JPS6237054U - - Google Patents

Info

Publication number
JPS6237054U
JPS6237054U JP12900485U JP12900485U JPS6237054U JP S6237054 U JPS6237054 U JP S6237054U JP 12900485 U JP12900485 U JP 12900485U JP 12900485 U JP12900485 U JP 12900485U JP S6237054 U JPS6237054 U JP S6237054U
Authority
JP
Japan
Prior art keywords
plasma
vacuum chamber
processing apparatus
shower tube
molded article
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12900485U
Other languages
English (en)
Other versions
JPH0315531Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12900485U priority Critical patent/JPH0315531Y2/ja
Publication of JPS6237054U publication Critical patent/JPS6237054U/ja
Application granted granted Critical
Publication of JPH0315531Y2 publication Critical patent/JPH0315531Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Description

【図面の簡単な説明】
第１図は本考案のプラズマ処理装置の一実施例
を示す概略説明図、第２図は第１図のＸ―Ｘ線拡
大断面図、第３図は本考案のプラズマ処理装置に
用いられる回転式プラズマシヤワー管の一実施例
の平面図である。 （図面の主要符号）、１：真空チヤンバ、２：
駆動装置、５：プラズマ発生器、７：プラズマシ
ヤワー管、９：被処理物、１０：排気口。

Claims (1)

    【実用新案登録請求の範囲】
  1. 真空チヤンバ内に収容した樹脂成形品にプラズ
    マを照射して表面改質するためのプラズマ処理装
    置において、真空チヤンバ内に乱気流を発生させ
    る回転式のプラズマシヤワー管を設けたことを特
    徴とするプラズマ処理装置。
JP12900485U 1985-08-24 1985-08-24 Expired JPH0315531Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12900485U JPH0315531Y2 (ja) 1985-08-24 1985-08-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12900485U JPH0315531Y2 (ja) 1985-08-24 1985-08-24

Publications (2)

Publication Number Publication Date
JPS6237054U true JPS6237054U (ja) 1987-03-05
JPH0315531Y2 JPH0315531Y2 (ja) 1991-04-04

Family

ID=31025188

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12900485U Expired JPH0315531Y2 (ja) 1985-08-24 1985-08-24

Country Status (1)

Country Link
JP (1) JPH0315531Y2 (ja)

Also Published As

Publication number Publication date
JPH0315531Y2 (ja) 1991-04-04

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