JPS6236065U - - Google Patents
Info
- Publication number
- JPS6236065U JPS6236065U JP12085885U JP12085885U JPS6236065U JP S6236065 U JPS6236065 U JP S6236065U JP 12085885 U JP12085885 U JP 12085885U JP 12085885 U JP12085885 U JP 12085885U JP S6236065 U JPS6236065 U JP S6236065U
- Authority
- JP
- Japan
- Prior art keywords
- side electrode
- target side
- vacuum chamber
- covered
- pair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案の一実施例を示す断面図、第２
図は第１図の本考案の一実施例に到達する過程の
断面図である。
図中の符号１は皿状ターゲツト、２は基板、３
はガス放電プラズマ、４は蒸発物質、５はターゲ
ツトシールド、６は絶縁物、７はガス導入口、８
は排気口、９は直流高電圧源、１０は原料粉末、
１１は真空室である。
Fig. 1 is a sectional view showing one embodiment of the present invention;
The figure is a cross-sectional view of the process of arriving at one embodiment of the present invention shown in FIG. In the figure, 1 is a dish-shaped target, 2 is a substrate, and 3 is a plate-shaped target.
is a gas discharge plasma, 4 is an evaporated substance, 5 is a target shield, 6 is an insulator, 7 is a gas inlet, 8
is an exhaust port, 9 is a DC high voltage source, 10 is a raw material powder,
11 is a vacuum chamber.
Claims (1)
パツタリング装置において、ターゲツト側電極を
凹状に形成し、かつ該ターゲツト側電極の縁部を
電気絶縁材で覆つてなるスパツタリング装置。 A sputtering device having a pair of electrodes facing each other in a vacuum chamber, the target side electrode being formed in a concave shape, and the edge of the target side electrode being covered with an electrically insulating material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12085885U JPS6236065U (en) | 1985-08-08 | 1985-08-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12085885U JPS6236065U (en) | 1985-08-08 | 1985-08-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6236065U true JPS6236065U (en) | 1987-03-03 |
Family
ID=31009572
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12085885U Pending JPS6236065U (en) | 1985-08-08 | 1985-08-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6236065U (en) |
-
1985
- 1985-08-08 JP JP12085885U patent/JPS6236065U/ja active Pending