JPS6258141B2 - - Google Patents

Info

Publication number
JPS6258141B2
JPS6258141B2 JP52128469A JP12846977A JPS6258141B2 JP S6258141 B2 JPS6258141 B2 JP S6258141B2 JP 52128469 A JP52128469 A JP 52128469A JP 12846977 A JP12846977 A JP 12846977A JP S6258141 B2 JPS6258141 B2 JP S6258141B2
Authority
JP
Japan
Prior art keywords
silicon oxide
oxide film
film
cross
photoresist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52128469A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5461479A (en
Inventor
Koji Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP12846977A priority Critical patent/JPS5461479A/ja
Publication of JPS5461479A publication Critical patent/JPS5461479A/ja
Publication of JPS6258141B2 publication Critical patent/JPS6258141B2/ja
Granted legal-status Critical Current

Links

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  • Weting (AREA)
JP12846977A 1977-10-25 1977-10-25 Manufacture for semiconductor device Granted JPS5461479A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12846977A JPS5461479A (en) 1977-10-25 1977-10-25 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12846977A JPS5461479A (en) 1977-10-25 1977-10-25 Manufacture for semiconductor device

Publications (2)

Publication Number Publication Date
JPS5461479A JPS5461479A (en) 1979-05-17
JPS6258141B2 true JPS6258141B2 (fr) 1987-12-04

Family

ID=14985492

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12846977A Granted JPS5461479A (en) 1977-10-25 1977-10-25 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS5461479A (fr)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4842682A (fr) * 1971-09-29 1973-06-21

Also Published As

Publication number Publication date
JPS5461479A (en) 1979-05-17

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