JPS6234432U - - Google Patents
Info
- Publication number
- JPS6234432U JPS6234432U JP12569885U JP12569885U JPS6234432U JP S6234432 U JPS6234432 U JP S6234432U JP 12569885 U JP12569885 U JP 12569885U JP 12569885 U JP12569885 U JP 12569885U JP S6234432 U JPS6234432 U JP S6234432U
- Authority
- JP
- Japan
- Prior art keywords
- chuck
- semiconductor
- testing
- prober
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図はこの考案の一実施例を示す構成図、第
２図は半導体検査用プローバーにおいてインクの
打点を説明するための説明図である。
図において、１はチヤツク、２はウエハー、３
はインク付着装置、５は付着したインク、１０は
掃除機、２０はプローバーの枠体、２２は支持枠
である。なお、図中、同一符号は夫々同一又は相
当部分を示す。
FIG. 1 is a block diagram showing an embodiment of this invention, and FIG. 2 is an explanatory diagram for explaining ink dots in a semiconductor testing prober. In the figure, 1 is a chuck, 2 is a wafer, and 3 is a chuck.
5 is an ink adhesion device, 5 is the adhered ink, 10 is a vacuum cleaner, 20 is a frame of a prober, and 22 is a support frame. In addition, in the figures, the same reference numerals indicate the same or corresponding parts, respectively.
Claims (1)
バーにおいて、検査を完了した前記ウエハーをチ
ヤツクからアンロードした後チヤツクに付着した
インクを掃除する掃除機を設けたことを特徴とす
る半導体検査用プローバー。 A semiconductor testing prober for testing a semiconductor wafer, characterized in that the semiconductor testing prober is equipped with a vacuum cleaner for cleaning ink adhering to the chuck after unloading the tested wafer from the chuck.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12569885U JPS6234432U (en) | 1985-08-19 | 1985-08-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12569885U JPS6234432U (en) | 1985-08-19 | 1985-08-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6234432U true JPS6234432U (en) | 1987-02-28 |
Family
ID=31018822
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12569885U Pending JPS6234432U (en) | 1985-08-19 | 1985-08-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6234432U (en) |
-
1985
- 1985-08-19 JP JP12569885U patent/JPS6234432U/ja active Pending
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