JPS6237054U - - Google Patents
Info
- Publication number
- JPS6237054U JPS6237054U JP12900485U JP12900485U JPS6237054U JP S6237054 U JPS6237054 U JP S6237054U JP 12900485 U JP12900485 U JP 12900485U JP 12900485 U JP12900485 U JP 12900485U JP S6237054 U JPS6237054 U JP S6237054U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- vacuum chamber
- processing apparatus
- shower tube
- molded article
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12900485U JPH0315531Y2 ( ) | 1985-08-24 | 1985-08-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12900485U JPH0315531Y2 ( ) | 1985-08-24 | 1985-08-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6237054U true JPS6237054U ( ) | 1987-03-05 |
| JPH0315531Y2 JPH0315531Y2 ( ) | 1991-04-04 |
Family
ID=31025188
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12900485U Expired JPH0315531Y2 ( ) | 1985-08-24 | 1985-08-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0315531Y2 ( ) |
-
1985
- 1985-08-24 JP JP12900485U patent/JPH0315531Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0315531Y2 ( ) | 1991-04-04 |