JPS6252925U - - Google Patents
Info
- Publication number
- JPS6252925U JPS6252925U JP14436185U JP14436185U JPS6252925U JP S6252925 U JPS6252925 U JP S6252925U JP 14436185 U JP14436185 U JP 14436185U JP 14436185 U JP14436185 U JP 14436185U JP S6252925 U JPS6252925 U JP S6252925U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- crucible
- shield
- replenishment
- port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 5
- 230000008020 evaporation Effects 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 4
- 238000005566 electron beam evaporation Methods 0.000 claims description 3
- 238000011109 contamination Methods 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Description
第１図ないし第５図はこの考案の電子ビーム蒸
発源装置の１実施例を示し、第１図は前方からの
斜視図、第２図は後方からの一部の斜視図、第３
図は一部の背面図、第４図および第５図は一部の
左側面図および右側面図、第６図、第７図はそれ
ぞれ従来の電子ビーム蒸発源装置の断面図である
。
１……本体、２……るつぼ、３……蒸発材料、
４……電子ビーム発生源、１１……電子ビーム照
射口、１３……遮蔽体、１９……シヤツタ、２０
……補充口、２１……ガイド体、２２……補充材
料、２６……操作体。
1 to 5 show one embodiment of the electron beam evaporation source device of this invention, in which FIG. 1 is a perspective view from the front, FIG. 2 is a partial perspective view from the rear, and FIG.
The figure shows a rear view of a part, FIGS. 4 and 5 show a left side view and a right side view of a part, and FIGS. 6 and 7 show cross-sectional views of a conventional electron beam evaporation source device, respectively. 1... Main body, 2... Crucible, 3... Evaporation material,
4... Electron beam generation source, 11... Electron beam irradiation port, 13... Shielding body, 19... Shutter, 20
... Refill port, 21 ... Guide body, 22 ... Replenishment material, 26 ... Operation body.
Claims (1)
収容された蒸発材料と、前記るつぼに設けられた
汚染防止用の筒状の遮蔽体と、前記遮蔽体に形成
された電子ビーム照射口と、前記照射口を介して
前記蒸発材料に電子ビームを照射する電子ビーム
発生源と、前記遮蔽体の開口部を開閉するシヤツ
タと、前記遮蔽体に形成された材料補充口と、前
記補充口に連設されたガイド体と、前記ガイド体
に載置され前記蒸発材料と同一材質からなる複数
個の塊状の補充材料と、前記補充材料を前記るつ
ぼに補充する操作体とを備えた電子ビーム蒸発源
装置。 a crucible formed in the apparatus main body, an evaporation material contained in the crucible, a cylindrical shield for preventing contamination provided in the crucible, an electron beam irradiation port formed in the shield, and the an electron beam generation source that irradiates the evaporation material with an electron beam through an irradiation port; a shutter that opens and closes the opening of the shield; a material replenishment port formed in the shield; and a material replenishment port that is connected to the refill port. an electron beam evaporation source device comprising: a guide body, a plurality of bulk replenishment materials placed on the guide body and made of the same material as the evaporation material; and an operating body for replenishing the crucible with the replenishment material. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14436185U JPS6252925U (en) | 1985-09-20 | 1985-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14436185U JPS6252925U (en) | 1985-09-20 | 1985-09-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6252925U true JPS6252925U (en) | 1987-04-02 |
Family
ID=31054888
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14436185U Pending JPS6252925U (en) | 1985-09-20 | 1985-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6252925U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009161828A (en) * | 2008-01-09 | 2009-07-23 | Showa Shinku:Kk | Vacuum deposition equipment |
| JP2013104106A (en) * | 2011-11-15 | 2013-05-30 | Mitsubishi Electric Corp | Vapor deposition device |
-
1985
- 1985-09-20 JP JP14436185U patent/JPS6252925U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009161828A (en) * | 2008-01-09 | 2009-07-23 | Showa Shinku:Kk | Vacuum deposition equipment |
| JP2013104106A (en) * | 2011-11-15 | 2013-05-30 | Mitsubishi Electric Corp | Vapor deposition device |