JPS6257099B2 - - Google Patents

Info

Publication number
JPS6257099B2
JPS6257099B2 JP55097550A JP9755080A JPS6257099B2 JP S6257099 B2 JPS6257099 B2 JP S6257099B2 JP 55097550 A JP55097550 A JP 55097550A JP 9755080 A JP9755080 A JP 9755080A JP S6257099 B2 JPS6257099 B2 JP S6257099B2
Authority
JP
Japan
Prior art keywords
pusher
push
main body
push member
stroke
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55097550A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5723237A (en
Inventor
Tamotsu Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9755080A priority Critical patent/JPS5723237A/ja
Publication of JPS5723237A publication Critical patent/JPS5723237A/ja
Publication of JPS6257099B2 publication Critical patent/JPS6257099B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3411Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers

Landscapes

  • De-Stacking Of Articles (AREA)
  • Supply And Installment Of Electrical Components (AREA)
JP9755080A 1980-07-18 1980-07-18 Spiral pusher Granted JPS5723237A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9755080A JPS5723237A (en) 1980-07-18 1980-07-18 Spiral pusher

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9755080A JPS5723237A (en) 1980-07-18 1980-07-18 Spiral pusher

Publications (2)

Publication Number Publication Date
JPS5723237A JPS5723237A (en) 1982-02-06
JPS6257099B2 true JPS6257099B2 (de) 1987-11-30

Family

ID=14195343

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9755080A Granted JPS5723237A (en) 1980-07-18 1980-07-18 Spiral pusher

Country Status (1)

Country Link
JP (1) JPS5723237A (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0613149Y2 (ja) * 1988-03-11 1994-04-06 天竜精機株式会社 筒状容器から部品を取り出すための装置
GB0413117D0 (en) * 2004-06-11 2004-07-14 Boc Group Plc Freeze dryer
GB0413115D0 (en) * 2004-06-11 2004-07-14 Boc Group Plc Freeze dryer
JP4342397B2 (ja) * 2004-07-30 2009-10-14 谷電機工業株式会社 プリント基板等の板状物品のプッシャー
US20140166800A1 (en) * 2012-12-13 2014-06-19 Wu-Chih Hsieh Control device for fastening strap unit

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS553146Y2 (de) * 1975-12-10 1980-01-25
JPS6048425B2 (ja) * 1979-11-15 1985-10-26 松下電器産業株式会社 板状部品の自動供給装置

Also Published As

Publication number Publication date
JPS5723237A (en) 1982-02-06

Similar Documents

Publication Publication Date Title
US4618292A (en) Controls for semiconductor wafer orientor
EP0313466B1 (de) Vorrichtung zum Positionieren eines Wafers
NL190770B (nl) Inrichting voor het produceren van een siliciumoxidelaag op halfgeleiderplaatjes.
WO2002002282A1 (en) Edge-gripping pre-aligner
JPS53110257A (en) Automatic vacuum cleaner
JPS6257099B2 (de)
US4853880A (en) Device for positioning a semi-conductor wafer
US20190061165A1 (en) Proximity robot blade detection and auto retraction
JPS5745254A (en) Automatic detector for amount of silicon wafer worked
JP3247554B2 (ja) 基板搬送装置およびこれを用いた露光装置
US2544122A (en) Motion multiplying mechanism
JPH0250455A (ja) 半導体ウェハの搬送装置
GB1594792A (en) Orientors for objects supported on air films
JPH0679659A (ja) 直進位置決め装置の原点、移動端の位置調整方法及び使用されるボールネジ一体形モータ
JPS6325934A (ja) ペレツトボンデイング装置
JP2545018B2 (ja) 光センサによる位置決め方法
JP2974359B2 (ja) 移動限界検知装置
JPS57191827A (en) Moving magnetic head with reference position detecting mechanism
SU379065A1 (ru) УСТРОЙСТВО дл ОРИЕНТАЦИИ "ПОДЛОЖЕК
JPH05149714A (ja) 光学センサを用いた位置検出機構
JPH0110931Y2 (de)
JP2002148074A (ja) 光学式位置検出装置
SU1208537A1 (ru) Устройство дл контрол систем управлени подачей заготовок в штамповочных агрегатах
JPH0538761U (ja) 基板検出装置
JPS5716305A (en) Distance detector