、z及びwがそれぞれ0.6≦x≦1.9、
0.4≦y≦1.9、0<z<1及び0.4≦w≦1.
9に選定されてなることを特徴とする光磁気ディスク。
(1) In a magneto-optical disk in which a magneto-optical recording medium layer is formed on a transparent substrate, and in which information is written and read by irradiating the magneto-optical recording medium layer with a light beam, at least The composition is MO_x or DO_y or M_zD_1_ on the surface opposite to the transparent substrate.
-_zO_w (M is Zr or Cr, D is Hf or Zn), and a protective film with a thickness of 1000 Å to 5000 Å is formed to protect the magneto-optical recording medium layer,
The x, y, z and w are each 0.6≦x≦1.9,
0.4≦y≦1.9, 0<z<1 and 0.4≦w≦1.
A magneto-optical disk characterized by being selected as No. 9.
JP60172158A 1985-08-05 1985-08-05 Magneto-optical disk Expired - Lifetime JPH0731832B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60172158A JPH0731832B2 (en) 1985-08-05 1985-08-05 Magneto-optical disk

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60172158A JPH0731832B2 (en) 1985-08-05 1985-08-05 Magneto-optical disk

Publications (2)

Publication Number Publication Date
JPS6233350A true JPS6233350A (en) 1987-02-13
JPH0731832B2 JPH0731832B2 (en) 1995-04-10

Family

ID=15936644

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60172158A Expired - Lifetime JPH0731832B2 (en) 1985-08-05 1985-08-05 Magneto-optical disk

Country Status (1)

Country Link
JP (1) JPH0731832B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01285041A (en) * 1988-05-11 1989-11-16 Toshiba Corp Optical memory medium

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59146463A (en) * 1983-02-09 1984-08-22 Canon Inc Manufacturing method for photothermal magnetic recording media
JPS6055537A (en) * 1983-09-06 1985-03-30 Nippon Kogaku Kk <Nikon> Magneto-optical reproduction method using asymmetric kerr effect and recording medium and reproducer using said reproduction method
JPS6134747A (en) * 1984-07-27 1986-02-19 Hitachi Ltd Magneto-optical multilayer media

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59146463A (en) * 1983-02-09 1984-08-22 Canon Inc Manufacturing method for photothermal magnetic recording media
JPS6055537A (en) * 1983-09-06 1985-03-30 Nippon Kogaku Kk <Nikon> Magneto-optical reproduction method using asymmetric kerr effect and recording medium and reproducer using said reproduction method
JPS6134747A (en) * 1984-07-27 1986-02-19 Hitachi Ltd Magneto-optical multilayer media

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01285041A (en) * 1988-05-11 1989-11-16 Toshiba Corp Optical memory medium

Also Published As

Publication number Publication date
JPH0731832B2 (en) 1995-04-10

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