JPS6237200U - - Google Patents

Info

Publication number
JPS6237200U
JPS6237200U JP1985128544U JP12854485U JPS6237200U JP S6237200 U JPS6237200 U JP S6237200U JP 1985128544 U JP1985128544 U JP 1985128544U JP 12854485 U JP12854485 U JP 12854485U JP S6237200 U JPS6237200 U JP S6237200U
Authority
JP
Japan
Prior art keywords
plasma
gas introduction
gas
introduction tube
electrode plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1985128544U
Other languages
English (en)
Other versions
JPH0528720Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985128544U priority Critical patent/JPH0528720Y2/ja
Publication of JPS6237200U publication Critical patent/JPS6237200U/ja
Application granted granted Critical
Publication of JPH0528720Y2 publication Critical patent/JPH0528720Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図はこの考案の一実施例の部分断面図、第
２図は従来の装置の断面図である。 ２……電極部、４……電極板、６，７，１６，
１７……ガス導入管、１０……絶縁管。

Claims (1)

    【実用新案登録請求の範囲】
  1. ガス導入管から導入されたガスをプラズマ放電
    電極板から噴出させ、前記ガス導入管に沿つて前
    記電極板に電力を供給することによつてプラズマ
    の発生を行なうプラズマ発生装置において、前記
    ガス導入管の内部に電気的絶縁管を設け、前記絶
    縁管を通して前記ガスの導入を行なうことを特徴
    とするプラズマ発生装置。
JP1985128544U 1985-08-22 1985-08-22 Expired - Lifetime JPH0528720Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985128544U JPH0528720Y2 (ja) 1985-08-22 1985-08-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985128544U JPH0528720Y2 (ja) 1985-08-22 1985-08-22

Publications (2)

Publication Number Publication Date
JPS6237200U true JPS6237200U (ja) 1987-03-05
JPH0528720Y2 JPH0528720Y2 (ja) 1993-07-23

Family

ID=31024312

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985128544U Expired - Lifetime JPH0528720Y2 (ja) 1985-08-22 1985-08-22

Country Status (1)

Country Link
JP (1) JPH0528720Y2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04182997A (ja) * 1990-11-16 1992-06-30 Inter Nitsukusu Kk 高速サンプル・ホールド回路
JP2006100305A (ja) * 2004-09-28 2006-04-13 Asm Japan Kk プラズマ処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04182997A (ja) * 1990-11-16 1992-06-30 Inter Nitsukusu Kk 高速サンプル・ホールド回路
JP2006100305A (ja) * 2004-09-28 2006-04-13 Asm Japan Kk プラズマ処理装置

Also Published As

Publication number Publication date
JPH0528720Y2 (ja) 1993-07-23

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