JPS6257099B2 - - Google Patents
Info
- Publication number
- JPS6257099B2 JPS6257099B2 JP55097550A JP9755080A JPS6257099B2 JP S6257099 B2 JPS6257099 B2 JP S6257099B2 JP 55097550 A JP55097550 A JP 55097550A JP 9755080 A JP9755080 A JP 9755080A JP S6257099 B2 JPS6257099 B2 JP S6257099B2
- Authority
- JP
- Japan
- Prior art keywords
- pusher
- push
- main body
- push member
- stroke
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
- H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H10P72/3411—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
Landscapes
- De-Stacking Of Articles (AREA)
- Supply And Installment Of Electrical Components (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9755080A JPS5723237A (en) | 1980-07-18 | 1980-07-18 | Spiral pusher |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9755080A JPS5723237A (en) | 1980-07-18 | 1980-07-18 | Spiral pusher |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5723237A JPS5723237A (en) | 1982-02-06 |
| JPS6257099B2 true JPS6257099B2 (de) | 1987-11-30 |
Family
ID=14195343
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9755080A Granted JPS5723237A (en) | 1980-07-18 | 1980-07-18 | Spiral pusher |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5723237A (de) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0613149Y2 (ja) * | 1988-03-11 | 1994-04-06 | 天竜精機株式会社 | 筒状容器から部品を取り出すための装置 |
| GB0413117D0 (en) * | 2004-06-11 | 2004-07-14 | Boc Group Plc | Freeze dryer |
| GB0413115D0 (en) * | 2004-06-11 | 2004-07-14 | Boc Group Plc | Freeze dryer |
| JP4342397B2 (ja) * | 2004-07-30 | 2009-10-14 | 谷電機工業株式会社 | プリント基板等の板状物品のプッシャー |
| US20140166800A1 (en) * | 2012-12-13 | 2014-06-19 | Wu-Chih Hsieh | Control device for fastening strap unit |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS553146Y2 (de) * | 1975-12-10 | 1980-01-25 | ||
| JPS6048425B2 (ja) * | 1979-11-15 | 1985-10-26 | 松下電器産業株式会社 | 板状部品の自動供給装置 |
-
1980
- 1980-07-18 JP JP9755080A patent/JPS5723237A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5723237A (en) | 1982-02-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4618292A (en) | Controls for semiconductor wafer orientor | |
| EP0313466B1 (de) | Vorrichtung zum Positionieren eines Wafers | |
| NL190770B (nl) | Inrichting voor het produceren van een siliciumoxidelaag op halfgeleiderplaatjes. | |
| WO2002002282A1 (en) | Edge-gripping pre-aligner | |
| JPS53110257A (en) | Automatic vacuum cleaner | |
| JPS6257099B2 (de) | ||
| US4853880A (en) | Device for positioning a semi-conductor wafer | |
| US20190061165A1 (en) | Proximity robot blade detection and auto retraction | |
| JPS5745254A (en) | Automatic detector for amount of silicon wafer worked | |
| JP3247554B2 (ja) | 基板搬送装置およびこれを用いた露光装置 | |
| US2544122A (en) | Motion multiplying mechanism | |
| JPH0250455A (ja) | 半導体ウェハの搬送装置 | |
| GB1594792A (en) | Orientors for objects supported on air films | |
| JPH0679659A (ja) | 直進位置決め装置の原点、移動端の位置調整方法及び使用されるボールネジ一体形モータ | |
| JPS6325934A (ja) | ペレツトボンデイング装置 | |
| JP2545018B2 (ja) | 光センサによる位置決め方法 | |
| JP2974359B2 (ja) | 移動限界検知装置 | |
| JPS57191827A (en) | Moving magnetic head with reference position detecting mechanism | |
| SU379065A1 (ru) | УСТРОЙСТВО дл ОРИЕНТАЦИИ "ПОДЛОЖЕК | |
| JPH05149714A (ja) | 光学センサを用いた位置検出機構 | |
| JPH0110931Y2 (de) | ||
| JP2002148074A (ja) | 光学式位置検出装置 | |
| SU1208537A1 (ru) | Устройство дл контрол систем управлени подачей заготовок в штамповочных агрегатах | |
| JPH0538761U (ja) | 基板検出装置 | |
| JPS5716305A (en) | Distance detector |