JPS623572U - - Google Patents
Info
- Publication number
- JPS623572U JPS623572U JP9430485U JP9430485U JPS623572U JP S623572 U JPS623572 U JP S623572U JP 9430485 U JP9430485 U JP 9430485U JP 9430485 U JP9430485 U JP 9430485U JP S623572 U JPS623572 U JP S623572U
- Authority
- JP
- Japan
- Prior art keywords
- target
- backing plate
- sputtering
- pedestal
- locked
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図はこの考案の第一の実施例を示す縦断側
面図、第２図はターゲツト取り外し時の縦断側面
図、第３図はこの考案の第二の実施例を示す縦断
側面図、第４図はスパツタリング装置の縦断側面
図、第５図は従来の一例を示す縦断側面図である
。
４…ターゲツト機構、７…台座、１２…ターゲ
ツト、１３…ターゲツト材、１４…バツキングプ
レート、１７…係止溝（係止部）、１８…交換用
器具、２４…鍔（係止部）、２７…工具（交換用
器具）。
Fig. 1 is a vertical side view showing the first embodiment of this invention, Fig. 2 is a longitudinal side view when the target is removed, Fig. 3 is a longitudinal side view showing the second embodiment of this invention, and Fig. 4 is a longitudinal side view showing the second embodiment of this invention. The figure is a vertical side view of a sputtering device, and FIG. 5 is a vertical side view showing an example of a conventional sputtering device. 4... Target mechanism, 7... Pedestal, 12... Target, 13... Target material, 14... Backing plate, 17... Locking groove (locking part), 18... Replacement instrument, 24... Collar (locking part), 27...Tool (replacement equipment).
Claims (1)
形成したターゲツトを、マグネトロンスパツタ用
永久磁石を保持する台座に着脱自在に取り付けた
ターゲツト機構において、前記ターゲツトのバツ
キングプレートの側面に交換用器具が係止される
係止部を形成したことを特徴とするスパツタリン
グ用ターゲツト。 In a target mechanism in which a target formed by fixing a target material to a backing plate is removably attached to a pedestal that holds a permanent magnet for magnetron sputtering, a replacement device is locked to the side surface of the backing plate of the target. A sputtering target, characterized in that a locking portion is formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9430485U JPS623572U (en) | 1985-06-21 | 1985-06-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9430485U JPS623572U (en) | 1985-06-21 | 1985-06-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS623572U true JPS623572U (en) | 1987-01-10 |
Family
ID=30652742
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9430485U Pending JPS623572U (en) | 1985-06-21 | 1985-06-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS623572U (en) |
-
1985
- 1985-06-21 JP JP9430485U patent/JPS623572U/ja active Pending