JPS6244355U - - Google Patents

Info

Publication number
JPS6244355U
JPS6244355U JP13293185U JP13293185U JPS6244355U JP S6244355 U JPS6244355 U JP S6244355U JP 13293185 U JP13293185 U JP 13293185U JP 13293185 U JP13293185 U JP 13293185U JP S6244355 U JPS6244355 U JP S6244355U
Authority
JP
Japan
Prior art keywords
convex portions
substrate
concave
light
recognition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13293185U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0138698Y2 (2
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13293185U priority Critical patent/JPH0138698Y2/ja
Publication of JPS6244355U publication Critical patent/JPS6244355U/ja
Application granted granted Critical
Publication of JPH0138698Y2 publication Critical patent/JPH0138698Y2/ja
Expired legal-status Critical Current

Links

JP13293185U 1985-08-30 1985-08-30 Expired JPH0138698Y2 (2)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13293185U JPH0138698Y2 (2) 1985-08-30 1985-08-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13293185U JPH0138698Y2 (2) 1985-08-30 1985-08-30

Publications (2)

Publication Number Publication Date
JPS6244355U true JPS6244355U (2) 1987-03-17
JPH0138698Y2 JPH0138698Y2 (2) 1989-11-20

Family

ID=31032776

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13293185U Expired JPH0138698Y2 (2) 1985-08-30 1985-08-30

Country Status (1)

Country Link
JP (1) JPH0138698Y2 (2)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010107613A (ja) * 2008-10-29 2010-05-13 Tosoh Corp フォトマスク用基板およびその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010107613A (ja) * 2008-10-29 2010-05-13 Tosoh Corp フォトマスク用基板およびその製造方法

Also Published As

Publication number Publication date
JPH0138698Y2 (2) 1989-11-20

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