JPH0213733U - - Google Patents
Info
- Publication number
- JPH0213733U JPH0213733U JP9070488U JP9070488U JPH0213733U JP H0213733 U JPH0213733 U JP H0213733U JP 9070488 U JP9070488 U JP 9070488U JP 9070488 U JP9070488 U JP 9070488U JP H0213733 U JPH0213733 U JP H0213733U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- stage
- attract
- evaluating
- fix
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は、本考案の一実施例であるウエハーブ
ローバ装置の図である。第２図は、従来のウエハ
ープローバ装置の図である。
１，１１…下側ステージ、２…上側ステージ、
３，３１…バキユーム用コード、４，４１…バキ
ユーム用コード接続部。
FIG. 1 is a diagram of a wafer blobber device which is an embodiment of the present invention. FIG. 2 is a diagram of a conventional wafer prober device. 1, 11...lower stage, 2...upper stage,
3, 31...Vacyum cord, 4,41...Vacyum cord connection part.
Claims (1)
別するウエハーブローバ装置において、ウエハー
の下側および上側にステージを設け、ウエハーを
吸着し固定することを特徴とするウエハープロー
バ装置。 A wafer prober device for evaluating and sorting semiconductor integrated circuits in a wafer state, characterized in that a stage is provided below and above the wafer to attract and fix the wafer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9070488U JPH0213733U (en) | 1988-07-08 | 1988-07-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9070488U JPH0213733U (en) | 1988-07-08 | 1988-07-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0213733U true JPH0213733U (en) | 1990-01-29 |
Family
ID=31315218
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9070488U Pending JPH0213733U (en) | 1988-07-08 | 1988-07-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0213733U (en) |
-
1988
- 1988-07-08 JP JP9070488U patent/JPH0213733U/ja active Pending